DE69307722D1 - Vorrichtung und verfahren zur inspektion transparenten materials - Google Patents

Vorrichtung und verfahren zur inspektion transparenten materials

Info

Publication number
DE69307722D1
DE69307722D1 DE69307722T DE69307722T DE69307722D1 DE 69307722 D1 DE69307722 D1 DE 69307722D1 DE 69307722 T DE69307722 T DE 69307722T DE 69307722 T DE69307722 T DE 69307722T DE 69307722 D1 DE69307722 D1 DE 69307722D1
Authority
DE
Germany
Prior art keywords
transparent materials
inspecting transparent
inspecting
materials
transparent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69307722T
Other languages
English (en)
Other versions
DE69307722T2 (de
Inventor
Yann Jutard
Jean-Jacques Sacre
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vantiva SA
Original Assignee
Thomson Multimedia SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson Multimedia SA filed Critical Thomson Multimedia SA
Publication of DE69307722D1 publication Critical patent/DE69307722D1/de
Application granted granted Critical
Publication of DE69307722T2 publication Critical patent/DE69307722T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/38—Concrete; Lime; Mortar; Gypsum; Bricks; Ceramics; Glass
    • G01N33/386—Glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8829—Shadow projection or structured background, e.g. for deflectometry
    • G01N2021/8832—Structured background, e.g. for transparent objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G01N2021/8962—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod for detecting separately opaque flaws and refracting flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G01N2021/8967—Discriminating defects on opposite sides or at different depths of sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/102—Video camera

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Textile Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE69307722T 1992-10-20 1993-10-13 Vorrichtung und verfahren zur inspektion transparenten materials Expired - Fee Related DE69307722T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9212526A FR2697086B1 (fr) 1992-10-20 1992-10-20 Procédé et dispositif d'inspection de matériau transparent.
PCT/FR1993/001015 WO1994009358A1 (fr) 1992-10-20 1993-10-13 Procede et dispositif d'inspection de materiau transparent

Publications (2)

Publication Number Publication Date
DE69307722D1 true DE69307722D1 (de) 1997-03-06
DE69307722T2 DE69307722T2 (de) 1997-06-12

Family

ID=9434692

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69307722T Expired - Fee Related DE69307722T2 (de) 1992-10-20 1993-10-13 Vorrichtung und verfahren zur inspektion transparenten materials

Country Status (10)

Country Link
US (1) US5598262A (de)
EP (1) EP0665951B1 (de)
JP (1) JPH08502361A (de)
KR (1) KR950704679A (de)
CZ (1) CZ101195A3 (de)
DE (1) DE69307722T2 (de)
FR (1) FR2697086B1 (de)
PL (1) PL172759B1 (de)
RU (1) RU95109712A (de)
WO (1) WO1994009358A1 (de)

Families Citing this family (42)

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US5715051A (en) * 1996-10-21 1998-02-03 Medar, Inc. Method and system for detecting defects in optically transmissive coatings formed on optical media substrates
KR100532238B1 (ko) * 1997-03-10 2006-02-28 신에쓰 가가꾸 고교 가부시끼가이샤 박판막 검사방법, 이에 사용되는 장치 및 검사시스템
GB9812091D0 (en) * 1998-06-05 1998-08-05 Glaverbel Defect detecting unit
GB2338309B (en) * 1998-06-13 2002-05-08 Neil Colin Hamilton Recognition apparatus for toughened glass
JP3330089B2 (ja) * 1998-09-30 2002-09-30 株式会社大協精工 ゴム製品の検査方法及び装置
ES2156071B1 (es) * 1999-03-01 2002-02-01 Sevilla Juan Antonio Lasso Equipo de luz coherente xenon para el control de calidad en la fabricacion del vidrio.
US6521905B1 (en) * 1999-09-22 2003-02-18 Nexpress Solutions Llc Method and device for detecting the position of a transparent moving conveyor belt
JP4647090B2 (ja) * 2000-12-13 2011-03-09 ローム株式会社 透明積層体の検査装置
US6885904B2 (en) * 2001-05-18 2005-04-26 Advanced Vision Particle Measurement, Inc. Control feedback system and method for bulk material industrial processes using automated object or particle analysis
US6629010B2 (en) 2001-05-18 2003-09-30 Advanced Vision Particle Measurement, Inc. Control feedback system and method for bulk material industrial processes using automated object or particle analysis
US7142295B2 (en) * 2003-03-05 2006-11-28 Corning Incorporated Inspection of transparent substrates for defects
DE102004005019A1 (de) * 2004-01-30 2005-08-18 Isra Glass Vision Gmbh Verfahren zur Bestimmung der Tiefe eines Fehlers in einem Glasband
US7122819B2 (en) * 2004-05-06 2006-10-17 Micron Technology, Inc. Method and apparatus for imager die package quality testing
DE102004026375B4 (de) * 2004-05-29 2007-03-22 Isra Glass Vision Gmbh Vorrichtung und Verfahren zur Detektion von Kratzern
US7199386B2 (en) * 2004-07-29 2007-04-03 General Electric Company System and method for detecting defects in a light-management film
KR101332786B1 (ko) * 2005-02-18 2013-11-25 쇼오트 아게 결함 검출 및/또는 분류 방법 및 장치
US7567344B2 (en) * 2006-05-12 2009-07-28 Corning Incorporated Apparatus and method for characterizing defects in a transparent substrate
US7369240B1 (en) 2006-07-20 2008-05-06 Litesentry Corporation Apparatus and methods for real-time adaptive inspection for glass production
US7551274B1 (en) 2007-02-28 2009-06-23 Lite Sentry Corporation Defect detection lighting system and methods for large glass sheets
KR20100004927A (ko) * 2007-03-16 2010-01-13 아사히 가세이 케미칼즈 가부시키가이샤 중공사 다공막의 결함 검사 방법, 결함 검사 장치 및 제조 방법
US7800749B2 (en) * 2007-05-31 2010-09-21 Corning Incorporated Inspection technique for transparent substrates
DE102007037812B4 (de) 2007-08-10 2023-03-16 Carl Zeiss Optotechnik GmbH Verfahren und Vorrichtung zur Detektion von Oberflächenfehlern eines Bauteils
KR20110099255A (ko) * 2008-11-25 2011-09-07 쓰리엠 이노베이티브 프로퍼티즈 컴파니 가요성 웨브를 세척하기 위한 장치 및 방법
JP4796160B2 (ja) * 2009-02-27 2011-10-19 三菱重工業株式会社 薄膜の検査装置及び検査方法
DE102010021853B4 (de) 2010-05-28 2012-04-26 Isra Vision Ag Einrichtung und Verfahren zur optischen Überprüfung eines Gegenstands
IT1402103B1 (it) * 2010-10-08 2013-08-28 Università Di Pisa Metodo e dispositivo per rilevare la posizione geometrica di un difetto in un oggetto
JPWO2012077683A1 (ja) * 2010-12-09 2014-05-19 旭硝子株式会社 ガラスリボン内欠陥測定方法およびガラスリボン内欠陥測定システム
JP5874139B2 (ja) * 2011-12-01 2016-03-02 国立大学法人東京工業大学 膜材料の欠陥の光学的観察方法および装置
US9790465B2 (en) 2013-04-30 2017-10-17 Corning Incorporated Spheroid cell culture well article and methods thereof
DE102013107215B3 (de) * 2013-07-09 2014-10-09 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung eines Spiegelsubstrat-Rohlings aus Titan-dotiertem Kieselglas für die EUV-Lithographie, sowie System zur Positionsbestimmung von Defekten in einem Rohling
DE202014102853U1 (de) 2014-06-23 2014-07-14 Oliver Gabriel Vorrichtung zur Detektion der optischen Güte einer transparenten Materialoberfläche sowie deren Verwendung
SG11201703493SA (en) 2014-10-29 2017-05-30 Corning Inc Cell culture insert
US11857970B2 (en) 2017-07-14 2024-01-02 Corning Incorporated Cell culture vessel
JP7195302B2 (ja) 2017-07-14 2022-12-23 コーニング インコーポレイテッド ３ｄ培養のための細胞培養容器及び３ｄ細胞の培養方法
EP3652290B1 (de) 2017-07-14 2022-05-04 Corning Incorporated 3d-zellkulturgefässe für manuellen oder automatischen medienaustausch
EP3649229B1 (de) 2018-07-13 2021-08-25 Corning Incorporated Zellkulturgefässe mit stabilisatorvorrichtungen
JP7171696B2 (ja) 2018-07-13 2022-11-15 コーニング インコーポレイテッド 相互接続されたウェルを有するマイクロプレートを備えた流体デバイス
CN111032851B (zh) 2018-07-13 2024-03-29 康宁股份有限公司 具有包含液体介质传递表面的侧壁的微腔皿
EP3657535B1 (de) 2018-11-20 2023-02-15 Simulacions Optiques S.L. Vorrichtung zur prüfung einer integrierten schaltung mit optoelektronischem emitter, herstellungsanlage und zugehöriges prüf- und herstellungsverfahren
EP3838470A1 (de) * 2019-12-17 2021-06-23 Bystronic Laser AG Fremdteil- und schlackendetektion an einem arbeitstisch
CN115997118A (zh) * 2020-08-04 2023-04-21 康宁公司 用于检查材料的方法和装置
CN113899760A (zh) * 2021-09-30 2022-01-07 长沙韶光铬版有限公司 一种玻璃基板的检测方法、装置、电子设备及存储介质

Family Cites Families (9)

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Publication number Priority date Publication date Assignee Title
US2042526A (en) * 1932-09-01 1936-06-02 Libbey Owens Ford Glass Co Sheet glass inspection apparatus
US3519362A (en) * 1968-03-12 1970-07-07 Ppg Industries Inc Glass color streak detector including a flexible background material biased against the glass
US3814946A (en) * 1972-12-04 1974-06-04 Asahi Glass Co Ltd Method of detecting defects in transparent and semitransparent bodies
JPS61207953A (ja) * 1985-03-12 1986-09-16 Nec Corp 自動外観検査装置
JPS6232345A (ja) * 1985-08-02 1987-02-12 Yaskawa Electric Mfg Co Ltd 欠点検出装置
DE3611574A1 (de) * 1986-04-07 1987-10-08 Georg Markthaler Vorrichtung zur qualitaetskontrolle
DE3882905T2 (de) * 1987-05-27 1994-03-10 Nippon Sheet Glass Co Ltd Fühler zur unterscheidung von fehlern in lichtdurchlassendem bahnförmigem material.
DE3816392A1 (de) * 1988-05-13 1989-11-23 Ver Glaswerke Gmbh Verfahren zur bestimmung der optischen qualitaet von flachglas oder flachglasprodukten
DE3926349A1 (de) * 1989-08-09 1991-02-14 Sick Optik Elektronik Erwin Optische fehlerinspektionsvorrichtung

Also Published As

Publication number Publication date
FR2697086A1 (fr) 1994-04-22
RU95109712A (ru) 1996-12-27
JPH08502361A (ja) 1996-03-12
FR2697086B1 (fr) 1994-12-09
EP0665951A1 (de) 1995-08-09
PL172759B1 (en) 1997-11-28
CZ101195A3 (en) 1996-11-13
KR950704679A (ko) 1995-11-20
US5598262A (en) 1997-01-28
EP0665951B1 (de) 1997-01-22
PL308462A1 (en) 1995-07-24
WO1994009358A1 (fr) 1994-04-28
DE69307722T2 (de) 1997-06-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee