DE69307021T2 - Sonde eines Rastertunnelmikroskops und Verfahren zur deren Herstellung - Google Patents

Sonde eines Rastertunnelmikroskops und Verfahren zur deren Herstellung

Info

Publication number
DE69307021T2
DE69307021T2 DE69307021T DE69307021T DE69307021T2 DE 69307021 T2 DE69307021 T2 DE 69307021T2 DE 69307021 T DE69307021 T DE 69307021T DE 69307021 T DE69307021 T DE 69307021T DE 69307021 T2 DE69307021 T2 DE 69307021T2
Authority
DE
Germany
Prior art keywords
production
scanning tunneling
tunneling microscope
microscope probe
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69307021T
Other languages
English (en)
Other versions
DE69307021D1 (de
Inventor
Osamu Kusumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE69307021D1 publication Critical patent/DE69307021D1/de
Application granted granted Critical
Publication of DE69307021T2 publication Critical patent/DE69307021T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
    • G01Q70/12—Nanotube tips
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/875—Scanning probe structure with tip detail
    • Y10S977/878—Shape/taper
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/875—Scanning probe structure with tip detail
    • Y10S977/879—Material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Radiology & Medical Imaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
DE69307021T 1992-06-03 1993-06-01 Sonde eines Rastertunnelmikroskops und Verfahren zur deren Herstellung Expired - Fee Related DE69307021T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4142401A JP2917674B2 (ja) 1992-06-03 1992-06-03 走査トンネル顕微鏡用探針およびその製造方法

Publications (2)

Publication Number Publication Date
DE69307021D1 DE69307021D1 (de) 1997-02-13
DE69307021T2 true DE69307021T2 (de) 1997-04-17

Family

ID=15314493

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69307021T Expired - Fee Related DE69307021T2 (de) 1992-06-03 1993-06-01 Sonde eines Rastertunnelmikroskops und Verfahren zur deren Herstellung

Country Status (4)

Country Link
US (1) US5357109A (de)
EP (1) EP0572972B1 (de)
JP (1) JP2917674B2 (de)
DE (1) DE69307021T2 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5348638A (en) * 1992-01-16 1994-09-20 Matsushita Electric Industrial Co., Ltd. Method of manufacturing a probe for a scanning tunneling microscope
US5500607A (en) * 1993-12-22 1996-03-19 International Business Machines Corporation Probe-oxide-semiconductor method and apparatus for measuring oxide charge on a semiconductor wafer
US5679952A (en) * 1994-05-23 1997-10-21 Hitachi, Ltd. Scanning probe microscope
US5751683A (en) * 1995-07-24 1998-05-12 General Nanotechnology, L.L.C. Nanometer scale data storage device and associated positioning system
US6337479B1 (en) 1994-07-28 2002-01-08 Victor B. Kley Object inspection and/or modification system and method
US6339217B1 (en) 1995-07-28 2002-01-15 General Nanotechnology Llc Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements
US6353219B1 (en) 1994-07-28 2002-03-05 Victor B. Kley Object inspection and/or modification system and method
US6507553B2 (en) 1995-07-24 2003-01-14 General Nanotechnology Llc Nanometer scale data storage device and associated positioning system
US5630932A (en) * 1995-09-06 1997-05-20 Molecular Imaging Corporation Tip etching system and method for etching platinum-containing wire
US5874668A (en) 1995-10-24 1999-02-23 Arch Development Corporation Atomic force microscope for biological specimens
US5892223A (en) * 1997-06-30 1999-04-06 Harris Corporation Multilayer microtip probe and method
US6139759A (en) * 1997-07-08 2000-10-31 International Business Machines Corporation Method of manufacturing silicided silicon microtips for scanning probe microscopy
DE69721986T2 (de) * 1997-08-27 2004-02-12 Imec Vzw Taststift-Konfiguration sowie Herstellungsverfahren und Verwendung von Taststiften
US7196328B1 (en) 2001-03-08 2007-03-27 General Nanotechnology Llc Nanomachining method and apparatus
US6787768B1 (en) 2001-03-08 2004-09-07 General Nanotechnology Llc Method and apparatus for tool and tip design for nanomachining and measurement
US6752008B1 (en) 2001-03-08 2004-06-22 General Nanotechnology Llc Method and apparatus for scanning in scanning probe microscopy and presenting results
US6923044B1 (en) 2001-03-08 2005-08-02 General Nanotechnology Llc Active cantilever for nanomachining and metrology
US6802646B1 (en) 2001-04-30 2004-10-12 General Nanotechnology Llc Low-friction moving interfaces in micromachines and nanomachines
AU6061100A (en) 1999-07-01 2001-01-22 General Nanotechnology, Llc Object inspection and/or modification system and method
DE19957824C2 (de) * 1999-11-19 2002-04-18 Hahn Meitner Inst Berlin Gmbh Verfahren zur Herstellung von feinsten Spitzen im Subnanometerbereich
US6931710B2 (en) 2001-01-30 2005-08-23 General Nanotechnology Llc Manufacturing of micro-objects such as miniature diamond tool tips
US7253407B1 (en) 2001-03-08 2007-08-07 General Nanotechnology Llc Active cantilever for nanomachining and metrology
US7053369B1 (en) 2001-10-19 2006-05-30 Rave Llc Scan data collection for better overall data accuracy
US6813937B2 (en) 2001-11-28 2004-11-09 General Nanotechnology Llc Method and apparatus for micromachines, microstructures, nanomachines and nanostructures
EP1539637A4 (de) 2002-09-09 2010-07-28 Gen Nanotechnology Llc Fluidzufuhr für rastertunnelmikroskopie
US7023231B2 (en) * 2004-05-14 2006-04-04 Solid State Measurements, Inc. Work function controlled probe for measuring properties of a semiconductor wafer and method of use thereof
US7408366B2 (en) * 2006-02-13 2008-08-05 Georgia Tech Research Corporation Probe tips and method of making same
CN101026023B (zh) * 2007-03-02 2011-02-09 上海集成电路研发中心有限公司 一种在原子力显微镜针尖上组装氧化锌纳米线的工艺
CN101846760B (zh) * 2010-04-09 2012-02-01 重庆理工大学 一种纳米光栅的制作方法
US10598477B2 (en) * 2016-02-04 2020-03-24 Kla-Tencor Corporation Dynamic determination of metal film thickness from sheet resistance and TCR value
CN106248736A (zh) * 2016-07-14 2016-12-21 上海纳米技术及应用国家工程研究中心有限公司 乙醇敏感的Co掺杂的分级多孔结构ZnO微球及制备和应用

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8818445D0 (en) * 1988-08-03 1988-09-07 Jones B L Stm probe
JPH02171601A (ja) * 1988-12-23 1990-07-03 Mitsubishi Electric Corp 走査型トンネル顕微鏡
US5015850A (en) * 1989-06-20 1991-05-14 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated microscope assembly
EP0437275B1 (de) * 1990-01-11 1997-08-27 Canon Kabushiki Kaisha Mikrosonde, Herstellungsverfahren zur Herstellung derselben und Informations-Eingabe- und/oder Ausgabe-Gerät welches dieselbe verwendet
JP2501945B2 (ja) * 1990-08-28 1996-05-29 三菱電機株式会社 原子間力顕微鏡のカンチレバ―及びその製造方法
EP0530473B1 (de) * 1991-07-15 1996-03-13 Matsushita Electric Industrial Co., Ltd. Freitragender Ausleger für Atomkraftmikroskop und Verfahren zu dessen Herstellung

Also Published As

Publication number Publication date
JPH05332713A (ja) 1993-12-14
EP0572972B1 (de) 1997-01-02
EP0572972A1 (de) 1993-12-08
DE69307021D1 (de) 1997-02-13
US5357109A (en) 1994-10-18
JP2917674B2 (ja) 1999-07-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee