DE69232570D1 - Tintenstrahlkopfträgerschicht, mit dieser Schicht versehener Tintenstrahlkopf und Tintenstrahlaufzeichnungsvorrichtung mit solchem Kopf - Google Patents

Tintenstrahlkopfträgerschicht, mit dieser Schicht versehener Tintenstrahlkopf und Tintenstrahlaufzeichnungsvorrichtung mit solchem Kopf

Info

Publication number
DE69232570D1
DE69232570D1 DE69232570T DE69232570T DE69232570D1 DE 69232570 D1 DE69232570 D1 DE 69232570D1 DE 69232570 T DE69232570 T DE 69232570T DE 69232570 T DE69232570 T DE 69232570T DE 69232570 D1 DE69232570 D1 DE 69232570D1
Authority
DE
Germany
Prior art keywords
ink
jet
head
layer
jet head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69232570T
Other languages
English (en)
Other versions
DE69232570T2 (de
Inventor
Kenji Hasegawa
Isao Kimura
Atsushi Shiozaki
Koichi Touma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69232570D1 publication Critical patent/DE69232570D1/de
Publication of DE69232570T2 publication Critical patent/DE69232570T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Magnetic Resonance Imaging Apparatus (AREA)
  • Supporting Of Heads In Record-Carrier Devices (AREA)
  • Ink Jet (AREA)
DE69232570T 1991-08-02 1992-07-31 Tintenstrahlkopfträgerschicht, mit dieser Schicht versehener Tintenstrahlkopf und Tintenstrahlaufzeichnungsvorrichtung mit solchem Kopf Expired - Lifetime DE69232570T2 (de)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP19403691 1991-08-02
JP19403191 1991-08-02
JP19403291 1991-08-02
JP19403491 1991-08-02
JP19403091 1991-08-02
JP19403591 1991-08-02
JP19402991 1991-08-02
JP19403791 1991-08-02

Publications (2)

Publication Number Publication Date
DE69232570D1 true DE69232570D1 (de) 2002-05-23
DE69232570T2 DE69232570T2 (de) 2002-10-02

Family

ID=27573398

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69227620T Expired - Lifetime DE69227620T2 (de) 1991-08-02 1992-07-31 Tintenstrahlkopfträger, tintenstrahlkopf mit diesem träger, und mit solchem kopf ausgestattetes tintenstrahlgerät
DE69232570T Expired - Lifetime DE69232570T2 (de) 1991-08-02 1992-07-31 Tintenstrahlkopfträgerschicht, mit dieser Schicht versehener Tintenstrahlkopf und Tintenstrahlaufzeichnungsvorrichtung mit solchem Kopf

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69227620T Expired - Lifetime DE69227620T2 (de) 1991-08-02 1992-07-31 Tintenstrahlkopfträger, tintenstrahlkopf mit diesem träger, und mit solchem kopf ausgestattetes tintenstrahlgerät

Country Status (5)

Country Link
US (1) US5477252A (de)
EP (2) EP0855271B1 (de)
AT (1) ATE173436T1 (de)
DE (2) DE69227620T2 (de)
WO (1) WO1993002864A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6022098A (en) * 1995-08-10 2000-02-08 Fuji Xerox Co., Ltd. Ink-jet recorder
US6140909A (en) * 1999-03-23 2000-10-31 Industrial Technology Research Institute Heat-generating resistor and use thereof
US20060221114A1 (en) * 2005-04-04 2006-10-05 Silverbrook Research Pty Ltd MEMS fluid sensor
KR100828362B1 (ko) * 2005-11-04 2008-05-08 삼성전자주식회사 잉크젯 프린트헤드용 히터 및 이 히터를 구비하는 잉크젯프린트헤드
KR101279435B1 (ko) 2006-07-11 2013-06-26 삼성전자주식회사 잉크젯 프린트 헤드 및 이를 구비한 잉크젯 화상형성장치

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3763026A (en) * 1969-12-22 1973-10-02 Gen Electric Method of making resistor thin films by reactive sputtering from a composite source
US3816348A (en) * 1972-04-24 1974-06-11 Du Pont Compositions for stable low resistivity resistors
US3876560A (en) * 1972-05-15 1975-04-08 Engelhard Min & Chem Thick film resistor material of ruthenium or iridium, gold or platinum and rhodium
JPS5494343A (en) * 1978-01-09 1979-07-26 Canon Inc Thermal head
US4429321A (en) * 1980-10-23 1984-01-31 Canon Kabushiki Kaisha Liquid jet recording device
JPS59135168A (ja) * 1983-01-25 1984-08-03 Canon Inc インク噴射記録ヘッド
JPS59135169A (ja) * 1983-01-25 1984-08-03 Canon Inc インク噴射記録ヘッド
JPS6067163A (ja) * 1983-09-26 1985-04-17 Canon Inc 液体噴射記録装置
US4626875A (en) * 1983-09-26 1986-12-02 Canon Kabushiki Kaisha Apparatus for liquid-jet recording wherein a potential is applied to the liquid
JPS60159062A (ja) * 1984-01-31 1985-08-20 Canon Inc 液体噴射記録ヘツド
JPS60204847A (ja) * 1984-03-28 1985-10-16 Res Inst Electric Magnetic Alloys 恒電気抵抗合金およびその製造法ならびにその合金を使用したセンサ
JPS63281854A (ja) * 1987-05-15 1988-11-18 Nec Corp インクジエツトヘツド
JP2692846B2 (ja) * 1988-04-07 1997-12-17 キヤノン株式会社 記録装置
JP3411983B2 (ja) * 1989-02-28 2003-06-03 キヤノン株式会社 Ｉｒ、Ｔａ及びＡｌを含有する非単結晶質物質

Also Published As

Publication number Publication date
DE69227620D1 (de) 1998-12-24
EP0855271A3 (de) 1998-12-09
ATE173436T1 (de) 1998-12-15
EP0855271A2 (de) 1998-07-29
DE69227620T2 (de) 1999-06-17
EP0551521B1 (de) 1998-11-18
DE69232570T2 (de) 2002-10-02
WO1993002864A1 (en) 1993-02-18
EP0855271B1 (de) 2002-04-17
EP0551521A1 (de) 1993-07-21
EP0551521A4 (de) 1995-07-19
US5477252A (en) 1995-12-19

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