DE69226837D1 - Schneidemaschine für Aufschnitt - Google Patents

Schneidemaschine für Aufschnitt

Info

Publication number
DE69226837D1
DE69226837D1 DE69226837T DE69226837T DE69226837D1 DE 69226837 D1 DE69226837 D1 DE 69226837D1 DE 69226837 T DE69226837 T DE 69226837T DE 69226837 T DE69226837 T DE 69226837T DE 69226837 D1 DE69226837 D1 DE 69226837D1
Authority
DE
Germany
Prior art keywords
slicer
cold cuts
cuts
cold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69226837T
Other languages
English (en)
Other versions
DE69226837T2 (de
Inventor
Yoshihiko Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Application granted granted Critical
Publication of DE69226837D1 publication Critical patent/DE69226837D1/de
Publication of DE69226837T2 publication Critical patent/DE69226837T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/028—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a ring blade having an inside cutting edge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D59/00—Accessories specially designed for sawing machines or sawing devices
    • B23D59/001—Measuring or control devices, e.g. for automatic control of work feed pressure on band saw blade
    • B23D59/002—Measuring or control devices, e.g. for automatic control of work feed pressure on band saw blade for the position of the saw blade
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
    • B23Q15/18—Compensation of tool-deflection due to temperature or force

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
DE69226837T 1991-09-30 1992-03-31 Schneidemaschine für Aufschnitt Expired - Fee Related DE69226837T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3252576A JPH05116138A (ja) 1991-09-30 1991-09-30 スライシングマシン

Publications (2)

Publication Number Publication Date
DE69226837D1 true DE69226837D1 (de) 1998-10-08
DE69226837T2 DE69226837T2 (de) 1999-02-18

Family

ID=17239299

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69226837T Expired - Fee Related DE69226837T2 (de) 1991-09-30 1992-03-31 Schneidemaschine für Aufschnitt

Country Status (5)

Country Link
US (1) US5383444A (de)
EP (1) EP0535296B1 (de)
JP (1) JPH05116138A (de)
KR (1) KR0141677B1 (de)
DE (1) DE69226837T2 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5632666A (en) * 1994-10-28 1997-05-27 Memc Electronic Materials, Inc. Method and apparatus for automated quality control in wafer slicing
JP3195504B2 (ja) * 1994-11-24 2001-08-06 トーヨーエイテック株式会社 スライシング装置のブレード変位検出装置
JP3085136B2 (ja) * 1995-03-25 2000-09-04 信越半導体株式会社 ワークのスライシング方法および装置
JP2943673B2 (ja) * 1995-10-31 1999-08-30 日本電気株式会社 半導体基板の製造装置及び製造方法
US5904083A (en) * 1997-04-10 1999-05-18 J.R. Simplot Company Knife fixture with broken blade detector
US6245184B1 (en) * 1997-11-26 2001-06-12 General Electric Company Method of fabricating scintillators for computed tomograph system
FI107319B (fi) * 1999-02-10 2001-07-13 Joint Capital Oy Solwo Sahausmenetelmä puulevyn irrottamiseksi
DE10032963C2 (de) * 2000-07-06 2002-05-02 Fraunhofer Ges Forschung Verfahren und Anordnung zum Abtrennen dünner Oberflächenbereiche von Substraten
US6684748B2 (en) * 2001-12-31 2004-02-03 George A. Mendenhall Apparatus for cutting optimally sized fruit and vegetable pieces
US20050071939A1 (en) * 2003-10-07 2005-04-07 Wong Peng Soon Dual head toothbrush
GB0505139D0 (en) * 2005-03-12 2005-04-20 Pilkington Plc Improved apparatus and methods for scoring
WO2010026278A1 (en) * 2008-09-04 2010-03-11 Solwo International Fz Co. Arrangement in wood sawing relating to measuring, data transfer and adjustment of position of a saw blade
JP5516037B2 (ja) * 2010-05-07 2014-06-11 株式会社Ｓｕｍｃｏ ドレッシング装置および方法、並びにバンドソー切断機
DE102013202442B4 (de) * 2013-02-14 2014-09-25 Hilti Aktiengesellschaft Verfahren zur Steuerung eines Gerätesystems mit einem Werkzeuggerät und einer motorischen Vorschubeinrichtung
JP6146505B1 (ja) * 2016-03-16 2017-06-14 横浜ゴム株式会社 円形部材の内周長測定装置
CN107443600A (zh) * 2017-08-25 2017-12-08 芜湖长润特种铜线有限公司 一种铜材切割加工设备
KR101953103B1 (ko) * 2018-10-04 2019-02-28 (주)대흥시스템 가구 프레임용 프로파일의 저진동 커팅장치
CN109304818A (zh) * 2018-10-17 2019-02-05 江苏英锐半导体有限公司 一种用于晶圆流片制造的切段装置
CN114783865B (zh) * 2022-04-13 2023-02-10 苏州优力科瑞半导体科技有限公司 一种划片切割方法及系统

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2914100A (en) * 1956-11-21 1959-11-24 Armstrong Blum Mfg Company Control system for band saw blade
US3327696A (en) * 1964-10-09 1967-06-27 Howard Aiken Ind Saw stabilizing means and method
JPS5416792A (en) * 1977-07-08 1979-02-07 Hitachi Ltd Cutting apparatus
US4537177A (en) * 1982-05-07 1985-08-27 Silicon Technology Balanced rotary saw assembly and a method of balancing the same
US4567798A (en) * 1984-10-04 1986-02-04 Cetec Engineering Co., Inc. Apparatus to maximize saw blade stiffness
US4971021A (en) * 1987-07-31 1990-11-20 Mitsubishi Kinzoku Kabushiki Kaisha Apparatus for cutting semiconductor crystal
US5025593A (en) * 1988-01-18 1991-06-25 Mazda Motor Corporation Slicing machine and control method thereof
DE3906091A1 (de) * 1989-02-27 1990-08-30 Wacker Chemitronic Verfahren zum zersaegen von stabfoermigen werkstuecken in scheiben mittels innenlochsaege, sowie innenlochsaegen zu seiner durchfuehrung
DE3907321A1 (de) * 1989-03-07 1990-09-13 Wacker Chemitronic Verfahren zur ueberwachung des schnittverlaufes beim innenlochsaegen von halbleitermaterial und wirbelstromsensor zu seiner durchfuehrung
JPH0767692B2 (ja) * 1989-09-07 1995-07-26 株式会社東京精密 スライシングマシンの切断方法
DE3941038A1 (de) * 1989-12-12 1991-06-13 Wacker Chemitronic Vorrichtung zum nachschaerfen der schneidkante von trennwerkzeugen beim abtrennen von scheiben von stab- oder blockfoermigen werkstuecken, insbesondere aus halbleitermaterial, ihre verwendung und saegeverfahren

Also Published As

Publication number Publication date
DE69226837T2 (de) 1999-02-18
KR930018665A (ko) 1993-09-22
JPH05116138A (ja) 1993-05-14
US5383444A (en) 1995-01-24
EP0535296A1 (de) 1993-04-07
EP0535296B1 (de) 1998-09-02
KR0141677B1 (ko) 1998-07-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee