DE69220434D1 - Halbleiterlaser - Google Patents
HalbleiterlaserInfo
- Publication number
- DE69220434D1 DE69220434D1 DE69220434T DE69220434T DE69220434D1 DE 69220434 D1 DE69220434 D1 DE 69220434D1 DE 69220434 T DE69220434 T DE 69220434T DE 69220434 T DE69220434 T DE 69220434T DE 69220434 D1 DE69220434 D1 DE 69220434D1
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor laser
- laser
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/50—Amplifier structures not provided for in groups H01S5/02 - H01S5/30
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
- H01S5/0425—Electrodes, e.g. characterised by the structure
- H01S5/04254—Electrodes, e.g. characterised by the structure characterised by the shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/2054—Methods of obtaining the confinement
- H01S5/2059—Methods of obtaining the confinement by means of particular conductivity zones, e.g. obtained by particle bombardment or diffusion
- H01S5/2063—Methods of obtaining the confinement by means of particular conductivity zones, e.g. obtained by particle bombardment or diffusion obtained by particle bombardment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2301/00—Functional characteristics
- H01S2301/18—Semiconductor lasers with special structural design for influencing the near- or far-field
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
- H01S5/0267—Integrated focusing lens
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
- H01S5/0421—Electrical excitation ; Circuits therefor characterised by the semiconducting contacting layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/062—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes
- H01S5/06233—Controlling other output parameters than intensity or frequency
- H01S5/06243—Controlling other output parameters than intensity or frequency controlling the position or direction of the emitted beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1003—Waveguide having a modified shape along the axis, e.g. branched, curved, tapered, voids
- H01S5/1014—Tapered waveguide, e.g. spotsize converter
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1053—Comprising an active region having a varying composition or cross-section in a specific direction
- H01S5/1064—Comprising an active region having a varying composition or cross-section in a specific direction varying width along the optical axis
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1082—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region with a special facet structure, e.g. structured, non planar, oblique
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/2036—Broad area lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/227—Buried mesa structure ; Striped active layer
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Geometry (AREA)
- Semiconductor Lasers (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/750,382 US5228049A (en) | 1991-08-27 | 1991-08-27 | Beam control in integrated diode laser and power amplifier |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69220434D1 true DE69220434D1 (de) | 1997-07-24 |
DE69220434T2 DE69220434T2 (de) | 1997-12-11 |
Family
ID=25017642
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69220434T Expired - Lifetime DE69220434T2 (de) | 1991-08-27 | 1992-07-30 | Halbleiterlaser |
Country Status (4)
Country | Link |
---|---|
US (1) | US5228049A (de) |
EP (1) | EP0529817B1 (de) |
JP (1) | JP3306104B2 (de) |
DE (1) | DE69220434T2 (de) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5228049A (en) * | 1991-08-27 | 1993-07-13 | Xerox Corporation | Beam control in integrated diode laser and power amplifier |
US5461637A (en) * | 1994-03-16 | 1995-10-24 | Micracor, Inc. | High brightness, vertical cavity semiconductor lasers |
US5457569A (en) * | 1994-06-30 | 1995-10-10 | At&T Ipm Corp. | Semiconductor amplifier or laser having integrated lens |
US5517517A (en) * | 1994-06-30 | 1996-05-14 | At&T Corp. | Semiconductor laser having integrated waveguiding lens |
DE19717571A1 (de) * | 1997-04-25 | 1998-10-29 | Fraunhofer Ges Forschung | Diodenlaser-Oszillator oder- Verstärker mit wenigstens einer lichtleitenden Halbleiterschicht |
JP3339369B2 (ja) * | 1997-05-30 | 2002-10-28 | 株式会社デンソー | レーザダイオード |
FR2768524B1 (fr) * | 1997-09-12 | 1999-10-22 | France Telecom | Amplificateur a large surface avec recombineur a interferences multimodes |
US6122299A (en) * | 1997-12-31 | 2000-09-19 | Sdl, Inc. | Angled distributed reflector optical device with enhanced light confinement |
IES990510A2 (en) * | 1998-06-18 | 2001-01-10 | Univ Cork | A semi-conductor device and a method for varying current density in an active region of a junction of the semi-conductor device |
JP4100792B2 (ja) * | 1998-12-18 | 2008-06-11 | シャープ株式会社 | スポットサイズ変換器付き半導体レーザ装置、及びその製造方法 |
GB0018576D0 (en) * | 2000-07-27 | 2000-09-13 | Univ Glasgow | Improved semiconductor laser |
JP2002158394A (ja) * | 2000-11-17 | 2002-05-31 | Fuji Photo Film Co Ltd | 露光ヘッドおよび画像記録装置 |
JP2005517281A (ja) * | 2001-06-06 | 2005-06-09 | クイントエッセンス・フォトニックス・コーポレーション | 内部ミラーをもつレーザ・ダイオード |
JP4770077B2 (ja) * | 2001-07-04 | 2011-09-07 | 三菱電機株式会社 | 波長可変半導体レーザおよび光モジュール |
US7139299B2 (en) * | 2002-03-04 | 2006-11-21 | Quintessence Photonics Corporation | De-tuned distributed feedback laser diode |
DE102007026925A1 (de) * | 2007-02-28 | 2008-09-04 | Osram Opto Semiconductors Gmbh | Integrierte Trapezlaseranordnung und Verfahren zu deren Herstellung |
DE102008014092A1 (de) * | 2007-12-27 | 2009-07-02 | Osram Opto Semiconductors Gmbh | Kantenemittierender Halbleiterlaserchip mit einem strukturierten Kontaktstreifen |
DE102008014093B4 (de) * | 2007-12-27 | 2020-02-06 | Osram Opto Semiconductors Gmbh | Kantenemittierender Halbleiterlaserchip mit zumindest einer Strombarriere |
JP4444368B1 (ja) * | 2009-07-30 | 2010-03-31 | 古河電気工業株式会社 | 集積型半導体レーザ素子および半導体レーザモジュールならびに光伝送システム |
JP5323648B2 (ja) * | 2009-11-17 | 2013-10-23 | 古河電気工業株式会社 | 半導体光増幅素子 |
US20110134957A1 (en) * | 2009-12-07 | 2011-06-09 | Emcore Corporation | Low Chirp Coherent Light Source |
US9166368B2 (en) * | 2011-10-11 | 2015-10-20 | Nlight Photonics Corporation | High power semiconductor laser with phase-matching optical element |
US9306672B2 (en) | 2013-03-14 | 2016-04-05 | Encore Corporation | Method of fabricating and operating an optical modulator |
US9306372B2 (en) | 2013-03-14 | 2016-04-05 | Emcore Corporation | Method of fabricating and operating an optical modulator |
US9059801B1 (en) | 2013-03-14 | 2015-06-16 | Emcore Corporation | Optical modulator |
US9166369B2 (en) | 2013-04-09 | 2015-10-20 | Nlight Photonics Corporation | Flared laser oscillator waveguide |
US9214786B2 (en) | 2013-04-09 | 2015-12-15 | Nlight Photonics Corporation | Diode laser packages with flared laser oscillator waveguides |
US9564733B2 (en) | 2014-09-15 | 2017-02-07 | Emcore Corporation | Method of fabricating and operating an optical modulator |
US10186836B2 (en) | 2014-10-10 | 2019-01-22 | Nlight, Inc. | Multiple flared laser oscillator waveguide |
WO2016197137A1 (en) | 2015-06-04 | 2016-12-08 | Nlight, Inc. | Angled dbr-grating laser/amplifier with one or more mode-hopping regions |
US9864139B1 (en) * | 2016-01-22 | 2018-01-09 | Seagate Technology Llc | Uniform laser direct writing for waveguides |
US10074959B2 (en) | 2016-08-03 | 2018-09-11 | Emcore Corporation | Modulated laser source and methods of its fabrication and operation |
JP7147356B2 (ja) * | 2018-08-14 | 2022-10-05 | 富士フイルムビジネスイノベーション株式会社 | 半導体光増幅器 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4791646A (en) * | 1985-07-31 | 1988-12-13 | California Institute Of Technology | Method for tailoring the two-dimensional spatial gain distribution in optoelectronic devices and its application to tailored gain broad area semiconductor lasers capable of high power operation with very narrow single lobed farfield patterns |
JPS62213188A (ja) * | 1986-03-14 | 1987-09-19 | Hitachi Ltd | 半導体レ−ザ素子 |
US4744089A (en) * | 1986-05-19 | 1988-05-10 | The Perkin-Elmer Corporation | Monolithic semiconductor laser and optical amplifier |
US4878724A (en) * | 1987-07-30 | 1989-11-07 | Trw Inc. | Electrooptically tunable phase-locked laser array |
DE3836802A1 (de) * | 1988-10-28 | 1990-05-03 | Siemens Ag | Halbleiterlaseranordnung fuer hohe ausgangsleistungen im lateralen grundmodus |
US4980893A (en) * | 1989-05-25 | 1990-12-25 | Xerox Corporation | Monolithic high density arrays of independently addressable offset semiconductor laser sources |
US5003550A (en) * | 1990-03-09 | 1991-03-26 | Spectra Diode Laboratories, Inc. | Integrated laser-amplifier with steerable beam |
US5228049A (en) * | 1991-08-27 | 1993-07-13 | Xerox Corporation | Beam control in integrated diode laser and power amplifier |
-
1991
- 1991-08-27 US US07/750,382 patent/US5228049A/en not_active Expired - Lifetime
-
1992
- 1992-07-30 DE DE69220434T patent/DE69220434T2/de not_active Expired - Lifetime
- 1992-07-30 EP EP92306943A patent/EP0529817B1/de not_active Expired - Lifetime
- 1992-08-18 JP JP21915192A patent/JP3306104B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0529817A1 (de) | 1993-03-03 |
US5228049A (en) | 1993-07-13 |
JPH05211376A (ja) | 1993-08-20 |
DE69220434T2 (de) | 1997-12-11 |
JP3306104B2 (ja) | 2002-07-24 |
EP0529817B1 (de) | 1997-06-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
R071 | Expiry of right |
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