DE69218611D1 - Verfahren zur herstellung eines halbleiter-beschleunigungsmessers - Google Patents
Verfahren zur herstellung eines halbleiter-beschleunigungsmessersInfo
- Publication number
- DE69218611D1 DE69218611D1 DE69218611T DE69218611T DE69218611D1 DE 69218611 D1 DE69218611 D1 DE 69218611D1 DE 69218611 T DE69218611 T DE 69218611T DE 69218611 T DE69218611 T DE 69218611T DE 69218611 D1 DE69218611 D1 DE 69218611D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- semiconductor accelerometer
- accelerometer
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/0015—Cantilevers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0235—Accelerometers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0315—Cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0102—Surface micromachining
- B81C2201/0104—Chemical-mechanical polishing [CMP]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0128—Processes for removing material
- B81C2201/013—Etching
- B81C2201/0135—Controlling etch progression
- B81C2201/0136—Controlling etch progression by doping limited material regions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
- B81C2201/019—Bonding or gluing multiple substrate layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
- B81C2201/0191—Transfer of a layer from a carrier wafer to a device wafer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US71381591A | 1991-06-12 | 1991-06-12 | |
PCT/US1992/005109 WO1992022820A2 (en) | 1991-06-12 | 1992-06-12 | Semiconductor accelerometer and method of its manufacture |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69218611D1 true DE69218611D1 (de) | 1997-04-30 |
DE69218611T2 DE69218611T2 (de) | 1997-07-03 |
Family
ID=24867655
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69218611T Expired - Fee Related DE69218611T2 (de) | 1991-06-12 | 1992-06-12 | Verfahren zur herstellung eines halbleiter-beschleunigungsmessers |
Country Status (5)
Country | Link |
---|---|
US (2) | US5429993A (de) |
EP (1) | EP0606220B1 (de) |
JP (1) | JP3352457B2 (de) |
DE (1) | DE69218611T2 (de) |
WO (1) | WO1992022820A2 (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2700065B1 (fr) * | 1992-12-28 | 1995-02-10 | Commissariat Energie Atomique | Procédé de fabrication d'accéléromètres utilisant la technologie silicium sur isolant. |
DE4315012B4 (de) * | 1993-05-06 | 2007-01-11 | Robert Bosch Gmbh | Verfahren zur Herstellung von Sensoren und Sensor |
US5616514A (en) * | 1993-06-03 | 1997-04-01 | Robert Bosch Gmbh | Method of fabricating a micromechanical sensor |
DE19509868A1 (de) * | 1995-03-17 | 1996-09-19 | Siemens Ag | Mikromechanisches Halbleiterbauelement |
US5736430A (en) * | 1995-06-07 | 1998-04-07 | Ssi Technologies, Inc. | Transducer having a silicon diaphragm and method for forming same |
DE19536250A1 (de) * | 1995-09-28 | 1997-04-03 | Siemens Ag | Mikroelektronischer, integrierter Sensor und Verfahren zur Herstellung des Sensors |
US5721162A (en) * | 1995-11-03 | 1998-02-24 | Delco Electronics Corporation | All-silicon monolithic motion sensor with integrated conditioning circuit |
DE69632950T2 (de) * | 1996-07-31 | 2005-08-25 | Stmicroelectronics S.R.L., Agrate Brianza | Integrierte Mikrostrukturen aus Halbleitermaterial und ein Verfahren zu deren Herstellung |
US6472244B1 (en) | 1996-07-31 | 2002-10-29 | Sgs-Thomson Microelectronics S.R.L. | Manufacturing method and integrated microstructures of semiconductor material and integrated piezoresistive pressure sensor having a diaphragm of polycrystalline semiconductor material |
US5923952A (en) * | 1997-07-18 | 1999-07-13 | Kavlico Corporation | Fusion-bond electrical feed-through |
EP0915513A1 (de) * | 1997-10-23 | 1999-05-12 | STMicroelectronics S.r.l. | Integrierte Spule mit hohem Gütefaktor und deren Herstellungsverfahren |
US5982608A (en) * | 1998-01-13 | 1999-11-09 | Stmicroelectronics, Inc. | Semiconductor variable capacitor |
US6129282A (en) * | 1998-07-20 | 2000-10-10 | Psc Scanning, Inc. | Rugged scanning subsystem for data reading |
GB9819821D0 (en) * | 1998-09-12 | 1998-11-04 | Secr Defence | Improvements relating to micro-machining |
DE19847455A1 (de) * | 1998-10-15 | 2000-04-27 | Bosch Gmbh Robert | Verfahren zur Bearbeitung von Silizium mittels Ätzprozessen |
AU2032300A (en) | 1998-11-25 | 2000-06-19 | Ball Semiconductor Inc. | Miniature spherical semiconductor transducer |
US6232150B1 (en) | 1998-12-03 | 2001-05-15 | The Regents Of The University Of Michigan | Process for making microstructures and microstructures made thereby |
KR100316774B1 (ko) * | 1999-01-15 | 2001-12-12 | 이형도 | 마이크로 관성 센서의 제작 방법 |
US6324904B1 (en) | 1999-08-19 | 2001-12-04 | Ball Semiconductor, Inc. | Miniature pump-through sensor modules |
DE10063991B4 (de) * | 2000-12-21 | 2005-06-02 | Infineon Technologies Ag | Verfahren zur Herstellung von mikromechanischen Bauelementen |
US6448103B1 (en) * | 2001-05-30 | 2002-09-10 | Stmicroelectronics, Inc. | Method for making an accurate miniature semiconductor resonator |
SG99386A1 (en) * | 2002-01-29 | 2003-10-27 | Sensfab Pte Ltd | Method of manufacturing an accelerometer |
US7127949B2 (en) * | 2003-07-08 | 2006-10-31 | National University Of Singapore | Contact pressure sensor and method for manufacturing the same |
SG114631A1 (en) * | 2003-10-10 | 2005-09-28 | Sony Corp | A mems accelerometer |
US20090306924A1 (en) * | 2008-06-10 | 2009-12-10 | Datalogic Scanning, Inc. | Automatic calibration system for scanner-scale or other scale system |
DE102008044371B4 (de) * | 2008-12-05 | 2016-10-27 | Robert Bosch Gmbh | Verfahren zur Herstellung einer Sensoranordnung |
CN107892268B (zh) * | 2017-11-13 | 2023-07-14 | 苏州敏芯微电子技术股份有限公司 | 压力传感器及其制造方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4699006A (en) * | 1984-03-19 | 1987-10-13 | The Charles Stark Draper Laboratory, Inc. | Vibratory digital integrating accelerometer |
US4922756A (en) * | 1988-06-20 | 1990-05-08 | Triton Technologies, Inc. | Micro-machined accelerometer |
GB2198611B (en) * | 1986-12-13 | 1990-04-04 | Spectrol Reliance Ltd | Method of forming a sealed diaphragm on a substrate |
JP2701845B2 (ja) * | 1987-08-21 | 1998-01-21 | 株式会社東海理化電機製作所 | シリコン薄膜の製造方法 |
JPH02251142A (ja) * | 1989-03-24 | 1990-10-08 | Fujikura Ltd | 半導体装置の製造方法 |
JPH0669519A (ja) * | 1992-08-18 | 1994-03-11 | Mitsubishi Electric Corp | 半導体圧力センサ |
-
1992
- 1992-06-12 EP EP92914941A patent/EP0606220B1/de not_active Expired - Lifetime
- 1992-06-12 DE DE69218611T patent/DE69218611T2/de not_active Expired - Fee Related
- 1992-06-12 JP JP50109393A patent/JP3352457B2/ja not_active Expired - Fee Related
- 1992-06-12 WO PCT/US1992/005109 patent/WO1992022820A2/en active IP Right Grant
-
1994
- 1994-03-21 US US08/216,217 patent/US5429993A/en not_active Expired - Lifetime
-
1995
- 1995-05-31 US US08/457,643 patent/US5656512A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO1992022820A2 (en) | 1992-12-23 |
US5429993A (en) | 1995-07-04 |
JPH07501421A (ja) | 1995-02-09 |
EP0606220B1 (de) | 1997-03-26 |
WO1992022820A3 (en) | 1994-08-18 |
US5656512A (en) | 1997-08-12 |
JP3352457B2 (ja) | 2002-12-03 |
EP0606220A1 (de) | 1994-07-20 |
DE69218611T2 (de) | 1997-07-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69218611D1 (de) | Verfahren zur herstellung eines halbleiter-beschleunigungsmessers | |
DE69435114D1 (de) | Verfahren zur Herstellung eines Halbleiterbauelements | |
DE69332511D1 (de) | Verfahren zur Herstellung eines Halbleitersubstrats | |
DE69333282D1 (de) | Verfahren zur Herstellung eines Halbleitersubstrats | |
DE3585587D1 (de) | Verfahren zur herstellung eines halbleiterbeschleunigungsmessers. | |
DE69029430T2 (de) | Verfahren zur Herstellung eines CMOS Halbleiterbauelements | |
DE69528611T2 (de) | Verfahren zur Herstellung eines Halbleitersubstrates | |
DE69214213D1 (de) | Verfahren zur Herstellung eines porösen Polysiloxan-Produkts | |
DE19758977B8 (de) | Verfahren zur Herstellung eines Halbleiterbauelements | |
DE69434695D1 (de) | Verfahren zur Herstellung einer Halbleiteranordnung | |
DE69112545D1 (de) | Verfahren zur Herstellung eines Halbleiterbauelementes. | |
DE69024817D1 (de) | Verfahren zur herstellung eines punktartig teilweise bedeckten elementes | |
DE59205976D1 (de) | Verfahren zur herstellung eines wasserdichten reissverschlusses | |
DE69120865T2 (de) | Verfahren zur Herstellung eines Halbleiterbauelements | |
DE69314312T2 (de) | Verfahren zur herstellung eines polymer | |
DE69213778T2 (de) | Verfahren zur Herstellung eines opto-elektronischen Bauteils | |
ATA34392A (de) | Verfahren zur herstellung eines haarnährmittels | |
DE69220960T2 (de) | Verfahren zur herstellung eines verbundwerkstoff | |
DE69210585T2 (de) | Verfahren zur herstellung eines dichtungsrings | |
DE69124173T2 (de) | Verfahren zur Herstellung eines Halbleiterlasers | |
DE3924222A1 (de) | Verfahren zur herstellung eines methylpolysilans | |
DE69030179D1 (de) | Verfahren zur herstellung eines laminats | |
ATA52589A (de) | Verfahren zur herstellung eines 1,4-dihydro-pyridin-derivates | |
ATA100292A (de) | Verfahren zur herstellung eines benzothiazepins | |
DE69213956D1 (de) | Verfahren zur herstellung eines verbundwerkstoff |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Free format text: PATENTANWAELTE RUFF, WILHELM, BEIER, DAUSTER & PARTNER, 70173 STUTTGART |
|
8339 | Ceased/non-payment of the annual fee |