DE69214924T2 - Piezoelektrische Fluiddrucksensor - Google Patents

Piezoelektrische Fluiddrucksensor

Info

Publication number
DE69214924T2
DE69214924T2 DE1992614924 DE69214924T DE69214924T2 DE 69214924 T2 DE69214924 T2 DE 69214924T2 DE 1992614924 DE1992614924 DE 1992614924 DE 69214924 T DE69214924 T DE 69214924T DE 69214924 T2 DE69214924 T2 DE 69214924T2
Authority
DE
Germany
Prior art keywords
pressure sensor
fluid pressure
piezoelectric fluid
piezoelectric
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1992614924
Other languages
English (en)
Other versions
DE69214924D1 (de
Inventor
Hideki Toyoda
Takao Kojima
Hirofumi Shimozato
Hirofumi Hayasako
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Application granted granted Critical
Publication of DE69214924D1 publication Critical patent/DE69214924D1/de
Publication of DE69214924T2 publication Critical patent/DE69214924T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/008—Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
    • G01L23/10—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by pressure-sensitive members of the piezoelectric type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Measuring Fluid Pressure (AREA)
DE1992614924 1991-12-24 1992-12-23 Piezoelektrische Fluiddrucksensor Expired - Fee Related DE69214924T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03356920A JP3123799B2 (ja) 1991-12-24 1991-12-24 圧力センサ

Publications (2)

Publication Number Publication Date
DE69214924D1 DE69214924D1 (de) 1996-12-05
DE69214924T2 true DE69214924T2 (de) 1997-03-27

Family

ID=18451433

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1992614924 Expired - Fee Related DE69214924T2 (de) 1991-12-24 1992-12-23 Piezoelektrische Fluiddrucksensor

Country Status (4)

Country Link
EP (1) EP0549346B1 (de)
JP (1) JP3123799B2 (de)
BR (1) BR9204720A (de)
DE (1) DE69214924T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005005029B4 (de) * 2004-02-03 2017-05-11 Denso Corporation Drucksensor mit Membran

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0637736A3 (de) * 1993-08-05 1995-05-10 Matsushita Electric Ind Co Ltd Piezoelektrischer Drucksensor und Verfahren zu seiner Herstellung.
US6550116B2 (en) 1997-07-11 2003-04-22 Matsushita Electric Industrial Co., Ltd. Method for manufacturing a bimorph piezoelectric device for acceleration sensor
JPH1130628A (ja) * 1997-07-11 1999-02-02 Matsushita Electric Ind Co Ltd 加速度センサー用バイモルフ型圧電素子とその製造方法
JP5715320B2 (ja) * 2004-09-22 2015-05-07 キストラー ホールディング アクチエンゲゼルシャフト 圧力センサ
DE102004047143A1 (de) * 2004-09-29 2006-04-06 Robert Bosch Gmbh Piezoelektrischer Brennraum-Drucksensor mit einem Druckübertragungsstift
JP5022631B2 (ja) * 2006-05-22 2012-09-12 バブコック日立株式会社 立体標的の着弾検出装置を備えた射撃訓練装置
JP5811785B2 (ja) * 2011-11-08 2015-11-11 セイコーエプソン株式会社 センサー素子、力検出装置およびロボット
JP6205144B2 (ja) * 2013-03-12 2017-09-27 株式会社ミクニ 圧電素子、圧力センサ、及び圧電素子の耐衝撃強度の増加方法
AT518650B1 (de) 2016-06-07 2017-12-15 Piezocryst Advanced Sensorics Piezoelektrischer drucksensor zum messen hoher drücke

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3086132A (en) * 1960-08-30 1963-04-16 Sensonics Inc Piezoelectric mounting and device
US5038069A (en) * 1987-11-09 1991-08-06 Texas Instruments Incorporated Cylinder pressure sensor for an internal combustion engine
NL9000802A (nl) * 1990-04-05 1991-11-01 Texas Instruments Holland Sensor voor het meten van de druk van een medium, in het bijzonder voor het meten van de wisselende druk in een dieselinspuitpomp.
EP0511762B1 (de) * 1991-04-27 1996-03-20 Ngk Spark Plug Co., Ltd. Piezoelektrischer Messfühler

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005005029B4 (de) * 2004-02-03 2017-05-11 Denso Corporation Drucksensor mit Membran

Also Published As

Publication number Publication date
EP0549346A3 (en) 1993-08-18
EP0549346B1 (de) 1996-10-30
DE69214924D1 (de) 1996-12-05
JP3123799B2 (ja) 2001-01-15
BR9204720A (pt) 1993-06-29
EP0549346A2 (de) 1993-06-30
JPH05172680A (ja) 1993-07-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee