DE69210792D1 - Verfahren zur Abscheidung aus der Dampfphase für die Beschichtung von hergestellten Gegenständen - Google Patents

Verfahren zur Abscheidung aus der Dampfphase für die Beschichtung von hergestellten Gegenständen

Info

Publication number
DE69210792D1
DE69210792D1 DE69210792T DE69210792T DE69210792D1 DE 69210792 D1 DE69210792 D1 DE 69210792D1 DE 69210792 T DE69210792 T DE 69210792T DE 69210792 T DE69210792 T DE 69210792T DE 69210792 D1 DE69210792 D1 DE 69210792D1
Authority
DE
Germany
Prior art keywords
coating
vapor deposition
deposition process
manufactured articles
articles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69210792T
Other languages
English (en)
Other versions
DE69210792T2 (de
Inventor
Greg E Blonder
Mindaugas Fernand Dautartas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
AT&T Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AT&T Corp filed Critical AT&T Corp
Application granted granted Critical
Publication of DE69210792D1 publication Critical patent/DE69210792D1/de
Publication of DE69210792T2 publication Critical patent/DE69210792T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0808—Mirrors having a single reflecting layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
  • Glass Compositions (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Physical Vapour Deposition (AREA)
DE69210792T 1991-12-13 1992-12-10 Verfahren zur Abscheidung aus der Dampfphase für die Beschichtung von hergestellten Gegenständen Expired - Fee Related DE69210792T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US80870491A 1991-12-13 1991-12-13

Publications (2)

Publication Number Publication Date
DE69210792D1 true DE69210792D1 (de) 1996-06-20
DE69210792T2 DE69210792T2 (de) 1996-09-26

Family

ID=25199476

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69210792T Expired - Fee Related DE69210792T2 (de) 1991-12-13 1992-12-10 Verfahren zur Abscheidung aus der Dampfphase für die Beschichtung von hergestellten Gegenständen

Country Status (5)

Country Link
US (1) US5380551A (de)
EP (1) EP0551737B1 (de)
JP (1) JP2513976B2 (de)
KR (1) KR950012813B1 (de)
DE (1) DE69210792T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5792423A (en) * 1993-06-07 1998-08-11 Markelov; Michael Headspace autosampler apparatus and method
SE509984C2 (sv) * 1994-03-18 1999-03-29 Sandvik Ab Chargeringssystem för CVD
US5874127A (en) * 1995-08-16 1999-02-23 Ciba Vision Corporation Method and apparatus for gaseous treatment
US6017581A (en) * 1997-04-18 2000-01-25 Semi-Alloys Company Method for coating lenticular articles
US6210546B1 (en) * 1998-10-29 2001-04-03 Lucent Technologies Inc. Fixture with at least one trough and method of using the fixture in a plasma or ion beam
JP4836102B2 (ja) * 2000-06-30 2011-12-14 Ｈｏｙａ株式会社 光学素子の位置決め部材、光学素子の位置決め部材の製造方法、光学ユニット、光学ユニットの製造方法、レンズチップ、光メモリ媒体用浮上型ヘッド
US20030021572A1 (en) * 2001-02-07 2003-01-30 Steinberg Dan A. V-groove with tapered depth and method for making
US7036944B2 (en) 2002-04-11 2006-05-02 3M Innovative Properties Company Retrochromic articles
US6978896B2 (en) * 2002-04-11 2005-12-27 3M Innovative Properties Company Method of making retrochromic beads and kit thereof
US7294360B2 (en) * 2003-03-31 2007-11-13 Planar Systems, Inc. Conformal coatings for micro-optical elements, and method for making the same
JP5622219B2 (ja) * 2008-11-06 2014-11-12 Ntn株式会社 球状体の表面処理用治具、球状体の表面処理方法および球状部品の製造方法
US9543127B2 (en) 2012-04-16 2017-01-10 The Timken Company Method and table assembly for applying coatings to spherical components
EP3087585A4 (de) * 2013-12-27 2017-08-30 3M Innovative Properties Company Beschichtung mit gleichmässiger chemischer danmpabscheidung auf einer 3-dimensionalen anordnung von gleichmässig geformten artikeln

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2026203A (en) * 1934-07-05 1935-12-31 Ackles Hornkohl Company Icing mechanism
US4415512A (en) * 1979-07-20 1983-11-15 Torobin Leonard B Method and apparatus for producing hollow metal microspheres and microspheroids
USRE30626E (en) * 1979-09-14 1981-05-26 Ultramet of Pacoima Spheres obtained by vapor deposition for use in ball point pens
US4361111A (en) * 1981-12-23 1982-11-30 Groen Henry J Golf ball dry rack
DE3321028A1 (de) * 1982-06-17 1983-12-22 Smiths Industries Public Ltd. Co., London Optisches bauteil
JPS5972127A (ja) * 1982-10-18 1984-04-24 Toshiba Corp 気相成長用溝切り熱板
JPS6025281A (ja) * 1983-07-22 1985-02-08 Nec Corp 発光受光素子
JPS61138201A (ja) * 1984-12-11 1986-06-25 Matsushita Electric Ind Co Ltd 無反射コ−テイング膜を有する球レンズの製造法
JPH0635657B2 (ja) * 1985-05-03 1994-05-11 アメリカン テレフオン アンド テレグラフ カムパニ− パタ−ン化されたアルミニウム層を有するデバイスの製造方法
US4725890A (en) * 1986-07-15 1988-02-16 Ovonic Imaging Systems, Inc. Flexible array of photosensitive elements
JPS6333571A (ja) * 1986-07-25 1988-02-13 Nippon Telegr & Teleph Corp <Ntt> 球状物の成膜方法
US4704298A (en) * 1986-07-31 1987-11-03 The Research Foundation Of State University Of New York Coating spherical objects
US4916091A (en) * 1987-11-05 1990-04-10 Texas Instruments Incorporated Plasma and plasma UV deposition of SiO2
SE461491B (sv) * 1987-12-02 1990-02-19 Asea Ab Monolitisk optokopplare
JPH01300528A (ja) * 1988-05-30 1989-12-05 Fujitsu Ltd 薄膜形成方法
US5098483A (en) * 1989-09-05 1992-03-24 Spire Corporation Methods of treating spherical surfaces
US5081069A (en) * 1989-12-26 1992-01-14 Texas Instruments Incorporated Method for depositing a Tio2 layer using a periodic and simultaneous tilting and rotating platform motion
DE4008405C1 (de) * 1990-03-16 1991-07-11 Schott Glaswerke, 6500 Mainz, De

Also Published As

Publication number Publication date
DE69210792T2 (de) 1996-09-26
JPH0680487A (ja) 1994-03-22
EP0551737A1 (de) 1993-07-21
KR930013201A (ko) 1993-07-21
EP0551737B1 (de) 1996-05-15
KR950012813B1 (ko) 1995-10-21
US5380551A (en) 1995-01-10
JP2513976B2 (ja) 1996-07-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee