DE69209607T2 - Elektronemittierende Vorrichtung und Elektronenstrahlerzeugungsgerät und diese Vorrichtung verwendendes Bilderzeugungsgerät - Google Patents

Elektronemittierende Vorrichtung und Elektronenstrahlerzeugungsgerät und diese Vorrichtung verwendendes Bilderzeugungsgerät

Info

Publication number
DE69209607T2
DE69209607T2 DE69209607T DE69209607T DE69209607T2 DE 69209607 T2 DE69209607 T2 DE 69209607T2 DE 69209607 T DE69209607 T DE 69209607T DE 69209607 T DE69209607 T DE 69209607T DE 69209607 T2 DE69209607 T2 DE 69209607T2
Authority
DE
Germany
Prior art keywords
electron
region
emitting device
same
imaging device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69209607T
Other languages
English (en)
Other versions
DE69209607D1 (de
Inventor
Yoshikazu Banno
Ichiro Nomura
Hidetoshi Suzuki
Takashi Noma
Rie Ueno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69209607D1 publication Critical patent/DE69209607D1/de
Application granted granted Critical
Publication of DE69209607T2 publication Critical patent/DE69209607T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/316—Cold cathodes, e.g. field-emissive cathode having an electric field parallel to the surface, e.g. thin film cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00—Cathode ray tubes; Electron beam tubes
    • H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123—Flat display tubes
    • H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
    • H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/027—Manufacture of electrodes or electrode systems of cold cathodes of thin film cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/316—Cold cathodes having an electric field parallel to the surface thereof, e.g. thin film cathodes
    • H01J2201/3165—Surface conduction emission type cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
DE69209607T 1991-10-08 1992-10-07 Elektronemittierende Vorrichtung und Elektronenstrahlerzeugungsgerät und diese Vorrichtung verwendendes Bilderzeugungsgerät Expired - Lifetime DE69209607T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26036091A JP3072795B2 (ja) 1991-10-08 1991-10-08 電子放出素子と該素子を用いた電子線発生装置及び画像形成装置

Publications (2)

Publication Number Publication Date
DE69209607D1 DE69209607D1 (de) 1996-05-09
DE69209607T2 true DE69209607T2 (de) 1996-08-29

Family

ID=17346861

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69209607T Expired - Lifetime DE69209607T2 (de) 1991-10-08 1992-10-07 Elektronemittierende Vorrichtung und Elektronenstrahlerzeugungsgerät und diese Vorrichtung verwendendes Bilderzeugungsgerät

Country Status (7)

Country Link
US (2) US5530314A (de)
EP (1) EP0536731B1 (de)
JP (1) JP3072795B2 (de)
AT (1) ATE136399T1 (de)
AU (2) AU667833B2 (de)
CA (1) CA2080091C (de)
DE (1) DE69209607T2 (de)

Families Citing this family (69)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE40062E1 (en) 1987-07-15 2008-02-12 Canon Kabushiki Kaisha Display device with electron-emitting device with electron-emitting region insulated from electrodes
USRE39633E1 (en) 1987-07-15 2007-05-15 Canon Kabushiki Kaisha Display device with electron-emitting device with electron-emitting region insulated from electrodes
USRE40566E1 (en) 1987-07-15 2008-11-11 Canon Kabushiki Kaisha Flat panel display including electron emitting device
EP0790631B1 (de) 1991-10-08 2001-02-21 Canon Kabushiki Kaisha Elektronemittierende Vorrichtung, Elektronenstrahlerzeugungsgerät und diese Vorrichtung verwendendes Bilderzeugungsgerät
CA2134543C (en) * 1993-10-28 2001-04-17 Aoji Isono Electron source, image forming apparatus using the same, method of manufacturing the same, and method of driving the same
CA2418595C (en) 1993-12-27 2006-11-28 Canon Kabushiki Kaisha Electron-emitting device and method of manufacturing the same as well as electron source and image-forming apparatus
AU747313B2 (en) * 1993-12-27 2002-05-16 Canon Kabushiki Kaisha Electron source and image-forming apparatus
AU724811B2 (en) * 1993-12-27 2000-09-28 Canon Kabushiki Kaisha Electron-emitting device
AU747308B2 (en) * 1993-12-27 2002-05-16 Canon Kabushiki Kaisha Method of manufacturing an electron-emitting device
JP3200270B2 (ja) * 1993-12-27 2001-08-20 キヤノン株式会社 表面伝導型電子放出素子、電子源、及び、画像形成装置の製造方法
US6802752B1 (en) 1993-12-27 2004-10-12 Canon Kabushiki Kaisha Method of manufacturing electron emitting device
JP3072825B2 (ja) * 1994-07-20 2000-08-07 キヤノン株式会社 電子放出素子、電子源、及び、画像形成装置の製造方法
CN1106656C (zh) * 1994-09-22 2003-04-23 佳能株式会社 电子发射器件、电子源及成像设备
JP2916887B2 (ja) * 1994-11-29 1999-07-05 キヤノン株式会社 電子放出素子、電子源、画像形成装置の製造方法
JPH0982214A (ja) 1994-12-05 1997-03-28 Canon Inc 電子放出素子、電子源、及び画像形成装置
JP2909719B2 (ja) 1995-01-31 1999-06-23 キヤノン株式会社 電子線装置並びにその駆動方法
US5905335A (en) * 1995-02-03 1999-05-18 Canon Kabushiki Kaisha Electron generation using a fluorescent element and image forming using such electron generation
JP3083076B2 (ja) 1995-04-21 2000-09-04 キヤノン株式会社 画像形成装置
JP3311246B2 (ja) 1995-08-23 2002-08-05 キヤノン株式会社 電子発生装置、画像表示装置およびそれらの駆動回路、駆動方法
US6140761A (en) * 1996-01-31 2000-10-31 Canon Kabushiki Kaisha Electron generation using a fluorescent element and image forming using such electron generation
JP3278375B2 (ja) 1996-03-28 2002-04-30 キヤノン株式会社 電子線発生装置、それを備える画像表示装置、およびそれらの駆動方法
US6231412B1 (en) * 1996-09-18 2001-05-15 Canon Kabushiki Kaisha Method of manufacturing and adjusting electron source array
EP0850892B1 (de) * 1996-12-26 2002-04-03 Canon Kabushiki Kaisha Substrat mit Elektronenquelle, Elektronenquelle, Bilderzeugungsgerät mit solchem Substrat und Herstellungsverfahren
JP3352385B2 (ja) 1997-03-21 2002-12-03 キヤノン株式会社 電子源基板およびそれを用いた電子装置の製造方法
JP3025249B2 (ja) 1997-12-03 2000-03-27 キヤノン株式会社 素子の駆動装置及び素子の駆動方法及び画像形成装置
KR100464294B1 (ko) * 1998-01-12 2005-05-27 삼성에스디아이 주식회사 저항체층겸용음극층을갖는필드에미션어레이및그제조방법
JP3323847B2 (ja) 1999-02-22 2002-09-09 キヤノン株式会社 電子放出素子、電子源および画像形成装置の製造方法
JP3323848B2 (ja) * 1999-02-26 2002-09-09 キヤノン株式会社 電子放出素子およびこれを用いた電子源およびこれを用いた画像形成装置
JP3323851B2 (ja) * 1999-02-26 2002-09-09 キヤノン株式会社 電子放出素子およびこれを用いた電子源およびこれを用いた画像形成装置
JP3323852B2 (ja) * 1999-02-26 2002-09-09 キヤノン株式会社 電子放出素子およびこれを用いた電子源およびこれを用いた画像形成装置
US6376149B2 (en) 1999-05-26 2002-04-23 Yale University Methods and compositions for imaging acids in chemically amplified photoresists using pH-dependent fluorophores
KR100346548B1 (ko) * 2000-01-05 2002-07-26 삼성에스디아이 주식회사 표면 전도형 전자 방출원을 갖는 평판 디스플레이 장치
JP2001319564A (ja) * 2000-05-08 2001-11-16 Canon Inc 電子源形成用基板、該基板を用いた電子源並びに画像表示装置
US6963598B1 (en) 2000-05-23 2005-11-08 Finisar Corporation System and method for VCSEL polarization control
US6660074B1 (en) 2000-11-16 2003-12-09 Egl Company, Inc. Electrodes for gas discharge lamps; emission coatings therefore; and methods of making the same
US6990135B2 (en) * 2002-10-28 2006-01-24 Finisar Corporation Distributed bragg reflector for optoelectronic device
US7065124B2 (en) * 2000-11-28 2006-06-20 Finlsar Corporation Electron affinity engineered VCSELs
US6905900B1 (en) * 2000-11-28 2005-06-14 Finisar Corporation Versatile method and system for single mode VCSELs
US6836501B2 (en) * 2000-12-29 2004-12-28 Finisar Corporation Resonant reflector for increased wavelength and polarization control
TWI227799B (en) * 2000-12-29 2005-02-11 Honeywell Int Inc Resonant reflector for increased wavelength and polarization control
US6965626B2 (en) * 2002-09-03 2005-11-15 Finisar Corporation Single mode VCSEL
US6813293B2 (en) * 2002-11-21 2004-11-02 Finisar Corporation Long wavelength VCSEL with tunnel junction, and implant
US20040222363A1 (en) * 2003-05-07 2004-11-11 Honeywell International Inc. Connectorized optical component misalignment detection system
US20040247250A1 (en) * 2003-06-03 2004-12-09 Honeywell International Inc. Integrated sleeve pluggable package
US7298942B2 (en) 2003-06-06 2007-11-20 Finisar Corporation Pluggable optical optic system having a lens fiber stop
US7433381B2 (en) 2003-06-25 2008-10-07 Finisar Corporation InP based long wavelength VCSEL
US7075962B2 (en) * 2003-06-27 2006-07-11 Finisar Corporation VCSEL having thermal management
US7277461B2 (en) * 2003-06-27 2007-10-02 Finisar Corporation Dielectric VCSEL gain guide
US7054345B2 (en) 2003-06-27 2006-05-30 Finisar Corporation Enhanced lateral oxidation
US20060056762A1 (en) * 2003-07-02 2006-03-16 Honeywell International Inc. Lens optical coupler
US7210857B2 (en) * 2003-07-16 2007-05-01 Finisar Corporation Optical coupling system
US20050013542A1 (en) * 2003-07-16 2005-01-20 Honeywell International Inc. Coupler having reduction of reflections to light source
US20050013539A1 (en) * 2003-07-17 2005-01-20 Honeywell International Inc. Optical coupling system
US6887801B2 (en) * 2003-07-18 2005-05-03 Finisar Corporation Edge bead control method and apparatus
KR20050014430A (ko) * 2003-07-31 2005-02-07 삼성에스디아이 주식회사 평판 표시소자의 전자 방출원 형성용 조성물 및 이로부터제조되는 전자 방출원
US7031363B2 (en) * 2003-10-29 2006-04-18 Finisar Corporation Long wavelength VCSEL device processing
KR20050049842A (ko) * 2003-11-24 2005-05-27 삼성에스디아이 주식회사 전계 방출 표시장치
JP3840251B2 (ja) * 2004-03-10 2006-11-01 キヤノン株式会社 電子放出素子、電子源、画像表示装置及び該画像表示装置を用いた情報表示再生装置及びそれらの製造方法
US7829912B2 (en) * 2006-07-31 2010-11-09 Finisar Corporation Efficient carrier injection in a semiconductor device
US7596165B2 (en) * 2004-08-31 2009-09-29 Finisar Corporation Distributed Bragg Reflector for optoelectronic device
US7920612B2 (en) * 2004-08-31 2011-04-05 Finisar Corporation Light emitting semiconductor device having an electrical confinement barrier near the active region
KR20060104652A (ko) * 2005-03-31 2006-10-09 삼성에스디아이 주식회사 전자 방출 소자
KR20060104657A (ko) * 2005-03-31 2006-10-09 삼성에스디아이 주식회사 전자 방출 소자
JP4143665B2 (ja) * 2005-12-13 2008-09-03 キヤノン株式会社 電子放出素子の製造方法、及びそれを用いた、電子源並びに画像表示装置の製造方法
US8031752B1 (en) 2007-04-16 2011-10-04 Finisar Corporation VCSEL optimized for high speed data
JP5936374B2 (ja) * 2011-02-15 2016-06-22 キヤノン株式会社 圧電振動型力センサ及びロボットハンド並びにロボットアーム
JP6335460B2 (ja) 2013-09-26 2018-05-30 キヤノン株式会社 ロボットシステムの制御装置及び指令値生成方法、並びにロボットシステムの制御方法
JP6964989B2 (ja) 2017-02-09 2021-11-10 キヤノン株式会社 制御方法、ロボットシステム、物品の製造方法、プログラム、及び記録媒体
EP3366433B1 (de) 2017-02-09 2022-03-09 Canon Kabushiki Kaisha Verfahren zur steuerung eines roboters, verfahren zum lehren eines roboters und robotersystem

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8621600D0 (en) * 1986-09-08 1987-03-18 Gen Electric Co Plc Vacuum devices
JPH07114104B2 (ja) * 1987-10-09 1995-12-06 キヤノン株式会社 電子放出素子及びその製造方法
US4855636A (en) * 1987-10-08 1989-08-08 Busta Heinz H Micromachined cold cathode vacuum tube device and method of making
US5023110A (en) * 1988-05-02 1991-06-11 Canon Kabushiki Kaisha Process for producing electron emission device
JPH0687392B2 (ja) * 1988-05-02 1994-11-02 キヤノン株式会社 電子放出素子の製造方法
JP2630988B2 (ja) * 1988-05-26 1997-07-16 キヤノン株式会社 電子線発生装置
JP2923787B2 (ja) * 1989-03-22 1999-07-26 キヤノン株式会社 電子放出素子、それを用いた電子源及び画像形成装置
JP2981751B2 (ja) * 1989-03-23 1999-11-22 キヤノン株式会社 電子線発生装置及びこれを用いた画像形成装置、並びに電子線発生装置の製造方法
US5505647A (en) * 1993-02-01 1996-04-09 Canon Kabushiki Kaisha Method of manufacturing image-forming apparatus

Also Published As

Publication number Publication date
AU4576996A (en) 1996-05-16
ATE136399T1 (de) 1996-04-15
DE69209607D1 (de) 1996-05-09
JP3072795B2 (ja) 2000-08-07
US5645462A (en) 1997-07-08
JPH05101769A (ja) 1993-04-23
EP0536731B1 (de) 1996-04-03
CA2080091C (en) 1999-08-03
CA2080091A1 (en) 1993-04-09
AU678121B2 (en) 1997-05-15
US5530314A (en) 1996-06-25
AU667833B2 (en) 1996-04-18
EP0536731A1 (de) 1993-04-14
AU2629392A (en) 1993-04-22

Similar Documents

Publication Publication Date Title
DE69209607D1 (de) Elektronemittierende Vorrichtung und Elektronenstrahlerzeugungsgerät und diese Vorrichtung verwendendes Bilderzeugungsgerät
DE69219523D1 (de) Bilderzeugungsvorrichtung
CA2152740A1 (en) Electron beam apparatus and image forming apparatus
EP0394698A3 (de) Elektronenstrahllithographiemaschine und Bildwiedergabeapparat
ATE163799T1 (de) Elektronenquelle und elektronenstrahlgerät
DK0528391T3 (da) Feltudstrålingselektronkilde, der anvender en diamantcoating, og fremgangsmåde til fremstilling deraf
EP0388984A3 (de) Elektronenstrahl-Generator und Anzeigevorrichtung unter Verwendung desselben
DE69329524D1 (de) Bilderzeugungsgerät
DE69413319T2 (de) Bilderzeugungsgerät
EP1009009A3 (de) Elektronenemittierende Vorrichtung, Elektronenquelle die diese elektronenemittierenden Vorrichtungen verwendet, und Bilderzeugungsgerät mit dieser Elektronenquelle
DE69409617T2 (de) Bildanzeigegerät
ATE130465T1 (de) Magnetronzerstäubungsquelle und deren verwendung.
AU698650B2 (en) Electron source and production thereof, and image-forming apparatus and production thereof
ATE105134T1 (de) Schirmeinrichtung fuer eine elektrische baugruppe.
DE69231700D1 (de) Elektronemittierende Vorrichtung, Elektronenstrahlerzeugungsgerät und diese Vorrichtung verwendendes Bilderzeugungsgerät
DE69510210D1 (de) Verfahren und gerät zum speichern von spinpolarisierte elektronen gebrauchenden daten
ATE92701T1 (de) Elektroakustischer wandler.
JPS58129439A (ja) 静電記録装置
JPS56162464A (en) Electron beam application equipment
JPS5995563U (ja) イオンビ−ム装置
GR3015259T3 (en) Device for generating an on-off modulated electron beam.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition