DE69206895D1 - Antireflektierende Beschichtung mit Gradientzone - Google Patents
Antireflektierende Beschichtung mit GradientzoneInfo
- Publication number
- DE69206895D1 DE69206895D1 DE69206895T DE69206895T DE69206895D1 DE 69206895 D1 DE69206895 D1 DE 69206895D1 DE 69206895 T DE69206895 T DE 69206895T DE 69206895 T DE69206895 T DE 69206895T DE 69206895 D1 DE69206895 D1 DE 69206895D1
- Authority
- DE
- Germany
- Prior art keywords
- reflective coating
- gradient zone
- gradient
- zone
- reflective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
- B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
- B32B17/1055—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer
- B32B17/10761—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer containing vinyl acetal
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
- B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
- B32B17/10009—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets
- B32B17/10036—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets comprising two outer glass sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
- B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
- B32B17/10165—Functional features of the laminated safety glass or glazing
- B32B17/10174—Coatings of a metallic or dielectric material on a constituent layer of glass or polymer
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3482—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising silicon, hydrogenated silicon or a silicide
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/73—Anti-reflective coatings with specific characteristics
- C03C2217/732—Anti-reflective coatings with specific characteristics made of a single layer
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/90—Other aspects of coatings
- C03C2217/91—Coatings containing at least one layer having a composition gradient through its thickness
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/913—Material designed to be responsive to temperature, light, moisture
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
Landscapes
- Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Surface Treatment Of Glass (AREA)
- Laminated Bodies (AREA)
- Surface Treatment Of Optical Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/717,606 US5234748A (en) | 1991-06-19 | 1991-06-19 | Anti-reflective transparent coating with gradient zone |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69206895D1 true DE69206895D1 (de) | 1996-02-01 |
DE69206895T2 DE69206895T2 (de) | 1996-05-23 |
Family
ID=24882721
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69206895T Expired - Lifetime DE69206895T2 (de) | 1991-06-19 | 1992-06-16 | Antireflektierende Beschichtung mit Gradientzone |
Country Status (5)
Country | Link |
---|---|
US (1) | US5234748A (de) |
EP (1) | EP0519690B1 (de) |
JP (1) | JPH05186245A (de) |
CA (1) | CA2068282A1 (de) |
DE (1) | DE69206895T2 (de) |
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5641558A (en) * | 1992-05-27 | 1997-06-24 | Asahi Glass Company Ltd. | Window glass for an automobile |
US6673438B1 (en) | 1994-05-03 | 2004-01-06 | Cardinal Cg Company | Transparent article having protective silicon nitride film |
DE69503896T3 (de) * | 1994-05-03 | 2005-10-27 | Cardinal Cg Co., Eden Prairie | Transparenter gegenstand mit siliciumnitrid-schutzschicht |
CH690511A5 (de) * | 1994-09-01 | 2000-09-29 | Balzers Hochvakuum | Optisches Bauteil und Verfahren zum Herstellen eines solchen. |
US5811191A (en) * | 1994-12-27 | 1998-09-22 | Ppg Industries, Inc. | Multilayer antireflective coating with a graded base layer |
US5602457A (en) * | 1995-01-03 | 1997-02-11 | Exide Corporation | Photovoltaic solar cell laminated in vehicle windshield |
EP0723944A1 (de) * | 1995-01-26 | 1996-07-31 | Optical Coating Laboratory, Inc. | Verschleissfeste Fenster |
JP3601219B2 (ja) * | 1996-11-13 | 2004-12-15 | 松下電器産業株式会社 | 光ピックアップ用の平行プリズム |
US6124026A (en) * | 1997-07-07 | 2000-09-26 | Libbey-Owens-Ford Co. | Anti-reflective, reduced visible light transmitting coated glass article |
US6265076B1 (en) | 1998-02-06 | 2001-07-24 | Libbey-Owens-Ford Co. | Anti-reflective films |
US6464822B1 (en) | 1998-02-19 | 2002-10-15 | 3M Innovative Properties Company | Antireflection film |
US6379788B2 (en) | 1998-02-19 | 2002-04-30 | 3M Innovative Properties Company | Antireflection film |
US6800378B2 (en) * | 1998-02-19 | 2004-10-05 | 3M Innovative Properties Company | Antireflection films for use with displays |
US7351470B2 (en) * | 1998-02-19 | 2008-04-01 | 3M Innovative Properties Company | Removable antireflection film |
US6632513B1 (en) | 1998-02-19 | 2003-10-14 | 3M Innovative Properties Company | Antireflection film |
US6436541B1 (en) | 1998-04-07 | 2002-08-20 | Ppg Industries Ohio, Inc. | Conductive antireflective coatings and methods of producing same |
US6165598A (en) * | 1998-08-14 | 2000-12-26 | Libbey-Owens-Ford Co. | Color suppressed anti-reflective glass |
US6208466B1 (en) * | 1998-11-25 | 2001-03-27 | 3M Innovative Properties Company | Multilayer reflector with selective transmission |
FR2787440B1 (fr) * | 1998-12-21 | 2001-12-07 | Saint Gobain Vitrage | Substrat transparent comportant un revetement antireflet |
JP4649690B2 (ja) * | 1999-08-23 | 2011-03-16 | 凸版印刷株式会社 | 反射防止積層体およびその製造方法 |
JP2001322833A (ja) * | 2000-05-09 | 2001-11-20 | Central Glass Co Ltd | 車両用低反射ガラス |
US20030049464A1 (en) * | 2001-09-04 | 2003-03-13 | Afg Industries, Inc. | Double silver low-emissivity and solar control coatings |
US6586102B1 (en) * | 2001-11-30 | 2003-07-01 | Guardian Industries Corp. | Coated article with anti-reflective layer(s) system |
US7087936B2 (en) * | 2003-04-30 | 2006-08-08 | Cree, Inc. | Methods of forming light-emitting devices having an antireflective layer that has a graded index of refraction |
US20050277709A1 (en) * | 2004-05-28 | 2005-12-15 | Fisher William K | Polymer layers having infrared absorbing particles |
WO2007026591A1 (ja) * | 2005-08-30 | 2007-03-08 | Konica Minolta Opto, Inc. | 光学フィルム及びその製造方法、並びにそれを用いた偏光板及び液晶表示装置 |
US8153282B2 (en) * | 2005-11-22 | 2012-04-10 | Guardian Industries Corp. | Solar cell with antireflective coating with graded layer including mixture of titanium oxide and silicon oxide |
US20090120785A1 (en) * | 2005-12-26 | 2009-05-14 | United Microelectronics Corp. | Method for forming metal film or stacked layer including metal film with reduced surface roughness |
JP2009538536A (ja) | 2006-05-26 | 2009-11-05 | クリー エル イー ディー ライティング ソリューションズ インコーポレイテッド | 固体発光デバイス、および、それを製造する方法 |
US20080014414A1 (en) * | 2006-07-13 | 2008-01-17 | Vincent James Yacovone | Windshield Interlayer Having a Gradient Region Having a White Coloration |
US7842395B2 (en) * | 2006-11-01 | 2010-11-30 | Solutia Inc. | Multiple layer interlayers having a gradient region |
TWI346215B (en) * | 2006-12-21 | 2011-08-01 | Ind Tech Res Inst | Nano strcuture optical insulating membrane |
DE102006062092B4 (de) * | 2006-12-29 | 2014-02-13 | Anton Näbauer | In Bezug auf Wirkungsgrad und Zuverlässigkeit optimierte Solarmodule |
KR100940433B1 (ko) * | 2006-12-29 | 2010-02-10 | 주식회사 엘지화학 | 반사방지 코팅 조성물 및 이것을 이용하여 제조된 반사방지필름 |
WO2009143618A1 (en) * | 2008-05-28 | 2009-12-03 | Sixtron Advanced Materials, Inc. | Silicon carbide-based antireflective coating |
FR2933394B1 (fr) * | 2008-07-03 | 2011-04-01 | Saint Gobain | Procede de depot de couche mince et produit obtenu |
FR2949776B1 (fr) | 2009-09-10 | 2013-05-17 | Saint Gobain Performance Plast | Element en couches pour l'encapsulation d'un element sensible |
FR2949775B1 (fr) * | 2009-09-10 | 2013-08-09 | Saint Gobain Performance Plast | Substrat de protection pour dispositif collecteur ou emetteur de rayonnement |
DE102009056594A1 (de) * | 2009-12-04 | 2011-06-09 | Q-Cells Se | Antireflexionsbeschichtung sowie Solarzelle und Solarmodul |
US20110151222A1 (en) * | 2009-12-22 | 2011-06-23 | Agc Flat Glass North America, Inc. | Anti-reflective coatings and methods of making the same |
US11609336B1 (en) * | 2018-08-21 | 2023-03-21 | Innovusion, Inc. | Refraction compensation for use in LiDAR systems |
CN102173595B (zh) * | 2011-03-08 | 2013-02-13 | 烟台佳隆纳米产业有限公司 | 一种在汽车挡风玻璃上涂覆隔热涂料的方法 |
FR2973939A1 (fr) | 2011-04-08 | 2012-10-12 | Saint Gobain | Element en couches pour l’encapsulation d’un element sensible |
JP2015001672A (ja) * | 2013-06-17 | 2015-01-05 | 株式会社オプトラン | 反射防止膜およびその製造方法 |
US10096725B2 (en) * | 2013-11-13 | 2018-10-09 | Applied Materials, Inc. | Method for graded anti-reflective coatings by physical vapor deposition |
WO2019046657A1 (en) | 2017-08-31 | 2019-03-07 | Corning Incorporated | HYBRID GRADIENT HARD INTERFERENCE COATINGS |
US11520082B2 (en) | 2017-08-31 | 2022-12-06 | Corning Incorporated | Hybrid gradient-interference hardcoatings |
US11422294B2 (en) | 2017-10-10 | 2022-08-23 | Central Glass Company, Limited | Durable functional coatings |
Family Cites Families (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3990784A (en) * | 1974-06-05 | 1976-11-09 | Optical Coating Laboratory, Inc. | Coated architectural glass system and method |
US4144684A (en) * | 1974-06-14 | 1979-03-20 | Pilkington Brothers Limited | Glazing unit |
US4822120A (en) * | 1974-08-16 | 1989-04-18 | Massachusetts Institute Of Technology | Transparent heat-mirror |
JPS5195858A (en) * | 1975-01-14 | 1976-08-23 | ****** *** *ku***chi*se*ku*******ka*****************chi***ne******** | |
GB1573154A (en) * | 1977-03-01 | 1980-08-13 | Pilkington Brothers Ltd | Coating glass |
US4100330A (en) * | 1977-03-28 | 1978-07-11 | Ppg Industries, Inc. | Method for coating glass with silicon and a metal oxide and resulting product |
JPS53141318A (en) * | 1977-05-17 | 1978-12-09 | Nippon Sheet Glass Co Ltd | Heat radiation reflecive glass |
US4185894A (en) * | 1978-03-13 | 1980-01-29 | Hughes Aircraft Company | Dielectric reflector for selective wavelength reflection |
JPS5727263A (en) * | 1980-07-28 | 1982-02-13 | Hitachi Ltd | Electrophotographic photosensitive film |
JPS5826052A (ja) * | 1981-08-06 | 1983-02-16 | Asahi Glass Co Ltd | アルカリ拡散防止酸化ケイ素膜付ガラス体 |
JPS5860701A (ja) * | 1981-10-07 | 1983-04-11 | Konishiroku Photo Ind Co Ltd | 反射防止膜 |
US4737379A (en) * | 1982-09-24 | 1988-04-12 | Energy Conversion Devices, Inc. | Plasma deposited coatings, and low temperature plasma method of making same |
US4689873A (en) * | 1983-04-28 | 1987-09-01 | Rca Corporation | Imaging device having two anti-reflection layers on a surface of silicon wafer |
DE3546544C2 (de) * | 1984-02-28 | 1990-02-15 | Sharp K.K., Osaka, Jp | |
ATE52814T1 (de) * | 1984-03-03 | 1990-06-15 | Stc Plc | Beschichtungsverfahren. |
US4822748A (en) * | 1984-08-20 | 1989-04-18 | California Institute Of Technology | Photosensor with enhanced quantum efficiency |
US4546050A (en) * | 1984-11-23 | 1985-10-08 | Ford Motor Company | Coated glass article as a new article of manufacture |
US4737018A (en) * | 1985-01-30 | 1988-04-12 | Seiko Epson Corporation | Display device having anti-reflective electrodes and/or insulating film |
FR2580673B1 (fr) * | 1985-04-19 | 1987-09-25 | Haond Michel | Procede de fabrication sur un support isolant d'un film de silicium monocristallin oriente et a defauts localises |
CA1293655C (en) * | 1985-04-30 | 1991-12-31 | Takashi Taniguchi | Anti-reflection optical article and process for preparation thereof |
US4846151A (en) * | 1985-05-01 | 1989-07-11 | Simko Jr Frank A | Solar collectors |
US4835040A (en) * | 1985-10-07 | 1989-05-30 | Libbey-Owens-Ford Co. | Continuous vapor deposition method for producing a coated glass article |
US4661381A (en) * | 1985-10-07 | 1987-04-28 | Libbey-Owens-Ford Co. | Continuous vapor deposition method for producing a coated glass article |
US4634684A (en) * | 1985-10-23 | 1987-01-06 | Corning Glass Works | Strontium aluminosilicate glass substrates for flat panel display devices |
US4802737A (en) * | 1986-04-28 | 1989-02-07 | Denton Peter R | Anti-relfection overlay device |
US4732801A (en) * | 1986-04-30 | 1988-03-22 | International Business Machines Corporation | Graded oxide/nitride via structure and method of fabrication therefor |
US4847157A (en) * | 1986-08-28 | 1989-07-11 | Libbey-Owens-Ford Co. | Glass coating method and resulting article |
JPS6358739A (ja) * | 1986-08-29 | 1988-03-14 | Hitachi Ltd | 表示装置用面板 |
US4780334A (en) * | 1987-03-13 | 1988-10-25 | General Electric Company | Method and composition for depositing silicon dioxide layers |
FR2631346B1 (fr) * | 1988-05-11 | 1994-05-20 | Air Liquide | Revetement protecteur multicouche pour substrat, procede de protection de substrat par depot par plasma d'un tel revetement, revetements obtenus et leurs applications |
-
1991
- 1991-06-19 US US07/717,606 patent/US5234748A/en not_active Expired - Fee Related
-
1992
- 1992-05-08 CA CA002068282A patent/CA2068282A1/en not_active Abandoned
- 1992-06-16 DE DE69206895T patent/DE69206895T2/de not_active Expired - Lifetime
- 1992-06-16 EP EP92305523A patent/EP0519690B1/de not_active Expired - Lifetime
- 1992-06-17 JP JP4157758A patent/JPH05186245A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
CA2068282A1 (en) | 1992-12-20 |
EP0519690A1 (de) | 1992-12-23 |
DE69206895T2 (de) | 1996-05-23 |
JPH05186245A (ja) | 1993-07-27 |
US5234748A (en) | 1993-08-10 |
EP0519690B1 (de) | 1995-12-20 |
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