FR2933394B1 - Procede de depot de couche mince et produit obtenu - Google Patents

Procede de depot de couche mince et produit obtenu

Info

Publication number
FR2933394B1
FR2933394B1 FR0854539A FR0854539A FR2933394B1 FR 2933394 B1 FR2933394 B1 FR 2933394B1 FR 0854539 A FR0854539 A FR 0854539A FR 0854539 A FR0854539 A FR 0854539A FR 2933394 B1 FR2933394 B1 FR 2933394B1
Authority
FR
France
Prior art keywords
thin film
product obtained
deposition method
film deposition
product
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0854539A
Other languages
English (en)
Other versions
FR2933394A1 (fr
Inventor
Fabrice Abbott
Bruno Cordier
Bernard Nghiem
Olivier Selles
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Glass France SAS
Compagnie de Saint Gobain SA
Original Assignee
Saint Gobain Glass France SAS
Compagnie de Saint Gobain SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Glass France SAS, Compagnie de Saint Gobain SA filed Critical Saint Gobain Glass France SAS
Priority to FR0854539A priority Critical patent/FR2933394B1/fr
Priority to EP09772743A priority patent/EP2307329A2/fr
Priority to CN2009801252242A priority patent/CN102076627A/zh
Priority to MX2010013869A priority patent/MX2010013869A/es
Priority to US13/002,402 priority patent/US20110102926A1/en
Priority to PCT/FR2009/051291 priority patent/WO2010001061A2/fr
Publication of FR2933394A1 publication Critical patent/FR2933394A1/fr
Application granted granted Critical
Publication of FR2933394B1 publication Critical patent/FR2933394B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3605—Coatings of the type glass/metal/inorganic compound
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/3663—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties specially adapted for use as mirrors
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3694—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer having a composition gradient through its thickness
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
    • F24S23/00—Arrangements for concentrating solar-rays for solar heat collectors
    • F24S23/70—Arrangements for concentrating solar-rays for solar heat collectors with reflectors
    • F24S23/82—Arrangements for concentrating solar-rays for solar heat collectors with reflectors characterised by the material or the construction of the reflector
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0808—Mirrors having a single reflecting layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd
    • C03C2218/153—Deposition methods from the vapour phase by cvd by plasma-enhanced cvd
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/154—Deposition methods from the vapour phase by sputtering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/40—Solar thermal energy, e.g. solar towers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Sustainable Energy (AREA)
  • Sustainable Development (AREA)
  • Thermal Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Inorganic Chemistry (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Surface Treatment Of Glass (AREA)
  • Chemical Vapour Deposition (AREA)
FR0854539A 2008-07-03 2008-07-03 Procede de depot de couche mince et produit obtenu Expired - Fee Related FR2933394B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR0854539A FR2933394B1 (fr) 2008-07-03 2008-07-03 Procede de depot de couche mince et produit obtenu
EP09772743A EP2307329A2 (fr) 2008-07-03 2009-07-02 Miroir et procede d'obtention d'un miroir
CN2009801252242A CN102076627A (zh) 2008-07-03 2009-07-02 镜子和用于获得镜子的方法
MX2010013869A MX2010013869A (es) 2008-07-03 2009-07-02 Espejo y proceso para obtener un espejo.
US13/002,402 US20110102926A1 (en) 2008-07-03 2009-07-02 Mirror and process for obtaining a mirror
PCT/FR2009/051291 WO2010001061A2 (fr) 2008-07-03 2009-07-02 Miroir et procede d'obtention d'un miroir

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0854539A FR2933394B1 (fr) 2008-07-03 2008-07-03 Procede de depot de couche mince et produit obtenu

Publications (2)

Publication Number Publication Date
FR2933394A1 FR2933394A1 (fr) 2010-01-08
FR2933394B1 true FR2933394B1 (fr) 2011-04-01

Family

ID=40328584

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0854539A Expired - Fee Related FR2933394B1 (fr) 2008-07-03 2008-07-03 Procede de depot de couche mince et produit obtenu

Country Status (6)

Country Link
US (1) US20110102926A1 (fr)
EP (1) EP2307329A2 (fr)
CN (1) CN102076627A (fr)
FR (1) FR2933394B1 (fr)
MX (1) MX2010013869A (fr)
WO (1) WO2010001061A2 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2942623B1 (fr) * 2009-02-27 2012-05-25 Saint Gobain Feuille de verre
US8815402B2 (en) * 2010-03-31 2014-08-26 Ppg Industries Ohio, Inc. Mirror having reflective coatings on a first surface and an opposite second surface
FR2975195A1 (fr) 2011-05-10 2012-11-16 Saint Gobain Miroir a fine feuille de verre
DE102011113160A1 (de) * 2011-09-14 2013-03-14 Evonik Röhm Gmbh Polymere Materialien für Außenanwendungen mit selbstheilenden Oberflächeneigenschaften nach Verkratzen oder Abrasionsbeschädigung
EP2773989A4 (fr) * 2011-11-04 2015-10-21 Univ New York State Res Found Structures de largeur de bande interdite photonique pour dispositifs d'imagerie multispectrale
FR2984529B1 (fr) 2011-12-16 2014-10-10 Saint Gobain Miroir comprenant un film rapporte a base de polymere
CN102692698B (zh) * 2012-06-06 2014-04-02 上海沪渝实业有限公司 聚光反射装置及其制作方法
CN111559875B (zh) * 2020-06-19 2024-05-14 广东旗滨节能玻璃有限公司 一种镀膜玻璃及其制备方法

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4780372A (en) * 1984-07-20 1988-10-25 The United States Of America As Represented By The United States Department Of Energy Silicon nitride protective coatings for silvered glass mirrors
GB8719258D0 (en) * 1987-08-14 1987-09-23 Pilkington Glass Ltd Glazine units
US5004308A (en) * 1990-05-23 1991-04-02 Rockwell International Corporation Rugate reflector
US5234748A (en) * 1991-06-19 1993-08-10 Ford Motor Company Anti-reflective transparent coating with gradient zone
JPH05113505A (ja) * 1991-10-22 1993-05-07 Mitsubishi Electric Corp 低反射膜付陰極線管およびその製造方法
US5572086A (en) * 1995-05-18 1996-11-05 Chunghwa Picture Tubes, Ltd. Broadband antireflective and antistatic coating for CRT
US6086210A (en) * 1995-06-29 2000-07-11 Cardinal Ig Company Bendable mirrors and method of manufacture
CN1189813A (zh) * 1996-03-07 1998-08-05 圣戈班玻璃制造公司 在玻璃上沉积反射层的方法及所获得的产品
TR199701320T1 (xx) * 1996-03-07 1998-06-22 Saint-Gobain Vitrage Cam �zerine yans�t�c� bir katman kaplama y�ntemi
FR2752235B3 (fr) * 1996-08-07 1998-08-28 Saint Gobain Vitrage Substrat verrier muni d'une couche reflechissante
US5991064A (en) * 1996-06-29 1999-11-23 Daewoo Electronics Co., Ltd. Thin film actuated mirror array and a method for the manufacture thereof
FR2759362B1 (fr) * 1997-02-10 1999-03-12 Saint Gobain Vitrage Substrat transparent muni d'au moins une couche mince a base de nitrure ou d'oxynitrure de silicium et son procede d'obtention
US6287683B1 (en) * 1997-04-09 2001-09-11 Canon Kabushiki Kaisha Anti-fogging coating and optical part using the same
US6495251B1 (en) * 1997-06-20 2002-12-17 Ppg Industries Ohio, Inc. Silicon oxynitride protective coatings
US20020048099A1 (en) * 1998-06-09 2002-04-25 Heinrich Lang "front surface mirror with protective coating"
US20020057494A1 (en) * 1998-06-09 2002-05-16 Heinrich Lang Back surface mirror with protective coating
KR100338730B1 (ko) * 1998-07-27 2002-08-22 삼성전자 주식회사 플라즈마디스플레이패널
US6398925B1 (en) * 1998-12-18 2002-06-04 Ppg Industries Ohio, Inc. Methods and apparatus for producing silver based low emissivity coatings without the use of metal primer layers and articles produced thereby
JP2002055213A (ja) * 2000-06-02 2002-02-20 Canon Inc 高反射ミラー
JP2002162510A (ja) * 2000-11-22 2002-06-07 Murakami Corp 半透過型高反射膜
US6942923B2 (en) * 2001-12-21 2005-09-13 Guardian Industries Corp. Low-e coating with high visible transmission
US6783253B2 (en) * 2002-03-21 2004-08-31 Guardian Industries Corp. First surface mirror with DLC coating
US6934085B2 (en) * 2003-10-21 2005-08-23 Guardian Industries Corp. First surface mirror with chromium inclusive nucleation layer
FR2861386B1 (fr) * 2003-10-23 2006-02-17 Saint Gobain Substrat, notamment substrat verrier, portant une couche a propriete photocatalytique revetue d'une couche mince protectrice.
US8524051B2 (en) * 2004-05-18 2013-09-03 Centre Luxembourg de Recherches pour le Verre et al Ceramique S. A. (C.R.V.C.) Coated article with oxidation graded layer proximate IR reflecting layer(s) and corresponding method
US7550067B2 (en) * 2004-06-25 2009-06-23 Guardian Industries Corp. Coated article with ion treated underlayer and corresponding method
US7585396B2 (en) * 2004-06-25 2009-09-08 Guardian Industries Corp. Coated article with ion treated overcoat layer and corresponding method
US7276289B2 (en) * 2004-09-21 2007-10-02 Guardian Industries Corp. First surface mirror with metal oxide nucleation layer
US7531239B2 (en) * 2005-04-06 2009-05-12 Eclipse Energy Systems Inc Transparent electrode
JP2007052100A (ja) * 2005-08-16 2007-03-01 Konica Minolta Opto Inc 光学反射部材
US20080073203A1 (en) * 2006-09-19 2008-03-27 Guardian Industries Corp. Method of making first surface mirror with oxide graded reflecting layer structure
US7833574B2 (en) * 2007-01-29 2010-11-16 Guardian Industries Corp. Method of making heat treated coated article using diamond-like carbon (DLC) coating and protective film

Also Published As

Publication number Publication date
CN102076627A (zh) 2011-05-25
WO2010001061A3 (fr) 2010-02-25
WO2010001061A2 (fr) 2010-01-07
FR2933394A1 (fr) 2010-01-08
EP2307329A2 (fr) 2011-04-13
US20110102926A1 (en) 2011-05-05
MX2010013869A (es) 2011-02-24

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20140331