DE69204374D1 - Winkelgeschwindigkeitsmesseinrichtung mit Gasflussfühler. - Google Patents

Winkelgeschwindigkeitsmesseinrichtung mit Gasflussfühler.

Info

Publication number
DE69204374D1
DE69204374D1 DE69204374T DE69204374T DE69204374D1 DE 69204374 D1 DE69204374 D1 DE 69204374D1 DE 69204374 T DE69204374 T DE 69204374T DE 69204374 T DE69204374 T DE 69204374T DE 69204374 D1 DE69204374 D1 DE 69204374D1
Authority
DE
Germany
Prior art keywords
measuring device
gas flow
angular velocity
flow sensor
velocity measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69204374T
Other languages
English (en)
Other versions
DE69204374T2 (de
Inventor
Takashi Hosoi
Mizuho Doi
Tomoyuki Nishio
Satoshi Hiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honda Motor Co Ltd
Original Assignee
Honda Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honda Motor Co Ltd filed Critical Honda Motor Co Ltd
Publication of DE69204374D1 publication Critical patent/DE69204374D1/de
Application granted granted Critical
Publication of DE69204374T2 publication Critical patent/DE69204374T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/58—Turn-sensitive devices without moving masses
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49007—Indicating transducer
DE69204374T 1991-06-19 1992-06-16 Winkelgeschwindigkeitsmesseinrichtung mit Gasflussfühler. Expired - Fee Related DE69204374T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3245296A JP2992660B2 (ja) 1991-06-19 1991-06-19 ガスレートセンサ

Publications (2)

Publication Number Publication Date
DE69204374D1 true DE69204374D1 (de) 1995-10-05
DE69204374T2 DE69204374T2 (de) 1996-02-22

Family

ID=17131561

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69204374T Expired - Fee Related DE69204374T2 (de) 1991-06-19 1992-06-16 Winkelgeschwindigkeitsmesseinrichtung mit Gasflussfühler.

Country Status (4)

Country Link
US (1) US5438871A (de)
EP (1) EP0519404B1 (de)
JP (1) JP2992660B2 (de)
DE (1) DE69204374T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69510569T2 (de) * 1994-01-20 1999-10-28 Honda Motor Co Ltd Beschleunigungsmessaufnehmer
JP3247533B2 (ja) * 1994-02-04 2002-01-15 本田技研工業株式会社 半導体ガスレートセンサの製造方法
JP3244208B2 (ja) * 1994-02-07 2002-01-07 本田技研工業株式会社 ガスレート検出器
JP3312227B2 (ja) * 1994-02-23 2002-08-05 本田技研工業株式会社 ガス式角速度センサ
JP3333948B2 (ja) * 1994-02-23 2002-10-15 本田技研工業株式会社 ガス式センサの製造方法
JP3281169B2 (ja) * 1994-03-24 2002-05-13 本田技研工業株式会社 多軸型ガスレートセンサ
US5786744A (en) * 1994-03-24 1998-07-28 Honda Giken Kogyo Kabushiki Kaisha Hybrid sensor
DE19528961C2 (de) * 1995-08-08 1998-10-29 Daimler Benz Ag Mikromechanischer Drehratensensor (DRS) und Sensoranordnung
US5870511A (en) * 1997-01-27 1999-02-09 Sentec Corporation Fiber optic temperature sensor
US6182509B1 (en) 1996-06-26 2001-02-06 Simon Fraser University Accelerometer without proof mass
US6589433B2 (en) 1996-06-26 2003-07-08 Simon Fraser University Accelerometer without proof mass
WO1997049998A1 (en) 1996-06-26 1997-12-31 Simon Fraser University Accelerometer without proof mass
JPH1078448A (ja) * 1996-09-03 1998-03-24 Tokai Rika Co Ltd ヨーレートセンサ及び角速度検出方法
DE10046509A1 (de) * 2000-09-14 2002-04-04 Siemens Ag Sensorbauteil und Verfahren zu seiner Herstellung
DE10046510A1 (de) * 2000-09-14 2002-04-18 Siemens Ag Sensorbauteil mit einem in einem Kanal isoliert, umströmbar gelagerten, elektrisch leitenden, länglichen Element und Herstellverfahren hierfür
US6787339B1 (en) * 2000-10-02 2004-09-07 Motorola, Inc. Microfluidic devices having embedded metal conductors and methods of fabricating said devices
CN105547371B (zh) * 2016-01-19 2018-05-08 东南大学 基于陶瓷封装的二维热式风速风向传感器及其制作方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4548078A (en) * 1982-09-30 1985-10-22 Honeywell Inc. Integral flow sensor and channel assembly
US4934190A (en) * 1987-12-23 1990-06-19 Siemens-Bendix Automotive Electronics L.P. Silicon-based sensors
JP2721840B2 (ja) * 1989-06-28 1998-03-04 本田技研工業株式会社 ガス式角速度検出器

Also Published As

Publication number Publication date
JPH04370767A (ja) 1992-12-24
DE69204374T2 (de) 1996-02-22
EP0519404B1 (de) 1995-08-30
JP2992660B2 (ja) 1999-12-20
EP0519404A1 (de) 1992-12-23
US5438871A (en) 1995-08-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee