DE68926554D1 - Durchflussensor - Google Patents

Durchflussensor

Info

Publication number
DE68926554D1
DE68926554D1 DE68926554T DE68926554T DE68926554D1 DE 68926554 D1 DE68926554 D1 DE 68926554D1 DE 68926554 T DE68926554 T DE 68926554T DE 68926554 T DE68926554 T DE 68926554T DE 68926554 D1 DE68926554 D1 DE 68926554D1
Authority
DE
Germany
Prior art keywords
flow sensor
sensor
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68926554T
Other languages
English (en)
Other versions
DE68926554T2 (de
Inventor
Junichi Tanaka
Akihito Jinda
Nobuyuki Tanaka
Yasuhiko Inami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Application granted granted Critical
Publication of DE68926554D1 publication Critical patent/DE68926554D1/de
Publication of DE68926554T2 publication Critical patent/DE68926554T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
DE68926554T 1988-08-04 1989-08-01 Durchflussensor Expired - Fee Related DE68926554T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63195426A JPH0244211A (ja) 1988-08-04 1988-08-04 フローセンサ

Publications (2)

Publication Number Publication Date
DE68926554D1 true DE68926554D1 (de) 1996-07-04
DE68926554T2 DE68926554T2 (de) 1996-10-31

Family

ID=16340877

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68926554T Expired - Fee Related DE68926554T2 (de) 1988-08-04 1989-08-01 Durchflussensor

Country Status (4)

Country Link
US (1) US5033299A (de)
EP (1) EP0353996B1 (de)
JP (1) JPH0244211A (de)
DE (1) DE68926554T2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3841135C2 (de) * 1988-12-07 1998-04-09 Hiss Eckart Meßelement
EP0471316B1 (de) * 1990-08-17 1996-09-18 Sensycon Gesellschaft Für Industrielle Sensorsysteme Und Prozessleittechnik Mbh Sensor für thermische Massenstrommesser
DE9011927U1 (de) * 1990-08-17 1990-11-08 Sensycon Gesellschaft Fuer Industrielle Sensorsysteme Und Prozessleittechnik Mbh, 3000 Hannover, De
DE9200771U1 (de) * 1992-01-23 1992-03-12 Siemens Ag, 8000 Muenchen, De
JP2842729B2 (ja) * 1992-04-30 1999-01-06 三菱電機株式会社 感熱式流量センサ
DE4307512A1 (de) * 1993-03-10 1994-09-15 Bosch Gmbh Robert Meßelement
DE4307513A1 (de) * 1993-03-10 1994-09-15 Bosch Gmbh Robert Meßelement
DE9409318U1 (de) * 1994-06-08 1994-08-11 Murata Elektronik Gmbh Strömungssensor
JP3366818B2 (ja) * 1997-01-16 2003-01-14 株式会社日立製作所 熱式空気流量計
DE19710559A1 (de) * 1997-03-14 1998-09-17 Bosch Gmbh Robert Sensor mit einem Dünnfilmelement
US6078030A (en) * 1998-09-09 2000-06-20 Millipore Corporation Component heater for use in semiconductor manufacturing equipment
JP3981907B2 (ja) * 1998-10-21 2007-09-26 株式会社デンソー 流量測定装置
DE10003436B4 (de) * 1999-02-18 2009-08-13 Ifm Electronic Gmbh Wärmeübergangskontroll- und/oder -meßgerät
DE102005061703A1 (de) * 2005-12-21 2007-07-05 Innovative Sensor Technology Ist Ag Vorrichtung zur Bestimmung und/oder Überwachung einer Prozessgrösse und Verfahren zur Herstellung einer entsprechenden Sensoreinheit
DE102007023824B4 (de) * 2007-05-21 2010-01-07 Abb Ag Thermischer Massendurchflussmesser
JP5094212B2 (ja) * 2007-05-25 2012-12-12 日立オートモティブシステムズ株式会社 熱式流量計と制御方法
DE102010018948B4 (de) 2010-04-30 2018-08-16 Abb Schweiz Ag Thermischer Massendurchflussmesser mit zusätzlichen Sensormitteln sowie Verfahren zum Betrieb desselben
EP3002564A1 (de) * 2014-10-01 2016-04-06 Siemens Schweiz AG Luftstromerkennungsvorrichtung

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2728060A1 (de) * 1977-06-22 1979-01-18 Bosch Gmbh Robert Messonde mit temperaturabhaengigem widerstand zur mengenmessung
US4399697A (en) * 1980-03-26 1983-08-23 Nippon Soken, Inc. Gas flow measuring apparatus
JPS59162413A (ja) * 1983-03-07 1984-09-13 Hitachi Ltd 熱式流量計
DE3328853C2 (de) * 1983-08-10 1994-07-14 Bosch Gmbh Robert Vorrichtung zur Messung der Masse eines strömenden Mediums
JPH0663798B2 (ja) * 1986-05-09 1994-08-22 日本電装株式会社 熱式流量センサ
JPS63233325A (ja) * 1986-08-22 1988-09-29 Hitachi Ltd 熱膜式流量計用感温抵抗体
GB2196433B (en) * 1986-10-08 1990-10-24 Hitachi Ltd Hot element air flow meter
DE3638138A1 (de) * 1986-11-08 1988-05-11 Bosch Gmbh Robert Vorrichtung zur bestimmung der masse eines stroemenden mediums

Also Published As

Publication number Publication date
US5033299A (en) 1991-07-23
EP0353996A3 (de) 1993-02-17
DE68926554T2 (de) 1996-10-31
EP0353996B1 (de) 1996-05-29
EP0353996A2 (de) 1990-02-07
JPH0244211A (ja) 1990-02-14

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Legal Events

Date Code Title Description
8328 Change in the person/name/address of the agent

Free format text: PATENTANWAELTE MUELLER & HOFFMANN, 81667 MUENCHEN

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee