KR910012243U - 감열식 유량센서 - Google Patents

감열식 유량센서

Info

Publication number
KR910012243U
KR910012243U KR2019900017334U KR900017334U KR910012243U KR 910012243 U KR910012243 U KR 910012243U KR 2019900017334 U KR2019900017334 U KR 2019900017334U KR 900017334 U KR900017334 U KR 900017334U KR 910012243 U KR910012243 U KR 910012243U
Authority
KR
South Korea
Prior art keywords
flow sensor
thermal flow
thermal
sensor
flow
Prior art date
Application number
KR2019900017334U
Other languages
English (en)
Other versions
KR930005043Y1 (ko
Inventor
시찌로 오다니
Original Assignee
미쯔비시 덴끼 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 미쯔비시 덴끼 가부시끼가이샤 filed Critical 미쯔비시 덴끼 가부시끼가이샤
Publication of KR910012243U publication Critical patent/KR910012243U/ko
Application granted granted Critical
Publication of KR930005043Y1 publication Critical patent/KR930005043Y1/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
KR2019900017334U 1989-12-18 1990-11-13 감열식 유량센서 KR930005043Y1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP146,141 1989-12-18
JP1989146141U JP2524144Y2 (ja) 1989-12-18 1989-12-18 感熱式流量センサ

Publications (2)

Publication Number Publication Date
KR910012243U true KR910012243U (ko) 1991-07-30
KR930005043Y1 KR930005043Y1 (ko) 1993-07-29

Family

ID=15401071

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019900017334U KR930005043Y1 (ko) 1989-12-18 1990-11-13 감열식 유량센서

Country Status (4)

Country Link
US (1) US5163322A (ko)
JP (1) JP2524144Y2 (ko)
KR (1) KR930005043Y1 (ko)
DE (1) DE4040375C2 (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE36489E (en) * 1994-04-06 2000-01-11 Janos Technology Inc. Spectral analyzer with new high efficiency collection optics and method of using same
DE10027831C2 (de) * 2000-06-05 2002-08-01 Siemens Ag Massenstrommesser
TWI220540B (en) * 2003-07-18 2004-08-21 Au Optronics Corp Buffer of pressure gauge sensor used in dry etching reaction chamber
US7905153B2 (en) * 2009-04-24 2011-03-15 Mann+Hummel Gmbh Flow vortex suppression apparatus for a mass air flow sensor

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3687130A (en) * 1969-11-26 1972-08-29 Pelam Inc Instrument to measure pulmonary function
EP0008185B1 (en) * 1978-08-05 1983-06-08 Nissan Motor Co., Ltd. Flowmeter of hot wire type
DE2934137C2 (de) * 1978-08-25 1985-05-15 Nissan Motor Co., Ltd., Yokohama, Kanagawa Strömungsmeßanordnung zum Messen einer Strömungsmenge in einem rohrförmigen Kanal
DE3009382A1 (de) * 1980-03-12 1981-09-24 Degussa Ag, 6000 Frankfurt Vorrichtung zur messung der stroemungsgeschwindigkeiten von gasen und fluessigkeiten
US4433576A (en) * 1982-09-20 1984-02-28 General Motors Corporation Mass airflow sensor
JPH0346199Y2 (ko) * 1985-04-18 1991-09-30
JPS62232517A (ja) * 1986-04-02 1987-10-13 Hitachi Ltd 熱線式空気流量計
EP0313089B1 (en) * 1987-10-23 1996-09-18 Hitachi, Ltd. Hot wire type of air flow meter and internal combustion engine using the same

Also Published As

Publication number Publication date
KR930005043Y1 (ko) 1993-07-29
DE4040375C2 (de) 1996-10-24
DE4040375A1 (de) 1991-06-27
US5163322A (en) 1992-11-17
JPH0383825U (ko) 1991-08-26
JP2524144Y2 (ja) 1997-01-29

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