DE69203294D1 - Verfahren zur Herstellung einer supraleitenden Dünnschicht aus einer oxidverbindung. - Google Patents

Verfahren zur Herstellung einer supraleitenden Dünnschicht aus einer oxidverbindung.

Info

Publication number
DE69203294D1
DE69203294D1 DE69203294T DE69203294T DE69203294D1 DE 69203294 D1 DE69203294 D1 DE 69203294D1 DE 69203294 T DE69203294 T DE 69203294T DE 69203294 T DE69203294 T DE 69203294T DE 69203294 D1 DE69203294 D1 DE 69203294D1
Authority
DE
Germany
Prior art keywords
producing
thin film
oxide compound
superconducting thin
superconducting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69203294T
Other languages
English (en)
Other versions
DE69203294T2 (de
Inventor
Hidenori Nakanishi
Shin-Ichi Shikata
Hideo Itozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of DE69203294D1 publication Critical patent/DE69203294D1/de
Application granted granted Critical
Publication of DE69203294T2 publication Critical patent/DE69203294T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0576—Processes for depositing or forming copper oxide superconductor layers characterised by the substrate
    • H10N60/0632—Intermediate layers, e.g. for growth control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y10S505/731—Sputter coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y10S505/732—Evaporative coating with superconducting material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/736—From free metal precursors

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
DE69203294T 1991-05-20 1992-05-20 Verfahren zur Herstellung einer supraleitenden Dünnschicht aus einer oxidverbindung. Expired - Fee Related DE69203294T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3144022A JPH04342497A (ja) 1991-05-20 1991-05-20 複合酸化物超電導薄膜の成膜方法

Publications (2)

Publication Number Publication Date
DE69203294D1 true DE69203294D1 (de) 1995-08-10
DE69203294T2 DE69203294T2 (de) 1996-03-07

Family

ID=15352508

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69203294T Expired - Fee Related DE69203294T2 (de) 1991-05-20 1992-05-20 Verfahren zur Herstellung einer supraleitenden Dünnschicht aus einer oxidverbindung.

Country Status (4)

Country Link
US (1) US5252553A (de)
EP (1) EP0519769B1 (de)
JP (1) JPH04342497A (de)
DE (1) DE69203294T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3579690B2 (ja) * 2000-09-01 2004-10-20 独立行政法人 科学技術振興機構 複合酸化物系薄膜の作製方法及びその装置並びにそれにより作製した複合酸化物系薄膜。
WO2003034448A1 (en) * 2000-12-06 2003-04-24 The Regents Of The University Of California Superconducting composite structures
KR100644410B1 (ko) * 2005-08-05 2006-11-10 삼성전자주식회사 금속 산화막의 형성 방법 및 이를 이용한 반도체커패시터의 제조 방법

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US488231A (en) * 1892-12-20 Sylvania
JPH04214097A (ja) * 1990-12-13 1992-08-05 Sumitomo Electric Ind Ltd 超電導薄膜の作製方法

Also Published As

Publication number Publication date
EP0519769B1 (de) 1995-07-05
EP0519769A2 (de) 1992-12-23
DE69203294T2 (de) 1996-03-07
EP0519769A3 (en) 1993-03-03
JPH04342497A (ja) 1992-11-27
US5252553A (en) 1993-10-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee