DE69203165T2 - Verfahren zur Herstellung einer optischen Struktur und damit hergestellte optische Struktur. - Google Patents

Verfahren zur Herstellung einer optischen Struktur und damit hergestellte optische Struktur.

Info

Publication number
DE69203165T2
DE69203165T2 DE69203165T DE69203165T DE69203165T2 DE 69203165 T2 DE69203165 T2 DE 69203165T2 DE 69203165 T DE69203165 T DE 69203165T DE 69203165 T DE69203165 T DE 69203165T DE 69203165 T2 DE69203165 T2 DE 69203165T2
Authority
DE
Germany
Prior art keywords
optical structure
deposition
producing
produced therewith
micron thick
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69203165T
Other languages
English (en)
Other versions
DE69203165D1 (de
Inventor
Jean-Christophe Rostaing
Francois Coeuret
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Publication of DE69203165D1 publication Critical patent/DE69203165D1/de
Application granted granted Critical
Publication of DE69203165T2 publication Critical patent/DE69203165T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G02B1/105—
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14—Protective coatings, e.g. hard coatings

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Laminated Bodies (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Chemical Vapour Deposition (AREA)
  • Glass Compositions (AREA)
  • Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
  • Eyeglasses (AREA)
  • Polarising Elements (AREA)
DE69203165T 1991-06-12 1992-06-10 Verfahren zur Herstellung einer optischen Struktur und damit hergestellte optische Struktur. Expired - Fee Related DE69203165T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9107140A FR2677773B1 (fr) 1991-06-12 1991-06-12 Procede d'elaboration d'une structure optique et structure optique ainsi realisee.

Publications (2)

Publication Number Publication Date
DE69203165D1 DE69203165D1 (de) 1995-08-03
DE69203165T2 true DE69203165T2 (de) 1995-11-16

Family

ID=9413735

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69203165T Expired - Fee Related DE69203165T2 (de) 1991-06-12 1992-06-10 Verfahren zur Herstellung einer optischen Struktur und damit hergestellte optische Struktur.

Country Status (8)

Country Link
EP (1) EP0519784B1 (de)
JP (1) JPH05287537A (de)
KR (1) KR930000966A (de)
AT (1) ATE124542T1 (de)
CA (1) CA2070959A1 (de)
DE (1) DE69203165T2 (de)
ES (1) ES2074345T3 (de)
FR (1) FR2677773B1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5909314A (en) * 1994-02-15 1999-06-01 Dai Nippon Printing Co., Ltd. Optical functional materials and process for producing the same
FR2741328B1 (fr) * 1995-11-20 1997-12-19 Commissariat Energie Atomique Boite de stockage d'un objet destine a etre protege d'une contamination physico-chimique
DE59707066D1 (de) 1997-11-17 2002-05-29 Alanod Al Veredlung Gmbh Verbundmaterial, insbesondere für Reflektoren
JP2013227626A (ja) * 2012-04-26 2013-11-07 Kojima Press Industry Co Ltd Ｃｖｄ膜の形成方法並びに積層構造体

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3624467A1 (de) * 1986-07-19 1988-01-28 Leybold Heraeus Gmbh & Co Kg Verfahren zum herstellen transparenter schutzschichten aus siliziumverbindungen
FR2614317B1 (fr) * 1987-04-22 1989-07-13 Air Liquide Procede de protection de substrat polymerique par depot par plasma de composes du type oxynitrure de silicium et dispositif pour sa mise en oeuvre.
IT1204006B (it) * 1987-05-05 1989-02-23 Eniricerche Spa Procedimento per la preparazione di film poliolefinici metallizzabili
US4927704A (en) * 1987-08-24 1990-05-22 General Electric Company Abrasion-resistant plastic articles and method for making them

Also Published As

Publication number Publication date
EP0519784B1 (de) 1995-06-28
ES2074345T3 (es) 1995-09-01
DE69203165D1 (de) 1995-08-03
JPH05287537A (ja) 1993-11-02
CA2070959A1 (fr) 1992-12-13
FR2677773B1 (fr) 1994-04-29
ATE124542T1 (de) 1995-07-15
KR930000966A (ko) 1993-01-16
EP0519784A1 (de) 1992-12-23
FR2677773A1 (fr) 1992-12-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee