DE69202991D1 - Kapazitiver Winkelbeschleunigungsaufnehmer. - Google Patents

Kapazitiver Winkelbeschleunigungsaufnehmer.

Info

Publication number
DE69202991D1
DE69202991D1 DE69202991T DE69202991T DE69202991D1 DE 69202991 D1 DE69202991 D1 DE 69202991D1 DE 69202991 T DE69202991 T DE 69202991T DE 69202991 T DE69202991 T DE 69202991T DE 69202991 D1 DE69202991 D1 DE 69202991D1
Authority
DE
Germany
Prior art keywords
weight member
opposed
angular accelerometer
weight
capacitive angular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69202991T
Other languages
English (en)
Other versions
DE69202991T2 (de
Inventor
Takayuki Yagi
Yutaka Hirai
Osamu Takamatsu
Masaru Nakayama
Hiroyasu Nose
Katsuhiko Shinjo
Yasuhiro Shimada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69202991D1 publication Critical patent/DE69202991D1/de
Publication of DE69202991T2 publication Critical patent/DE69202991T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0857—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a particular shape of the suspension spring
    • G01P2015/086—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a particular shape of the suspension spring using a torsional suspension spring

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Electric Double-Layer Capacitors Or The Like (AREA)
  • Arrangement Or Mounting Of Propulsion Units For Vehicles (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
DE69202991T 1991-01-29 1992-01-28 Kapazitiver Winkelbeschleunigungsaufnehmer. Expired - Lifetime DE69202991T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3029348A JP2938989B2 (ja) 1991-01-29 1991-01-29 角加速度センサ

Publications (2)

Publication Number Publication Date
DE69202991D1 true DE69202991D1 (de) 1995-07-27
DE69202991T2 DE69202991T2 (de) 1996-02-22

Family

ID=12273722

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69202991T Expired - Lifetime DE69202991T2 (de) 1991-01-29 1992-01-28 Kapazitiver Winkelbeschleunigungsaufnehmer.

Country Status (6)

Country Link
US (1) US5349858A (de)
EP (1) EP0497289B1 (de)
JP (1) JP2938989B2 (de)
AT (1) ATE124144T1 (de)
CA (1) CA2059991C (de)
DE (1) DE69202991T2 (de)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06258341A (ja) * 1993-03-03 1994-09-16 Zexel Corp 加速度センサ
JP3385688B2 (ja) * 1993-12-13 2003-03-10 株式会社デンソー 半導体ヨーレートセンサおよびその製造方法
JP3435850B2 (ja) * 1994-10-28 2003-08-11 株式会社デンソー 半導体力学量センサ及びその製造方法
US5589644A (en) * 1994-12-01 1996-12-31 Snap-On Technologies, Inc. Torque-angle wrench
DE19547642A1 (de) * 1994-12-20 1996-06-27 Zexel Corp Beschleunigungssensor und Verfahren zu dessen Herstellung
WO2000000832A1 (fr) * 1998-06-29 2000-01-06 Zexel Corporation Procede de detection d'informations de base et multi-detecteur d'informations de base et detecteur d'acceleration montes dans une automobile
US6308569B1 (en) * 1999-07-30 2001-10-30 Litton Systems, Inc. Micro-mechanical inertial sensors
US6257062B1 (en) 1999-10-01 2001-07-10 Delphi Technologies, Inc. Angular Accelerometer
US6393914B1 (en) 2001-02-13 2002-05-28 Delphi Technologies, Inc. Angular accelerometer
DE10111149B4 (de) * 2001-03-08 2011-01-05 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
EP1243930A1 (de) * 2001-03-08 2002-09-25 EADS Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
US6761070B2 (en) 2002-01-31 2004-07-13 Delphi Technologies, Inc. Microfabricated linear accelerometer
US6666092B2 (en) 2002-02-28 2003-12-23 Delphi Technologies, Inc. Angular accelerometer having balanced inertia mass
US6718826B2 (en) 2002-02-28 2004-04-13 Delphi Technologies, Inc. Balanced angular accelerometer
DE10225714A1 (de) * 2002-06-11 2004-01-08 Eads Deutschland Gmbh Mehrachsiger monolithischer Beschleunigungssensor
FI119528B (fi) * 2003-02-11 2008-12-15 Vti Technologies Oy Kapasitiivinen kiihtyvyysanturirakenne
JP2005038911A (ja) * 2003-07-16 2005-02-10 Mitsubishi Electric Corp 半導体装置
US20050235751A1 (en) * 2004-04-27 2005-10-27 Zarabadi Seyed R Dual-axis accelerometer
US7194376B2 (en) * 2004-04-27 2007-03-20 Delphi Technologies, Inc. Circuit and method of processing multiple-axis sensor output signals
JP2006125887A (ja) * 2004-10-26 2006-05-18 Fujitsu Media Device Kk 加速度センサ
US7250322B2 (en) * 2005-03-16 2007-07-31 Delphi Technologies, Inc. Method of making microsensor
US20060207327A1 (en) * 2005-03-16 2006-09-21 Zarabadi Seyed R Linear accelerometer
US7237316B2 (en) * 2005-07-18 2007-07-03 Oki Electronics Industry Co., Ltd. Method for fabricating a three-dimensional acceleration sensor
CN101400969A (zh) * 2006-03-10 2009-04-01 康蒂特米克微电子有限公司 微机械的转速传感器
US8508039B1 (en) 2008-05-08 2013-08-13 Invensense, Inc. Wafer scale chip scale packaging of vertically integrated MEMS sensors with electronics
US20090265671A1 (en) * 2008-04-21 2009-10-22 Invensense Mobile devices with motion gesture recognition
US8952832B2 (en) * 2008-01-18 2015-02-10 Invensense, Inc. Interfacing application programs and motion sensors of a device
US8141424B2 (en) * 2008-09-12 2012-03-27 Invensense, Inc. Low inertia frame for detecting coriolis acceleration
US7934423B2 (en) 2007-12-10 2011-05-03 Invensense, Inc. Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
US8020441B2 (en) * 2008-02-05 2011-09-20 Invensense, Inc. Dual mode sensing for vibratory gyroscope
US8462109B2 (en) * 2007-01-05 2013-06-11 Invensense, Inc. Controlling and accessing content using motion processing on mobile devices
US8250921B2 (en) 2007-07-06 2012-08-28 Invensense, Inc. Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
US8047075B2 (en) * 2007-06-21 2011-11-01 Invensense, Inc. Vertically integrated 3-axis MEMS accelerometer with electronics
US20110113880A1 (en) * 2008-05-15 2011-05-19 Continental Teves Ag & Co. Ohg Micromechanical acceleration sensor
JP2010169665A (ja) * 2008-12-24 2010-08-05 Canon Anelva Corp 静電容量型隔膜真空計、真空装置
DE102011017603A1 (de) * 2011-04-27 2012-10-31 Robert Bosch Gmbh Mikromechanischer Drehbeschleunigungssensor sowie Verfahren zur Detektion einer Drehbeschleunigung
DE102011076393A1 (de) * 2011-05-24 2012-11-29 Robert Bosch Gmbh Mikromechanischer Drehbeschleunigungssensor und Verfahren zur Messung einer Drehbeschleunigung
RU2489722C1 (ru) * 2011-12-27 2013-08-10 Открытое акционерное общество Арзамасское научно-производственное предприятие "ТЕМП-АВИА" (ОАО АНПП "ТЕМП-АВИА") Чувствительный элемент углового акселерометра
RU2509307C1 (ru) * 2012-06-19 2014-03-10 Федеральное государственное автономное образовательное учреждение высшего профессионального образования "Санкт-Петербургский государственный университет аэрокосмического приборостроения" Линейный акселерометр
EP3546954B1 (de) 2016-01-07 2022-12-14 Analog Devices, Inc. 3-achsen-winkelbeschleunigungsmesser
US10732198B2 (en) 2017-08-09 2020-08-04 Analog Devices, Inc. Integrated linear and angular MEMS accelerometers
US10712360B2 (en) 2017-09-27 2020-07-14 Azoteq (Pty) Ltd Differential charge transfer based accelerometer

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3295377A (en) * 1966-06-13 1967-01-03 Richard R Richard Angular accelerometer
US4699006A (en) * 1984-03-19 1987-10-13 The Charles Stark Draper Laboratory, Inc. Vibratory digital integrating accelerometer
US4736629A (en) * 1985-12-20 1988-04-12 Silicon Designs, Inc. Micro-miniature accelerometer
DE3824695A1 (de) * 1988-07-20 1990-02-01 Fraunhofer Ges Forschung Mikromechanischer beschleunigungssensor mit kapazitiver signalwandlung und verfahren zu seiner herstellung

Also Published As

Publication number Publication date
JPH04252961A (ja) 1992-09-08
DE69202991T2 (de) 1996-02-22
EP0497289B1 (de) 1995-06-21
EP0497289A1 (de) 1992-08-05
US5349858A (en) 1994-09-27
CA2059991A1 (en) 1992-07-30
ATE124144T1 (de) 1995-07-15
JP2938989B2 (ja) 1999-08-25
CA2059991C (en) 1996-12-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: WESER & KOLLEGEN, 81245 MUENCHEN