DE69128869T2 - Verfahren und Vorrichtung zum Messen von Verschiebungen - Google Patents
Verfahren und Vorrichtung zum Messen von VerschiebungenInfo
- Publication number
- DE69128869T2 DE69128869T2 DE1991628869 DE69128869T DE69128869T2 DE 69128869 T2 DE69128869 T2 DE 69128869T2 DE 1991628869 DE1991628869 DE 1991628869 DE 69128869 T DE69128869 T DE 69128869T DE 69128869 T2 DE69128869 T2 DE 69128869T2
- Authority
- DE
- Germany
- Prior art keywords
- measuring displacements
- displacements
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31069390 | 1990-11-16 | ||
JP3266230A JP2862417B2 (ja) | 1990-11-16 | 1991-10-15 | 変位測定装置及び方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69128869D1 DE69128869D1 (de) | 1998-03-12 |
DE69128869T2 true DE69128869T2 (de) | 1998-06-25 |
Family
ID=26547350
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1991628869 Expired - Lifetime DE69128869T2 (de) | 1990-11-16 | 1991-11-15 | Verfahren und Vorrichtung zum Messen von Verschiebungen |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0486050B1 (de) |
DE (1) | DE69128869T2 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5424829A (en) * | 1992-09-02 | 1995-06-13 | Mitutoyo Corporation | Apparatus wherein diffracted light does not return to the source |
JP3210111B2 (ja) * | 1992-12-24 | 2001-09-17 | キヤノン株式会社 | 変位検出装置 |
FR2707000A1 (en) * | 1993-06-21 | 1994-12-30 | Bertin & Cie | Method and device for measuring angles by reflectometry |
JP3312086B2 (ja) * | 1994-05-19 | 2002-08-05 | 株式会社リコー | エンコーダ装置 |
EP2118698B1 (de) | 2007-02-02 | 2018-04-04 | King's College London | Verfahren und vorrichtung zur verbesserung der bildauflösung |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL224249A (de) * | 1958-01-21 | |||
NL6811252A (de) * | 1968-08-08 | 1970-02-10 | ||
US3628026A (en) * | 1969-09-05 | 1971-12-14 | Dynamics Res Corp | Linear encoder immune to scale bending error |
US3628870A (en) * | 1970-07-02 | 1971-12-21 | Olympus Optical Co | Device for measuring amount of displacements with aid of gratings |
US3768911A (en) * | 1971-08-17 | 1973-10-30 | Keuffel & Esser Co | Electro-optical incremental motion and position indicator |
GB1367886A (en) * | 1971-10-29 | 1974-09-25 | Ti Group Serivces Ltd | Measuring apparatus |
DE3316144A1 (de) * | 1982-05-04 | 1983-11-10 | Canon K.K., Tokyo | Verfahren und vorrichtung zum messen des ausmasses einer bewegung |
US4967072A (en) * | 1984-09-05 | 1990-10-30 | Canon Kabushiki Kaisha | Interferometric rotating condition detection apparatus |
JPS61178613A (ja) * | 1985-02-04 | 1986-08-11 | Canon Inc | エンコーダー |
GB8729066D0 (en) * | 1987-12-12 | 1988-01-27 | Renishaw Plc | Opto-electronic scale-reading apparatus |
WO1989005964A1 (en) * | 1987-12-15 | 1989-06-29 | Renishaw Plc | Opto-electronic scale-reading apparatus |
JP2603305B2 (ja) * | 1988-07-19 | 1997-04-23 | キヤノン株式会社 | 変位測定装置 |
DE3836703A1 (de) * | 1988-10-28 | 1990-05-03 | Heidenhain Gmbh Dr Johannes | Winkelmesseinrichtung |
EP0428641A1 (de) * | 1989-04-15 | 1991-05-29 | Renishaw plc | Opto-elektronischer skalenleseapparat |
-
1991
- 1991-11-15 DE DE1991628869 patent/DE69128869T2/de not_active Expired - Lifetime
- 1991-11-15 EP EP19910119533 patent/EP0486050B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69128869D1 (de) | 1998-03-12 |
EP0486050A2 (de) | 1992-05-20 |
EP0486050A3 (en) | 1993-03-03 |
EP0486050B1 (de) | 1998-02-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |