DE69128342T2 - Vorrichtung zur radiofrequenzbetriebenen glimmentladungsspektrometrie mit ausserhalb liegender geometrie der probenhalterung - Google Patents

Vorrichtung zur radiofrequenzbetriebenen glimmentladungsspektrometrie mit ausserhalb liegender geometrie der probenhalterung

Info

Publication number
DE69128342T2
DE69128342T2 DE69128342T DE69128342T DE69128342T2 DE 69128342 T2 DE69128342 T2 DE 69128342T2 DE 69128342 T DE69128342 T DE 69128342T DE 69128342 T DE69128342 T DE 69128342T DE 69128342 T2 DE69128342 T2 DE 69128342T2
Authority
DE
Germany
Prior art keywords
sample
chamber
glow discharge
holder
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69128342T
Other languages
German (de)
English (en)
Other versions
DE69128342D1 (de
Inventor
Marcus R Kennetz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Clemson University
Original Assignee
Clemson University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Clemson University filed Critical Clemson University
Publication of DE69128342D1 publication Critical patent/DE69128342D1/de
Application granted granted Critical
Publication of DE69128342T2 publication Critical patent/DE69128342T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • G01N21/68—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using high frequency electric fields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • G01N21/67—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using electric arcs or discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
DE69128342T 1990-10-01 1991-09-30 Vorrichtung zur radiofrequenzbetriebenen glimmentladungsspektrometrie mit ausserhalb liegender geometrie der probenhalterung Expired - Fee Related DE69128342T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/591,544 US5086226A (en) 1989-05-31 1990-10-01 Device for radio frequency powered glow discharge spectrometry with external sample mount geometry
PCT/US1991/007178 WO1992006487A1 (en) 1990-10-01 1991-09-30 Device for radio frequency powered glow discharge spectrometry with external sample mount geometry

Publications (2)

Publication Number Publication Date
DE69128342D1 DE69128342D1 (de) 1998-01-15
DE69128342T2 true DE69128342T2 (de) 1998-03-26

Family

ID=24366901

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69128342T Expired - Fee Related DE69128342T2 (de) 1990-10-01 1991-09-30 Vorrichtung zur radiofrequenzbetriebenen glimmentladungsspektrometrie mit ausserhalb liegender geometrie der probenhalterung

Country Status (5)

Country Link
US (1) US5086226A (https=)
EP (1) EP0503058B1 (https=)
JP (1) JPH05501636A (https=)
DE (1) DE69128342T2 (https=)
WO (1) WO1992006487A1 (https=)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5325021A (en) * 1992-04-09 1994-06-28 Clemson University Radio-frequency powered glow discharge device and method with high voltage interface
US5699155A (en) * 1993-07-26 1997-12-16 Kawasaki Steel Corporation Emission spectral analysis method and instrument therefor
US5408315A (en) * 1993-07-28 1995-04-18 Leco Corporation Glow discharge analytical instrument for performing excitation and analyzation on the same side of a sample
GB2296369A (en) * 1994-12-22 1996-06-26 Secr Defence Radio frequency ion source
US6124675A (en) 1998-06-01 2000-09-26 University Of Montreal Metastable atom bombardment source
EP1166085A2 (en) * 1999-02-25 2002-01-02 Clemson University Research Foundation Sampling and analysis of airborne particulate matter by glow discharge atomic emission and mass spectrometries
US6157546A (en) * 1999-03-26 2000-12-05 Ericsson Inc. Shielding apparatus for electronic devices
US6465776B1 (en) 2000-06-02 2002-10-15 Board Of Regents, The University Of Texas System Mass spectrometer apparatus for analyzing multiple fluid samples concurrently
WO2002060566A1 (en) * 2001-01-29 2002-08-08 Clemson University Atmospheric pressure, glow discharge, optical emission source for the direct sampling of liquid media
FR2826121B1 (fr) * 2001-06-18 2004-02-20 Jobin Yvon Sas Dispositif et procede de positionnement d'un echantillon monte sur un spectrometre a decharge luminescente
US7298091B2 (en) * 2002-02-01 2007-11-20 The Regents Of The University Of California Matching network for RF plasma source
DE102006016229B4 (de) * 2006-03-29 2010-05-27 Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. Verfahren und Vorrichtung zur Ermittlung von Zusammensetzungen einer Festkörperprobe mittels Glimmentladungsspektroskopie und zur Ermittlung von Höhenunterschieden simultan dazu
JP5771458B2 (ja) * 2011-06-27 2015-09-02 株式会社日立ハイテクノロジーズ 質量分析装置及び質量分析方法
US20130255877A1 (en) * 2012-03-20 2013-10-03 Flextronics Ap, Llc Multifunctional thermo-vacuum-air pressurized forming machine
US9536725B2 (en) 2013-02-05 2017-01-03 Clemson University Means of introducing an analyte into liquid sampling atmospheric pressure glow discharge
US10192723B2 (en) 2014-09-04 2019-01-29 Leco Corporation Soft ionization based on conditioned glow discharge for quantitative analysis
US10281405B2 (en) 2016-01-08 2019-05-07 Clemson University Research Foundation Ambient desorption-optical emission spectroscopy using a microplasma desorption/excitation source
EP3485294A4 (en) * 2016-07-17 2020-02-26 B.G. Negev Technologies and Applications Ltd., at Ben-Gurion University ASCENDING CONVERSION SYSTEM FOR IMAGING AND COMMUNICATION
JP6765328B2 (ja) * 2017-03-15 2020-10-07 株式会社堀場製作所 作成方法、グロー放電発光分析方法、器具、及びグロー放電発光分析装置
GB2583897A (en) 2019-04-05 2020-11-18 Servomex Group Ltd Glow plasma stabilisation
CA3063389C (en) 2019-12-02 2021-03-30 2S Water Incorporated Solution electrode glow discharge apparatus
CA3068769A1 (en) 2020-01-20 2021-07-20 2S Water Incorporated Liquid electrode tip
RU206533U1 (ru) * 2021-03-09 2021-09-15 Александр Михайлович Панин Фотометр для спектрального анализа

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3588601A (en) * 1968-12-27 1971-06-28 Westinghouse Electric Corp Radio frequency spectral emission and detector device
DE1910461B2 (de) * 1969-03-01 1971-09-23 Glimmentladungsroehre zur analyse von draehten und drahtfoer migen metallischen koerpern
US4128336A (en) * 1975-08-21 1978-12-05 The South African Inventions Development Corporation Spectroscopic apparatus and method
GB8614177D0 (en) * 1986-06-11 1986-07-16 Vg Instr Group Glow discharge mass spectrometer
FR2616545B1 (fr) * 1987-06-09 1990-05-11 Renault Procede et dispositif d'analyse de surfaces non conductrices
GB8804290D0 (en) * 1988-02-24 1988-03-23 Vg Instr Group Glow discharge spectrometer
US5006706A (en) * 1989-05-31 1991-04-09 Clemson University Analytical method and apparatus

Also Published As

Publication number Publication date
EP0503058B1 (en) 1997-12-03
DE69128342D1 (de) 1998-01-15
WO1992006487A1 (en) 1992-04-16
EP0503058A4 (en) 1993-05-05
JPH05501636A (ja) 1993-03-25
US5086226A (en) 1992-02-04
EP0503058A1 (en) 1992-09-16
JPH0563899B2 (https=) 1993-09-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: PUSCHMANN & BORCHERT, 82041 OBERHACHING

8339 Ceased/non-payment of the annual fee