DE69123290D1 - Inspektionsgerät für gedruckte Leiterplatten - Google Patents

Inspektionsgerät für gedruckte Leiterplatten

Info

Publication number
DE69123290D1
DE69123290D1 DE69123290T DE69123290T DE69123290D1 DE 69123290 D1 DE69123290 D1 DE 69123290D1 DE 69123290 T DE69123290 T DE 69123290T DE 69123290 T DE69123290 T DE 69123290T DE 69123290 D1 DE69123290 D1 DE 69123290D1
Authority
DE
Germany
Prior art keywords
printed circuit
inspection
circuit board
probes
circuit boards
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69123290T
Other languages
English (en)
Other versions
DE69123290T2 (de
Inventor
Keiichi Ikeda
Kunio Yanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tescon Co Ltd
Original Assignee
Tescon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2134204A external-priority patent/JP2772115B2/ja
Priority claimed from JP2276371A external-priority patent/JPH04152281A/ja
Priority claimed from JP2314307A external-priority patent/JP2769386B2/ja
Application filed by Tescon Co Ltd filed Critical Tescon Co Ltd
Publication of DE69123290D1 publication Critical patent/DE69123290D1/de
Application granted granted Critical
Publication of DE69123290T2 publication Critical patent/DE69123290T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07392Multiple probes manipulating each probe element or tip individually
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806Apparatus therefor, e.g. test stations, drivers, analysers, conveyors

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Maintenance And Management Of Digital Transmission (AREA)
  • Monitoring And Testing Of Exchanges (AREA)
DE69123290T 1990-05-25 1991-05-21 Inspektionsgerät für gedruckte Leiterplatten Expired - Fee Related DE69123290T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2134204A JP2772115B2 (ja) 1990-05-25 1990-05-25 プリント基板もしくは実装基板用データ処理方法及び装置
JP2276371A JPH04152281A (ja) 1990-10-17 1990-10-17 デュアルプローブヘッド
JP2314307A JP2769386B2 (ja) 1990-11-21 1990-11-21 プリント基板検査装置

Publications (2)

Publication Number Publication Date
DE69123290D1 true DE69123290D1 (de) 1997-01-09
DE69123290T2 DE69123290T2 (de) 1997-06-26

Family

ID=27316846

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69123290T Expired - Fee Related DE69123290T2 (de) 1990-05-25 1991-05-21 Inspektionsgerät für gedruckte Leiterplatten

Country Status (5)

Country Link
US (1) US5107206A (de)
EP (1) EP0458280B1 (de)
KR (1) KR0169739B1 (de)
AT (1) ATE145729T1 (de)
DE (1) DE69123290T2 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6828812B2 (en) * 1991-06-04 2004-12-07 Micron Technology, Inc. Test apparatus for testing semiconductor dice including substrate with penetration limiting contacts for making electrical connections
US5469064A (en) * 1992-01-14 1995-11-21 Hewlett-Packard Company Electrical assembly testing using robotic positioning of probes
TW227644B (de) * 1992-12-18 1994-08-01 Tesukon Kk
US5543726A (en) * 1994-01-03 1996-08-06 International Business Machines Corporation Open frame gantry probing system
DE4414770A1 (de) * 1994-04-27 1995-11-02 Hubert Driller Testsystem für bestückte und unbestückte Leiterplatten
DE4441347C2 (de) * 1994-11-21 1998-10-29 Peter Fritzsche Verfahren zum Prüfen von elektronischen Schaltungen auf Leiterplatten und Vorrichtung zum Durchführen des Verfahrens
DE19503329C2 (de) * 1995-02-02 2000-05-18 Ita Ingb Testaufgaben Gmbh Testvorrichtung für elektronische Flachbaugruppen
US5735173A (en) * 1995-10-04 1998-04-07 Probot Incorporated Pivotally linked position control drive system
KR0176627B1 (ko) * 1995-12-30 1999-05-15 김광호 인쇄회로기판의 통전검사용 프로브 장치
USD383683S (en) * 1996-04-25 1997-09-16 Tokyo Electron Limited Wafer prober
US6259960B1 (en) * 1996-11-01 2001-07-10 Joel Ltd. Part-inspecting system
AU9063298A (en) * 1997-09-15 1999-04-05 Tellabs Denmark A/S A method of controlling test probes in a testing apparatus for electronic printed circuit boards, and an apparatus for performing the method
ES2267227T3 (es) * 1998-04-15 2007-03-01 Baldwin-Japan Ltd. Sensor optico.
WO2001036985A1 (de) * 1999-11-16 2001-05-25 Connexion Rosenberger Gmbh Messstation für integrierte schaltkreise auf wafern oder andere elektronische bauelemente sowie bausatz zum zusammenbau derartiger messstationen
US6657449B2 (en) * 2000-12-21 2003-12-02 Hansaem Digitec Co., Ltd. Test pin unit for PCB test device and feeding device of the same
WO2002082528A1 (fr) * 2001-04-04 2002-10-17 Fujitsu Limited Appareil contacteur pour dispositif semi-conducteur et procede de test dudit dispositif semi-conducteur
DE10314462B4 (de) * 2003-03-28 2007-02-08 Ina - Drives & Mechatronics Gmbh & Co. Ohg Anordnung zum Prüfen von elektrischen Leiterplatten
US7319335B2 (en) * 2004-02-12 2008-01-15 Applied Materials, Inc. Configurable prober for TFT LCD array testing
US7355418B2 (en) * 2004-02-12 2008-04-08 Applied Materials, Inc. Configurable prober for TFT LCD array test
US7355417B1 (en) * 2005-09-20 2008-04-08 Emc Corporation Techniques for obtaining electromagnetic data from a circuit board
US8860449B2 (en) * 2011-06-10 2014-10-14 Tektronix, Inc. Dual probing tip system
CA2848164C (en) * 2011-09-05 2018-01-23 Kabushiki Kaisha Nihon Micronics Evaluation apparatus and evaluation method of sheet type cell
DE102013102564A1 (de) * 2013-03-13 2014-09-18 Dtg International Gmbh Traverseneinheit für eine Prüfvorrichtung für Leiterplatten, sowie Prüfvorrichtung damit
US9989583B2 (en) * 2013-03-13 2018-06-05 Xcerra Corporation Cross-bar unit for a test apparatus for circuit boards, and test apparatus containing the former
TWI586967B (zh) * 2015-10-27 2017-06-11 Mpi Corp Probe module
DE202016102705U1 (de) * 2016-05-20 2016-06-30 Bobst Mex Sa Qualitätskontrollstation mit Kamerakalibrierungssystem für Bogenelement-Verarbeitungsmaschine
DE102017102700A1 (de) 2017-02-10 2018-09-13 Atg Luther & Maelzer Gmbh Prüfvorrichtung und Verfahren zum Prüfen von Leiterplatten
CN110286307B (zh) * 2018-03-19 2022-04-08 科磊股份有限公司 探针检测系统及用于检测半导体元件的方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2628428C3 (de) * 1976-06-24 1979-02-15 Siemens Ag, 1000 Berlin Und 8000 Muenchen Adapter zum Verbinden von Anschluß- und/oder Prüfpunkten einer Baugruppe mit einer Mefischaltung
DE2637878C3 (de) * 1976-08-23 1979-09-27 Siemens Ag, 1000 Berlin Und 8000 Muenchen Anordnung zum Prüfen der Funktionsfähigkeit einer elektrischen Baugruppe
DE2800775A1 (de) * 1978-01-09 1979-07-12 Luther & Maelzer Gmbh Verfahrensanordnung und vorrichtung zur aufnahme und funktionsmessueberpruefung von unbestueckten leiterplatten
FR2418466A1 (fr) * 1978-02-24 1979-09-21 Telecommunications Sa Appareil pour etablir des prises de contact temporaires sur des circuits electriques
US4251772A (en) * 1978-12-26 1981-02-17 Pacific Western Systems Inc. Probe head for an automatic semiconductive wafer prober
JPS5798869A (en) * 1980-12-12 1982-06-19 Fujitsu Ltd Checking method for continuity of printed board circuit
US4362991A (en) * 1980-12-12 1982-12-07 Burroughs Corporation Integrated circuit test probe assembly
US4574235A (en) * 1981-06-05 1986-03-04 Micro Component Technology, Inc. Transmission line connector and contact set assembly for test site
US4471298A (en) * 1981-12-11 1984-09-11 Cirdyne, Inc. Apparatus for automatically electrically testing printed circuit boards
US4527119A (en) * 1982-05-17 1985-07-02 Testamatic, Incorporated High speed, low mass, movable probe and/or instrument positioner, tool and like items suitable for use in a controlled environment chamber
US4705447A (en) * 1983-08-11 1987-11-10 Intest Corporation Electronic test head positioner for test systems
US4523749A (en) * 1983-03-02 1985-06-18 W. A. Whitney Corp. Hole forming machine with adjustable work clamps
DE3784710D1 (de) * 1987-05-26 1993-04-15 Ibm Deutschland Kontaktsonden-anordnung mit feinpositionier-vorrichtung.

Also Published As

Publication number Publication date
EP0458280B1 (de) 1996-11-27
EP0458280A3 (en) 1993-05-26
US5107206A (en) 1992-04-21
KR910020451A (ko) 1991-12-20
DE69123290T2 (de) 1997-06-26
ATE145729T1 (de) 1996-12-15
KR0169739B1 (ko) 1999-03-20
EP0458280A2 (de) 1991-11-27

Similar Documents

Publication Publication Date Title
DE69123290T2 (de) Inspektionsgerät für gedruckte Leiterplatten
DE69017582D1 (de) Zwischenverbindungsvorrichtung für Leiterplatten.
DE69233508D1 (de) Bilderzeugungsgerät und -Verfahren zur Herstellung von Mikrovorrichtungen
FR2619926B1 (fr) Procede et appareil de diagnostic de defauts sur une carte de circuit
MY104394A (en) Function inspecting system
DE69011929T2 (de) Führungsanordnung für Gegenstände, wie Leiterplatten.
ATE155594T1 (de) Verfahren und vorrichtung zur bestimmung von herstellungsfehlern in festkörperbauteilen
SE9200122L (sv) Faellarsystem
DE3479341D1 (en) Adapter for a printed-circuit board testing device
DE69018668D1 (de) Elektro-optisches Inspektionsgerät für gedruckte Leiterplatten mit darauf montierten Bauelementen.
DE69023972D1 (de) Randverbinder für gedruckte Leiterplatten.
DE68906129T2 (de) Führung für gedruckte Schaltungsplatten.
ES2060334T3 (es) Aparato de prueba de circuito impreso.
RU98113859A (ru) Установка для электрической проверки печатных схем с регулируемым положением зондирующих игл
GB2044141B (en) Electronic component insertion machine
DE59208473D1 (de) Prüfvorrichtung für integrierte Schaltkreise
CZ74598A3 (cs) Zařízení pro protilehlé testování plošných spojů
SE8303330L (sv) Sett och anordning for att pa ett kretskort montera elektroniska komponenter
ATE313935T1 (de) Vorrichtung zum festlegen von schaltungsplatinen
KR950008775A (ko) 부직포웨브 니이들장치
GB2014775B (en) Apparatus and methods for use in assembling electrical circuits
ATE75876T1 (de) Vorrichtung zum spanlosen bearbeiten von bauteilen.
JPS578463A (en) Method and apparatus for inspecting printed circuit board
JPS56114641A (en) Positioning device for printed board
KR960024304U (ko) 인쇄회로기판 검사시스템의 구동테이블 장치

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee