DE69122573D1 - Verfahren zur Herstellung von Mehrschichtplatinen - Google Patents
Verfahren zur Herstellung von MehrschichtplatinenInfo
- Publication number
- DE69122573D1 DE69122573D1 DE69122573T DE69122573T DE69122573D1 DE 69122573 D1 DE69122573 D1 DE 69122573D1 DE 69122573 T DE69122573 T DE 69122573T DE 69122573 T DE69122573 T DE 69122573T DE 69122573 D1 DE69122573 D1 DE 69122573D1
- Authority
- DE
- Germany
- Prior art keywords
- production
- multilayer boards
- boards
- multilayer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/382—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
- H05K3/385—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by conversion of the surface of the metal, e.g. by oxidation, whether or not followed by reaction or removal of the converted layer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0315—Oxidising metal
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
- H05K2203/1157—Using means for chemical reduction
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2199210A JPH0485989A (ja) | 1990-07-30 | 1990-07-30 | 多層プリント板の製造法 |
JP2277884A JPH04154193A (ja) | 1990-10-18 | 1990-10-18 | 多層プリント板の製造法 |
JP2277885A JPH04154194A (ja) | 1990-10-18 | 1990-10-18 | 多層プリント板の製造法 |
JP2284203A JPH04159797A (ja) | 1990-10-24 | 1990-10-24 | 多層プリント板の製造法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69122573D1 true DE69122573D1 (de) | 1996-11-14 |
DE69122573T2 DE69122573T2 (de) | 1997-03-13 |
Family
ID=27475957
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69122573T Expired - Fee Related DE69122573T2 (de) | 1990-07-30 | 1991-07-25 | Verfahren zur Herstellung von Mehrschichtplatinen |
Country Status (4)
Country | Link |
---|---|
US (1) | US5252355A (de) |
EP (1) | EP0469470B1 (de) |
KR (1) | KR940009177B1 (de) |
DE (1) | DE69122573T2 (de) |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0637197A1 (de) * | 1993-07-26 | 1995-02-01 | Siemens Nixdorf Informationssysteme AG | Verfahren zum Durchkontaktieren von Mehrlagenleiterplatten |
JP2694802B2 (ja) * | 1993-12-28 | 1997-12-24 | 日本電気株式会社 | プリント配線板の製造方法 |
US5789757A (en) * | 1996-09-10 | 1998-08-04 | The Dexter Corporation | Malemide containing formulations and uses therefor |
US7645899B1 (en) | 1994-09-02 | 2010-01-12 | Henkel Corporation | Vinyl compounds |
US6960636B2 (en) | 1994-09-02 | 2005-11-01 | Henkel Corporation | Thermosetting resin compositions containing maleimide and/or vinyl compounds |
US6852814B2 (en) * | 1994-09-02 | 2005-02-08 | Henkel Corporation | Thermosetting resin compositions containing maleimide and/or vinyl compounds |
US20030055121A1 (en) * | 1996-09-10 | 2003-03-20 | Dershem Stephen M. | Thermosetting resin compositions containing maleimide and/or vinyl compounds |
US6121358A (en) * | 1997-09-22 | 2000-09-19 | The Dexter Corporation | Hydrophobic vinyl monomers, formulations containing same, and uses therefor |
ES2367838T3 (es) | 1998-09-10 | 2011-11-10 | JX Nippon Mining & Metals Corp. | Laminado que comprende una hoja de cobre tratada y procedimiento para su fabricación. |
US6117536A (en) * | 1998-09-10 | 2000-09-12 | Ga-Tek Inc. | Adhesion promoting layer for use with epoxy prepregs |
US6132589A (en) * | 1998-09-10 | 2000-10-17 | Ga-Tek Inc. | Treated copper foil and process for making treated copper foil |
US6679951B2 (en) | 2000-05-15 | 2004-01-20 | Asm Intenational N.V. | Metal anneal with oxidation prevention |
US7494927B2 (en) | 2000-05-15 | 2009-02-24 | Asm International N.V. | Method of growing electrical conductors |
US6482740B2 (en) | 2000-05-15 | 2002-11-19 | Asm Microchemistry Oy | Method of growing electrical conductors by reducing metal oxide film with organic compound containing -OH, -CHO, or -COOH |
US6878628B2 (en) | 2000-05-15 | 2005-04-12 | Asm International Nv | In situ reduction of copper oxide prior to silicon carbide deposition |
US9139906B2 (en) | 2001-03-06 | 2015-09-22 | Asm America, Inc. | Doping with ALD technology |
US7491634B2 (en) | 2006-04-28 | 2009-02-17 | Asm International N.V. | Methods for forming roughened surfaces and applications thereof |
US20040091688A1 (en) * | 2002-11-11 | 2004-05-13 | Morio Gaku | Heat-resistant film base-material-inserted B-staged resin composition sheet excellent in adhesion to resin, multilayer board using the sheet and manufacturing process of the multilayer board |
US7067407B2 (en) | 2003-08-04 | 2006-06-27 | Asm International, N.V. | Method of growing electrical conductors |
JP2007516599A (ja) | 2003-08-04 | 2007-06-21 | エーエスエム アメリカ インコーポレイテッド | ゲルマニウム上の堆積前の表面調製 |
TW200634982A (en) | 2005-02-22 | 2006-10-01 | Asm Inc | Plasma pre-treating surfaces for atomic layer deposition |
KR20070111549A (ko) * | 2005-03-11 | 2007-11-21 | 히다치 가세고교 가부시끼가이샤 | 구리의 표면 처리 방법 및 구리 |
US8025922B2 (en) | 2005-03-15 | 2011-09-27 | Asm International N.V. | Enhanced deposition of noble metals |
US7666773B2 (en) | 2005-03-15 | 2010-02-23 | Asm International N.V. | Selective deposition of noble metal thin films |
KR101379015B1 (ko) | 2006-02-15 | 2014-03-28 | 한국에이에스엠지니텍 주식회사 | 플라즈마 원자층 증착법을 이용한 루테늄 막 증착 방법 및고밀도 루테늄 층 |
WO2008042981A2 (en) | 2006-10-05 | 2008-04-10 | Asm America, Inc. | Ald of metal silicate films |
KR101544198B1 (ko) | 2007-10-17 | 2015-08-12 | 한국에이에스엠지니텍 주식회사 | 루테늄 막 형성 방법 |
US7655564B2 (en) | 2007-12-12 | 2010-02-02 | Asm Japan, K.K. | Method for forming Ta-Ru liner layer for Cu wiring |
US7799674B2 (en) | 2008-02-19 | 2010-09-21 | Asm Japan K.K. | Ruthenium alloy film for copper interconnects |
US8545936B2 (en) | 2008-03-28 | 2013-10-01 | Asm International N.V. | Methods for forming carbon nanotubes |
US8383525B2 (en) | 2008-04-25 | 2013-02-26 | Asm America, Inc. | Plasma-enhanced deposition process for forming a metal oxide thin film and related structures |
US8084104B2 (en) | 2008-08-29 | 2011-12-27 | Asm Japan K.K. | Atomic composition controlled ruthenium alloy film formed by plasma-enhanced atomic layer deposition |
US8133555B2 (en) | 2008-10-14 | 2012-03-13 | Asm Japan K.K. | Method for forming metal film by ALD using beta-diketone metal complex |
JP5778382B2 (ja) * | 2008-10-22 | 2015-09-16 | 東ソー株式会社 | 金属膜製造用組成物、金属膜の製造方法及び金属粉末の製造方法 |
US7927942B2 (en) | 2008-12-19 | 2011-04-19 | Asm International N.V. | Selective silicide process |
US9379011B2 (en) | 2008-12-19 | 2016-06-28 | Asm International N.V. | Methods for depositing nickel films and for making nickel silicide and nickel germanide |
US8329569B2 (en) | 2009-07-31 | 2012-12-11 | Asm America, Inc. | Deposition of ruthenium or ruthenium dioxide |
US8871617B2 (en) | 2011-04-22 | 2014-10-28 | Asm Ip Holding B.V. | Deposition and reduction of mixed metal oxide thin films |
US9607842B1 (en) | 2015-10-02 | 2017-03-28 | Asm Ip Holding B.V. | Methods of forming metal silicides |
US10913056B2 (en) | 2017-07-31 | 2021-02-09 | Honda Motor Co., Ltd. | Method for synthesis of copper/copper oxide nanocrystals |
US11339487B2 (en) | 2019-02-28 | 2022-05-24 | Honda Motor Co., Ltd. | Synergistic effects of multi-faceted CU2O nanocrystals for electrochemical CO2 reduction |
US11873566B2 (en) | 2019-02-28 | 2024-01-16 | Honda Motor Co., Ltd. | Cu/Cu2O interface nanostructures for electrochemical CO2 reduction |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5810880B2 (ja) * | 1979-08-30 | 1983-02-28 | 株式会社村田製作所 | 銅被膜の密着性向上方法 |
JPS56153797A (en) * | 1980-04-28 | 1981-11-27 | Hitachi Chemical Co Ltd | Method of manufacturing multilayer printed circuit board substrate |
KR890004583B1 (ko) * | 1984-06-29 | 1989-11-16 | 히다찌가세이고오교 가부시끼가이샤 | 금속표면 처리공정 |
JPS61176192A (ja) * | 1985-01-31 | 1986-08-07 | 株式会社日立製作所 | 銅と樹脂との接着方法 |
US4795512A (en) * | 1986-02-26 | 1989-01-03 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing a multilayer ceramic body |
US4775444A (en) * | 1987-08-26 | 1988-10-04 | Macdermid, Incorporated | Process for fabricating multilayer circuit boards |
MY104191A (en) * | 1988-09-06 | 1994-02-28 | Mitsubishi Gas Chemical Co | Process for producing multilayer printed wiring board |
JPH0387092A (ja) * | 1989-06-15 | 1991-04-11 | Matsushita Electric Works Ltd | 内層用回路板の銅回路の処理方法 |
-
1991
- 1991-07-25 EP EP91112509A patent/EP0469470B1/de not_active Expired - Lifetime
- 1991-07-25 DE DE69122573T patent/DE69122573T2/de not_active Expired - Fee Related
- 1991-07-30 KR KR1019910013125A patent/KR940009177B1/ko not_active IP Right Cessation
- 1991-07-30 US US07/738,013 patent/US5252355A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5252355A (en) | 1993-10-12 |
EP0469470A1 (de) | 1992-02-05 |
EP0469470B1 (de) | 1996-10-09 |
KR920003827A (ko) | 1992-02-29 |
DE69122573T2 (de) | 1997-03-13 |
KR940009177B1 (ko) | 1994-10-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |