DE69119181D1 - Verfahren zur Herstellung eines Filters - Google Patents
Verfahren zur Herstellung eines FiltersInfo
- Publication number
- DE69119181D1 DE69119181D1 DE69119181T DE69119181T DE69119181D1 DE 69119181 D1 DE69119181 D1 DE 69119181D1 DE 69119181 T DE69119181 T DE 69119181T DE 69119181 T DE69119181 T DE 69119181T DE 69119181 D1 DE69119181 D1 DE 69119181D1
- Authority
- DE
- Germany
- Prior art keywords
- filter
- making
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Optical Filters (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/595,211 US5059500A (en) | 1990-10-10 | 1990-10-10 | Process for forming a color filter |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69119181D1 true DE69119181D1 (de) | 1996-06-05 |
DE69119181T2 DE69119181T2 (de) | 1996-08-14 |
Family
ID=24382240
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69119181T Expired - Fee Related DE69119181T2 (de) | 1990-10-10 | 1991-07-19 | Verfahren zur Herstellung eines Filters |
Country Status (5)
Country | Link |
---|---|
US (1) | US5059500A (de) |
EP (1) | EP0481539B1 (de) |
JP (1) | JPH04234706A (de) |
CA (1) | CA2045249A1 (de) |
DE (1) | DE69119181T2 (de) |
Families Citing this family (51)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5240818A (en) * | 1991-07-31 | 1993-08-31 | Texas Instruments Incorporated | Method for manufacturing a color filter for deformable mirror device |
CA2087110A1 (en) * | 1992-01-14 | 1993-07-15 | Hiroshi Tsushima | Method of forming color pattern |
US5268245A (en) * | 1992-07-09 | 1993-12-07 | Polaroid Corporation | Process for forming a filter on a solid state imager |
KR960003482B1 (ko) * | 1992-12-14 | 1996-03-14 | 삼성전자주식회사 | 액정 표시 장치의 칼라 필터 제조방법 |
DE4407067C2 (de) * | 1994-03-03 | 2003-06-18 | Unaxis Balzers Ag | Dielektrisches Interferenz-Filtersystem, LCD-Anzeige und CCD-Anordnung sowie Verfahren zur Herstellung eines dielektrischen Interferenz-Filtersystems |
US5667920A (en) * | 1996-03-11 | 1997-09-16 | Polaroid Corporation | Process for preparing a color filter |
US6270948B1 (en) | 1996-08-22 | 2001-08-07 | Kabushiki Kaisha Toshiba | Method of forming pattern |
US5871871A (en) * | 1996-09-20 | 1999-02-16 | International Business Machines Corporation | Stabilized multi-layered structure of color filters on a silicon chip and a method for making |
US5756239A (en) * | 1996-12-12 | 1998-05-26 | Eastman Kodak Company | Method of forming a color filter array with improved resolution |
CA2374944A1 (en) | 1999-06-10 | 2000-12-21 | Nigel Hacker | Spin-on-glass anti-reflective coatings for photolithography |
US6824879B2 (en) | 1999-06-10 | 2004-11-30 | Honeywell International Inc. | Spin-on-glass anti-reflective coatings for photolithography |
KR20040075866A (ko) | 2001-11-15 | 2004-08-30 | 허니웰 인터내셔날 인코포레이티드 | 포토리소그래피용 스핀-온 무반사 코팅 |
JP4431336B2 (ja) * | 2003-04-09 | 2010-03-10 | 株式会社日本触媒 | 樹脂組成物、光学フィルターおよびプラズマディスプレー |
US8053159B2 (en) | 2003-11-18 | 2011-11-08 | Honeywell International Inc. | Antireflective coatings for via fill and photolithography applications and methods of preparation thereof |
KR100568302B1 (ko) * | 2004-05-17 | 2006-04-05 | 삼성전기주식회사 | Saw 소자의 제조방법 |
US7195848B2 (en) * | 2004-08-30 | 2007-03-27 | Eastman Kodak Company | Method of making inlaid color filter arrays |
DE102005026912A1 (de) * | 2005-06-10 | 2006-12-14 | Arnold & Richter Cine Technik Gmbh & Co. Betriebs Kg | Filmscanner |
JP4984634B2 (ja) * | 2005-07-21 | 2012-07-25 | ソニー株式会社 | 物理情報取得方法および物理情報取得装置 |
KR100660332B1 (ko) * | 2005-12-28 | 2006-12-22 | 동부일렉트로닉스 주식회사 | 이미지 센서의 제조방법 |
JP2008046584A (ja) * | 2006-07-19 | 2008-02-28 | Fujifilm Corp | カラーフィルタの製造方法 |
JP2008041362A (ja) * | 2006-08-03 | 2008-02-21 | Fuji Electric Holdings Co Ltd | パターン化された色変換層の製造方法、およびそれを用いた色変換フィルターおよび有機elディスプレイの製造方法。 |
US8642246B2 (en) | 2007-02-26 | 2014-02-04 | Honeywell International Inc. | Compositions, coatings and films for tri-layer patterning applications and methods of preparation thereof |
JP2008241744A (ja) * | 2007-03-23 | 2008-10-09 | Fujifilm Corp | カラーフィルタの製造方法 |
EP1975702B1 (de) | 2007-03-29 | 2013-07-24 | FUJIFILM Corporation | Farbige lichthärtbare Zusammensetzung für eine Festkörperbildaufnahmevorrichtung, Farbfilter und Verfahren zur Herstellung davon, sowie Festkörperbildaufnahmevorrichtung |
KR101412719B1 (ko) | 2007-07-17 | 2014-06-26 | 후지필름 가부시키가이샤 | 감광성 조성물, 경화성 조성물, 신규 화합물, 광중합성조성물, 컬러 필터, 및, 평판 인쇄판 원판 |
JP4890388B2 (ja) | 2007-08-22 | 2012-03-07 | 富士フイルム株式会社 | 着色感光性組成物、カラーフィルタ及びその製造方法 |
KR20100061730A (ko) | 2007-09-19 | 2010-06-08 | 후지필름 가부시키가이샤 | 아세틸렌 화합물, 그 염, 그 축합물 및 그 조성물 |
EP2055746B1 (de) | 2007-10-31 | 2011-09-28 | FUJIFILM Corporation | Farbige härtbare Zusammensetzung, Farbfilter, Herstellungsverfahren dafür und Festzustand-Bildaufnahmevorrichtung |
CN101842444B (zh) | 2007-11-01 | 2013-06-05 | 富士胶片株式会社 | 颜料分散组合物、着色固化性组合物、滤色器及其制造方法 |
JP5068640B2 (ja) | 2007-12-28 | 2012-11-07 | 富士フイルム株式会社 | 染料含有ネガ型硬化性組成物、カラーフィルタ及びその製造方法、並びに固体撮像素子 |
JP5052360B2 (ja) | 2008-01-31 | 2012-10-17 | 富士フイルム株式会社 | 染料含有ネガ型硬化性組成物、カラーフィルタ及びその製造方法 |
JP5448352B2 (ja) | 2008-03-10 | 2014-03-19 | 富士フイルム株式会社 | 着色硬化性組成物、カラーフィルタ、及び、固体撮像素子 |
JP5305704B2 (ja) | 2008-03-24 | 2013-10-02 | 富士フイルム株式会社 | 新規化合物、光重合性組成物、カラーフィルタ用光重合性組成物、カラーフィルタ、及びその製造方法、固体撮像素子、並びに、平版印刷版原版 |
JP5507054B2 (ja) | 2008-03-28 | 2014-05-28 | 富士フイルム株式会社 | 重合性組成物、カラーフィルタ、カラーフィルタの製造方法、及び固体撮像素子 |
US7688524B2 (en) * | 2008-04-24 | 2010-03-30 | Sperian Eye & Face Protection, Inc. | Laser protective eyewear having improved glare protection |
JP2009271121A (ja) | 2008-04-30 | 2009-11-19 | Fujifilm Corp | 着色光学異方性層を含む光学材料 |
JP2009289768A (ja) * | 2008-05-27 | 2009-12-10 | Panasonic Corp | 固体撮像装置 |
JP5171506B2 (ja) | 2008-06-30 | 2013-03-27 | 富士フイルム株式会社 | 新規化合物、重合性組成物、カラーフィルタ、及びその製造方法、固体撮像素子、並びに、平版印刷版原版 |
JP2010044273A (ja) | 2008-08-14 | 2010-02-25 | Fujifilm Corp | カラーフィルタ及びその形成方法、並びに固体撮像素子 |
JP5393092B2 (ja) | 2008-09-30 | 2014-01-22 | 富士フイルム株式会社 | 染料含有ネガ型硬化性組成物、これを用いたカラーフィルタ及びその製造方法、並びに固体撮像素子 |
WO2010119924A1 (ja) | 2009-04-16 | 2010-10-21 | 富士フイルム株式会社 | カラーフィルタ用重合性組成物、カラーフィルタ、及び固体撮像素子 |
JP5572332B2 (ja) * | 2009-04-24 | 2014-08-13 | 凸版印刷株式会社 | 染料を含有する青色着色組成物、カラーフィルタ、それを具備する液晶表示装置並びに有機elディスプレイ |
US8557877B2 (en) | 2009-06-10 | 2013-10-15 | Honeywell International Inc. | Anti-reflective coatings for optically transparent substrates |
KR20110098638A (ko) | 2010-02-26 | 2011-09-01 | 후지필름 가부시키가이샤 | 착색 경화성 조성물, 컬러필터와 그 제조방법, 고체촬상소자 및 액정표시장치 |
KR101830206B1 (ko) | 2010-12-28 | 2018-02-20 | 후지필름 가부시키가이샤 | 차광막 형성용 티타늄 블랙 분산 조성물과 그 제조방법, 흑색 감방사선성 조성물, 흑색 경화막, 고체촬상소자, 및 흑색 경화막의 제조방법 |
US8864898B2 (en) | 2011-05-31 | 2014-10-21 | Honeywell International Inc. | Coating formulations for optical elements |
WO2014087901A1 (ja) | 2012-12-03 | 2014-06-12 | 富士フイルム株式会社 | Irカットフィルタ及びその製造方法、固体撮像装置、遮光膜の形成方法 |
CN104854699B (zh) | 2012-12-03 | 2017-09-01 | 富士胶片株式会社 | 固体摄影元件用保持基板及其制造方法、固体摄影装置 |
US9570491B2 (en) | 2014-10-08 | 2017-02-14 | Omnivision Technologies, Inc. | Dual-mode image sensor with a signal-separating color filter array, and method for same |
EP3194502A4 (de) | 2015-04-13 | 2018-05-16 | Honeywell International Inc. | Polysiloxanformulierungen und beschichtungen für optoelektronische anwendungen |
KR20200026053A (ko) | 2018-08-31 | 2020-03-10 | 주식회사 이엔에프테크놀로지 | 칼라 필터용 박리액 조성물 및 이를 이용한 방법 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3873361A (en) * | 1973-11-29 | 1975-03-25 | Ibm | Method of depositing thin film utilizing a lift-off mask |
US4124473A (en) * | 1977-06-17 | 1978-11-07 | Rca Corporation | Fabrication of multi-level relief patterns in a substrate |
US4218532A (en) * | 1977-10-13 | 1980-08-19 | Bell Telephone Laboratories, Incorporated | Photolithographic technique for depositing thin films |
JPS5942749B2 (ja) * | 1979-07-11 | 1984-10-17 | 株式会社東芝 | 多層膜のエツチング方法 |
US4239842A (en) * | 1979-09-13 | 1980-12-16 | Eastman Kodak Company | Color filter arrays, color imaging devices and methods of making same |
US4357415A (en) * | 1980-03-06 | 1982-11-02 | Eastman Kodak Company | Method of making a solid-state color imaging device having a color filter array using a photocrosslinkable barrier |
US4357416A (en) * | 1980-04-21 | 1982-11-02 | E. I. Du Pont De Nemours And Company | Process for preparation of multilayer photosensitive solvent-processable litho element |
JPS574012A (en) * | 1980-06-09 | 1982-01-09 | Canon Inc | Production of color filter |
JPS6034085B2 (ja) * | 1981-04-20 | 1985-08-07 | 松下電器産業株式会社 | カラ−フイルタの製造方法 |
JPS57190912A (en) * | 1981-05-20 | 1982-11-24 | Matsushita Electric Ind Co Ltd | Production of color filter |
JPS5813089A (ja) * | 1981-07-16 | 1983-01-25 | Fuji Photo Film Co Ltd | カラ−固体撮像素子基板の製造方法 |
JPS5813090A (ja) * | 1981-07-16 | 1983-01-25 | Fuji Photo Film Co Ltd | カラ−固体撮像素子基板の製造方法 |
US4387145A (en) * | 1981-09-28 | 1983-06-07 | Fairchild Camera & Instrument Corp. | Lift-off shadow mask |
NL8105071A (nl) * | 1981-11-10 | 1983-06-01 | Philips Nv | Kleurenbeeldopneeminrichting. |
US4428796A (en) * | 1982-08-02 | 1984-01-31 | Fairchild Camera And Instrument Corporation | Adhesion bond-breaking of lift-off regions on semiconductor structures |
US4450215A (en) * | 1983-06-06 | 1984-05-22 | Eastman Kodak Company | Color filter elements comprising hexaalkoxymethylmelamine barrier layers |
US4613398A (en) * | 1985-06-06 | 1986-09-23 | International Business Machines Corporation | Formation of etch-resistant resists through preferential permeation |
US4609614A (en) * | 1985-06-24 | 1986-09-02 | Rca Corporation | Process of using absorptive layer in optical lithography with overlying photoresist layer to form relief pattern on substrate |
US4808501A (en) * | 1985-10-15 | 1989-02-28 | Polaroid Corporation, Patent Dept. | Method for manufacturing an optical filter |
US4891303A (en) * | 1988-05-26 | 1990-01-02 | Texas Instruments Incorporated | Trilayer microlithographic process using a silicon-based resist as the middle layer |
-
1990
- 1990-10-10 US US07/595,211 patent/US5059500A/en not_active Expired - Lifetime
-
1991
- 1991-06-21 CA CA002045249A patent/CA2045249A1/en not_active Abandoned
- 1991-07-19 EP EP91201909A patent/EP0481539B1/de not_active Expired - Lifetime
- 1991-07-19 DE DE69119181T patent/DE69119181T2/de not_active Expired - Fee Related
- 1991-08-15 JP JP3205237A patent/JPH04234706A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
US5059500A (en) | 1991-10-22 |
JPH04234706A (ja) | 1992-08-24 |
EP0481539B1 (de) | 1996-05-01 |
DE69119181T2 (de) | 1996-08-14 |
CA2045249A1 (en) | 1992-04-11 |
EP0481539A1 (de) | 1992-04-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |