DE69118264D1 - Spektroskopie mittels induktiv angekoppelten Plasmas - Google Patents

Spektroskopie mittels induktiv angekoppelten Plasmas

Info

Publication number
DE69118264D1
DE69118264D1 DE69118264T DE69118264T DE69118264D1 DE 69118264 D1 DE69118264 D1 DE 69118264D1 DE 69118264 T DE69118264 T DE 69118264T DE 69118264 T DE69118264 T DE 69118264T DE 69118264 D1 DE69118264 D1 DE 69118264D1
Authority
DE
Germany
Prior art keywords
spectroscopy
inductively coupled
coupled plasma
plasma
inductively
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69118264T
Other languages
English (en)
Other versions
DE69118264T2 (de
Inventor
Ian Lawrence Turner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Australia Pty Ltd
Original Assignee
Varian Australia Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Australia Pty Ltd filed Critical Varian Australia Pty Ltd
Publication of DE69118264D1 publication Critical patent/DE69118264D1/de
Application granted granted Critical
Publication of DE69118264T2 publication Critical patent/DE69118264T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
    • G01N21/73—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00—Details of transformers or inductances, in general
    • H01F27/28—Coils; Windings; Conductive connections
    • H01F27/2823—Wires
    • H01F2027/2833—Wires using coaxial cable as wire

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
DE69118264T 1990-07-24 1991-07-23 Spektroskopie mittels induktiv angekoppelten Plasmas Expired - Lifetime DE69118264T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AUPK134190 1990-07-24

Publications (2)

Publication Number Publication Date
DE69118264D1 true DE69118264D1 (de) 1996-05-02
DE69118264T2 DE69118264T2 (de) 1996-08-29

Family

ID=3774845

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69118264T Expired - Lifetime DE69118264T2 (de) 1990-07-24 1991-07-23 Spektroskopie mittels induktiv angekoppelten Plasmas

Country Status (4)

Country Link
US (1) US5194731A (de)
EP (1) EP0468742B1 (de)
CA (1) CA2047571C (de)
DE (1) DE69118264T2 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2116821C (en) * 1993-03-05 2003-12-23 Stephen Esler Anderson Improvements in plasma mass spectrometry
US5540824A (en) * 1994-07-18 1996-07-30 Applied Materials Plasma reactor with multi-section RF coil and isolated conducting lid
JP3140934B2 (ja) * 1994-08-23 2001-03-05 東京エレクトロン株式会社 プラズマ装置
DE69510427T2 (de) 1994-10-31 1999-12-30 Applied Materials Inc Plasmareaktoren zur Halbleiterscheibenbehandlung
US5919382A (en) * 1994-10-31 1999-07-06 Applied Materials, Inc. Automatic frequency tuning of an RF power source of an inductively coupled plasma reactor
EP0799408B1 (de) * 1994-12-20 2003-03-19 Varian Australia Pty. Ltd. Spektrometer mit entladungsbegrenzenden mitteln
US5691642A (en) * 1995-07-28 1997-11-25 Trielectrix Method and apparatus for characterizing a plasma using broadband microwave spectroscopic measurements
US5712480A (en) * 1995-11-16 1998-01-27 Leco Corporation Time-of-flight data acquisition system
US6369349B2 (en) 1997-06-30 2002-04-09 Applied Materials, Inc. Plasma reactor with coil antenna of interleaved conductors
US6239553B1 (en) * 1999-04-22 2001-05-29 Applied Materials, Inc. RF plasma source for material processing
US6462481B1 (en) 2000-07-06 2002-10-08 Applied Materials Inc. Plasma reactor having a symmetric parallel conductor coil antenna
US6685798B1 (en) * 2000-07-06 2004-02-03 Applied Materials, Inc Plasma reactor having a symmetrical parallel conductor coil antenna
WO2002005308A2 (en) * 2000-07-06 2002-01-17 Applied Materials, Inc. A plasma reactor having a symmetric parallel conductor coil antenna
US6414648B1 (en) 2000-07-06 2002-07-02 Applied Materials, Inc. Plasma reactor having a symmetric parallel conductor coil antenna
US6409933B1 (en) 2000-07-06 2002-06-25 Applied Materials, Inc. Plasma reactor having a symmetric parallel conductor coil antenna
US6694915B1 (en) 2000-07-06 2004-02-24 Applied Materials, Inc Plasma reactor having a symmetrical parallel conductor coil antenna
DE20210328U1 (de) * 2002-07-04 2002-09-12 Eltro Gmbh Plasmareaktor
US7230258B2 (en) * 2003-07-24 2007-06-12 Intel Corporation Plasma-based debris mitigation for extreme ultraviolet (EUV) light source
WO2006138441A2 (en) * 2005-06-17 2006-12-28 Perkinelmer, Inc. Boost devices and methods of using them
JP5174013B2 (ja) * 2006-05-22 2013-04-03 アジレント・テクノロジーズ・オーストラリア（エム）プロプライエタリー・リミテッド 分光分析用の発電機
US7501621B2 (en) * 2006-07-12 2009-03-10 Leco Corporation Data acquisition system for a spectrometer using an adaptive threshold
JP6476020B2 (ja) * 2015-03-10 2019-02-27 株式会社日立ハイテクサイエンス 誘導結合プラズマ発生装置及び誘導結合プラズマ分析装置
CA3122913A1 (en) * 2018-12-13 2020-06-18 Perkinelmer Health Sciences Canada, Inc. Mass spectrometer components including programmable elements and devices and systems using them

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4501965A (en) * 1983-01-14 1985-02-26 Mds Health Group Limited Method and apparatus for sampling a plasma into a vacuum chamber
USRE33386E (en) * 1983-01-14 1990-10-16 Method and apparatus for sampling a plasma into a vacuum chamber
US4682026A (en) * 1986-04-10 1987-07-21 Mds Health Group Limited Method and apparatus having RF biasing for sampling a plasma into a vacuum chamber
DE3632340C2 (de) * 1986-09-24 1998-01-15 Leybold Ag Induktiv angeregte Ionenquelle
US4982140A (en) * 1989-10-05 1991-01-01 General Electric Company Starting aid for an electrodeless high intensity discharge lamp

Also Published As

Publication number Publication date
CA2047571A1 (en) 1992-01-25
EP0468742A3 (en) 1992-05-27
EP0468742A2 (de) 1992-01-29
US5194731A (en) 1993-03-16
EP0468742B1 (de) 1996-03-27
CA2047571C (en) 2001-12-18
DE69118264T2 (de) 1996-08-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: VONNEMANN, KLOIBER & KOLLEGEN, 87437 KEMPTEN