DE69117159D1 - Verkleidung aus Metall zur Steigerung der Wachstumsgeschwindigkeit beim Aufdampfen von Diamant mittels CVD - Google Patents

Verkleidung aus Metall zur Steigerung der Wachstumsgeschwindigkeit beim Aufdampfen von Diamant mittels CVD

Info

Publication number
DE69117159D1
DE69117159D1 DE69117159T DE69117159T DE69117159D1 DE 69117159 D1 DE69117159 D1 DE 69117159D1 DE 69117159 T DE69117159 T DE 69117159T DE 69117159 T DE69117159 T DE 69117159T DE 69117159 D1 DE69117159 D1 DE 69117159D1
Authority
DE
Germany
Prior art keywords
vapor deposition
diamond
cvd
increase
growth rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69117159T
Other languages
English (en)
Other versions
DE69117159T2 (de
Inventor
James Fulton Fleischer
Thomas Richard Anthony
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Application granted granted Critical
Publication of DE69117159D1 publication Critical patent/DE69117159D1/de
Publication of DE69117159T2 publication Critical patent/DE69117159T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/271—Diamond only using hot filaments

Landscapes

  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
  • Catalysts (AREA)
DE69117159T 1990-12-24 1991-11-26 Verkleidung aus Metall zur Steigerung der Wachstumsgeschwindigkeit beim Aufdampfen von Diamant mittels CVD Expired - Fee Related DE69117159T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US63287590A 1990-12-24 1990-12-24

Publications (2)

Publication Number Publication Date
DE69117159D1 true DE69117159D1 (de) 1996-03-28
DE69117159T2 DE69117159T2 (de) 1996-08-29

Family

ID=24537315

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69117159T Expired - Fee Related DE69117159T2 (de) 1990-12-24 1991-11-26 Verkleidung aus Metall zur Steigerung der Wachstumsgeschwindigkeit beim Aufdampfen von Diamant mittels CVD

Country Status (9)

Country Link
US (1) US5306348A (de)
EP (1) EP0492159B1 (de)
JP (1) JPH04305094A (de)
KR (1) KR920012535A (de)
AT (1) ATE134223T1 (de)
CA (1) CA2056473A1 (de)
DE (1) DE69117159T2 (de)
IE (1) IE914539A1 (de)
ZA (1) ZA919693B (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3728465B2 (ja) * 1994-11-25 2005-12-21 株式会社神戸製鋼所 単結晶ダイヤモンド膜の形成方法
JPH0948694A (ja) * 1995-08-04 1997-02-18 Kobe Steel Ltd 単結晶ダイヤモンド膜の形成方法
JP3728467B2 (ja) * 1995-08-04 2005-12-21 株式会社神戸製鋼所 単結晶ダイヤモンド膜の形成方法
KR100496769B1 (ko) * 2002-07-09 2005-06-22 공주대학교 산학협력단 흡습성 고체 전구체 기화장치
US7750326B2 (en) * 2005-06-13 2010-07-06 Asml Netherlands B.V. Lithographic apparatus and cleaning method therefor
JP2016111101A (ja) * 2014-12-03 2016-06-20 株式会社ニューフレアテクノロジー 気相成長方法および気相成長装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2128202A1 (de) * 1971-06-07 1973-01-04 Herbert Precht Reaktoren zur herstellung von diamanten
US4333986A (en) * 1979-06-11 1982-06-08 Sumitomo Electric Industries, Ltd. Diamond sintered compact wherein crystal particles are uniformly orientated in a particular direction and a method for producing the same
US4347431A (en) * 1980-07-25 1982-08-31 Bell Telephone Laboratories, Inc. Diffusion furnace
JPS592318A (ja) * 1982-06-28 1984-01-07 Toshiba Mach Co Ltd 半導体気相成長装置
SE442305B (sv) * 1984-06-27 1985-12-16 Santrade Ltd Forfarande for kemisk gasutfellning (cvd) for framstellning av en diamantbelagd sammansatt kropp samt anvendning av kroppen
JPS62290869A (ja) * 1986-06-09 1987-12-17 Mitsubishi Electric Corp 硬質炭素膜製造装置
JP2582765B2 (ja) * 1987-02-10 1997-02-19 株式会社東芝 ダイヤモンド製造装置
US4830702A (en) * 1987-07-02 1989-05-16 General Electric Company Hollow cathode plasma assisted apparatus and method of diamond synthesis
FR2621930B1 (fr) * 1987-10-15 1990-02-02 Solems Sa Procede et appareil pour la production par plasma de couches minces a usage electronique et/ou optoelectronique
US4958592A (en) * 1988-08-22 1990-09-25 General Electric Company Resistance heater for diamond production by CVD
US4953499A (en) * 1989-08-03 1990-09-04 General Electric Company Apparatus for synthetic diamond deposition including curved filaments and substrate cooling means

Also Published As

Publication number Publication date
DE69117159T2 (de) 1996-08-29
EP0492159B1 (de) 1996-02-14
ZA919693B (en) 1992-11-25
KR920012535A (ko) 1992-07-27
IE914539A1 (en) 1992-07-01
ATE134223T1 (de) 1996-02-15
US5306348A (en) 1994-04-26
CA2056473A1 (en) 1992-06-25
JPH04305094A (ja) 1992-10-28
EP0492159A1 (de) 1992-07-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee