DE69112613T2 - Trägerkassette für Halbleiterscheiben. - Google Patents

Trägerkassette für Halbleiterscheiben.

Info

Publication number
DE69112613T2
DE69112613T2 DE1991612613 DE69112613T DE69112613T2 DE 69112613 T2 DE69112613 T2 DE 69112613T2 DE 1991612613 DE1991612613 DE 1991612613 DE 69112613 T DE69112613 T DE 69112613T DE 69112613 T2 DE69112613 T2 DE 69112613T2
Authority
DE
Germany
Prior art keywords
semiconductor wafers
carrier cassette
cassette
carrier
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1991612613
Other languages
English (en)
Other versions
DE69112613D1 (de
Inventor
Nobuyoshi Ogino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Publication of DE69112613D1 publication Critical patent/DE69112613D1/de
Application granted granted Critical
Publication of DE69112613T2 publication Critical patent/DE69112613T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
DE1991612613 1991-06-28 1991-06-28 Trägerkassette für Halbleiterscheiben. Expired - Fee Related DE69112613T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19910305897 EP0520105B1 (de) 1991-06-28 1991-06-28 Trägerkassette für Halbleiterscheiben

Publications (2)

Publication Number Publication Date
DE69112613D1 DE69112613D1 (de) 1995-10-05
DE69112613T2 true DE69112613T2 (de) 1996-05-02

Family

ID=8208327

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1991612613 Expired - Fee Related DE69112613T2 (de) 1991-06-28 1991-06-28 Trägerkassette für Halbleiterscheiben.

Country Status (2)

Country Link
EP (1) EP0520105B1 (de)
DE (1) DE69112613T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW296361B (de) * 1995-06-26 1997-01-21 Kakizaki Seisakusho Kk
CN104465463A (zh) * 2014-12-16 2015-03-25 中国电子科技集团公司第四十六研究所 一种承托多个尺寸硅外延片的花篮结构
CN112582315B (zh) * 2021-03-01 2021-05-07 常州江苏大学工程技术研究院 一种防氧化硅片清洗装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4471716A (en) * 1981-01-15 1984-09-18 Fluoroware, Inc. Wafer carrier
EP0322443A1 (de) * 1987-07-02 1989-07-05 Fluoroware, Inc. Verstärkter träger mit eingebetteter fester einlage

Also Published As

Publication number Publication date
EP0520105B1 (de) 1995-08-30
DE69112613D1 (de) 1995-10-05
EP0520105A1 (de) 1992-12-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee