DE69109285T2 - Apparat und Methode zur Inspektion eines Substrates. - Google Patents

Apparat und Methode zur Inspektion eines Substrates.

Info

Publication number
DE69109285T2
DE69109285T2 DE1991609285 DE69109285T DE69109285T2 DE 69109285 T2 DE69109285 T2 DE 69109285T2 DE 1991609285 DE1991609285 DE 1991609285 DE 69109285 T DE69109285 T DE 69109285T DE 69109285 T2 DE69109285 T2 DE 69109285T2
Authority
DE
Germany
Prior art keywords
inspecting
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1991609285
Other languages
English (en)
Other versions
DE69109285D1 (de
Inventor
Gudrun Boehmer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE69109285D1 publication Critical patent/DE69109285D1/de
Application granted granted Critical
Publication of DE69109285T2 publication Critical patent/DE69109285T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/14—Condensers affording illumination for phase-contrast observation

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE1991609285 1991-08-02 1991-08-02 Apparat und Methode zur Inspektion eines Substrates. Expired - Fee Related DE69109285T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP91112985A EP0527242B1 (de) 1991-08-02 1991-08-02 Apparat und Methode zur Inspektion eines Substrates

Publications (2)

Publication Number Publication Date
DE69109285D1 DE69109285D1 (de) 1995-06-01
DE69109285T2 true DE69109285T2 (de) 1995-11-02

Family

ID=8207012

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1991609285 Expired - Fee Related DE69109285T2 (de) 1991-08-02 1991-08-02 Apparat und Methode zur Inspektion eines Substrates.

Country Status (3)

Country Link
EP (1) EP0527242B1 (de)
JP (1) JPH0721460B2 (de)
DE (1) DE69109285T2 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004002450A1 (de) * 2004-01-16 2005-08-25 Siemens Ag Beleuchtungseinheit und Verfahren zu deren Betrieb
DE102013216424A1 (de) 2013-08-20 2015-03-12 Robert Bosch Gmbh Bildgebendes Verfahren zur Segmentierung einer Beschichtung auf einem Substrat

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4434699C2 (de) * 1994-09-28 2001-02-22 Fraunhofer Ges Forschung Anordnung zur Prüfung durchsichtiger oder spiegelnder Objekte
DE10045245A1 (de) * 2000-09-13 2002-03-28 Siemens Ag Einrichtung für optische Inspektion einer auf Defekte hin zu prüfenden Oberfläche eines Objekts

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2944463A (en) * 1955-01-14 1960-07-12 Zeiss Carl Illuminating device particularly for objects in microscopes
US4689491A (en) * 1985-04-19 1987-08-25 Datasonics Corp. Semiconductor wafer scanning system
US5004321A (en) * 1989-07-28 1991-04-02 At&T Bell Laboratories Resolution confocal microscope, and device fabrication method using same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004002450A1 (de) * 2004-01-16 2005-08-25 Siemens Ag Beleuchtungseinheit und Verfahren zu deren Betrieb
DE102013216424A1 (de) 2013-08-20 2015-03-12 Robert Bosch Gmbh Bildgebendes Verfahren zur Segmentierung einer Beschichtung auf einem Substrat

Also Published As

Publication number Publication date
JPH0721460B2 (ja) 1995-03-08
EP0527242A1 (de) 1993-02-17
DE69109285D1 (de) 1995-06-01
JPH06147831A (ja) 1994-05-27
EP0527242B1 (de) 1995-04-26

Similar Documents

Publication Publication Date Title
DE69223934T2 (de) Methode und Apparat zum Aufrauhen faseroptischer Substrate
DE69427645T2 (de) Apparat zur handhabung von prozess fluiden
DE69225335D1 (de) Methode und apparat zum testen von elektronischen zählern
DE69016588T2 (de) Methode und Apparat zum Schneiden eines Rohres.
EP0452773A3 (en) Method and apparatus for processing substrate
NO941283D0 (no) Apparat og fremgangsmåte for belegging av partikler
DE3779228D1 (de) Methode und apparat zum befestigen eines halbleiterlaserelementes.
NO972676D0 (no) Framgangsmåte og anordning for lakkering eller belegging av et substrat
DE69407255T2 (de) Methode und Apparat zum Transportieren von Teilchen
NO953965D0 (no) Fremgangsmåte og apparat for merking og oppsporing av medisinske pröver
DE69327601D1 (de) Methode und Apparat zur Inspektion von Gegenständen oder Oberflächen
DE69219267T2 (de) Verfahren zur Anzeige eines Defektes und Vorrichtung hierfür
DE69119201D1 (de) Methode und Apparat zur Kontrolle gedruckter Schaltungen
DE68906710D1 (de) Verfahren und apparat zum verkapseln einer elektronischen anordnung.
NO941068D0 (no) Fremgangsmåte og apparat til amplitudekompensert skrivekorreksjon
DE69123279T2 (de) Transportvorrichtung für Substrate und Verfahren zur Kontrolle
AU8380591A (en) Surface inspection method and and apparatus thereof
DE69109285T2 (de) Apparat und Methode zur Inspektion eines Substrates.
DK0410522T3 (da) Fremgangsmåde og apparat til forebyggese af boblevækst i en rørledning
DE69422770T2 (de) Verfahren und vorrichtung zum beschichten eines glassubstrates
DE68920992T2 (de) Apparat und Verfahren zur Regelung einer Messanordnung.
DE69409805T2 (de) Methode und apparat zur aufspürung von fehlern in linsen
DE69016807T2 (de) Verfahren und Apparat zur Aufzeichung.
DE69430992D1 (de) Methode zum testen eines analyten
DE69201555D1 (de) Verfahren und Apparat zum Isolieren von kryogenen Vorrichtungen.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee