DE69327601D1 - Methode und Apparat zur Inspektion von Gegenständen oder Oberflächen - Google Patents

Methode und Apparat zur Inspektion von Gegenständen oder Oberflächen

Info

Publication number
DE69327601D1
DE69327601D1 DE69327601T DE69327601T DE69327601D1 DE 69327601 D1 DE69327601 D1 DE 69327601D1 DE 69327601 T DE69327601 T DE 69327601T DE 69327601 T DE69327601 T DE 69327601T DE 69327601 D1 DE69327601 D1 DE 69327601D1
Authority
DE
Germany
Prior art keywords
inspecting objects
inspecting
objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69327601T
Other languages
English (en)
Other versions
DE69327601T2 (de
Inventor
Robert Bishop
Richard Damon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beltronics Inc
Original Assignee
Beltronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beltronics Inc filed Critical Beltronics Inc
Publication of DE69327601D1 publication Critical patent/DE69327601D1/de
Application granted granted Critical
Publication of DE69327601T2 publication Critical patent/DE69327601T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Image Analysis (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE69327601T 1992-03-12 1993-03-08 Methode und Apparat zur Inspektion von Gegenständen oder Oberflächen Expired - Fee Related DE69327601T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US85004992A 1992-03-12 1992-03-12

Publications (2)

Publication Number Publication Date
DE69327601D1 true DE69327601D1 (de) 2000-02-24
DE69327601T2 DE69327601T2 (de) 2000-11-16

Family

ID=25307145

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69327601T Expired - Fee Related DE69327601T2 (de) 1992-03-12 1993-03-08 Methode und Apparat zur Inspektion von Gegenständen oder Oberflächen

Country Status (8)

Country Link
US (1) US5524152A (de)
EP (1) EP0560565B1 (de)
JP (1) JPH0643103A (de)
KR (1) KR930020153A (de)
CN (1) CN1077028A (de)
CA (1) CA2089332A1 (de)
DE (1) DE69327601T2 (de)
TW (2) TW277164B (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5684582A (en) * 1994-03-18 1997-11-04 Lucid Technologies, Inc. Spectrophotometry
KR100255499B1 (ko) * 1997-06-04 2000-05-01 윤종용 칼라 이미지로부터 물체의 색불변량 추출방법
FR2773220B1 (fr) * 1997-12-30 2001-07-27 Compucal Dispositif d'analyse colorimetrique d'objets tels que des fruits ou legumes
JP4332656B2 (ja) * 1998-01-26 2009-09-16 ラトックシステムエンジニアリング株式会社 欠陥検査方法および欠陥検査装置
FR2786499B1 (fr) * 1998-11-30 2002-02-08 Intelligence Artificielle Appl Appareil de lecture automatique d'un antibiogramme a contraste ameliore
US6427024B1 (en) * 1999-04-02 2002-07-30 Beltronics, Inc. Apparatus for and method of automatic optical inspection of electronic circuit boards, wafers and the like for defects, using skeletal reference inspection and separately programmable alignment tolerance and detection parameters
US6603877B1 (en) * 1999-06-01 2003-08-05 Beltronics, Inc. Method of and apparatus for optical imaging inspection of multi-material objects and the like
IL131284A (en) 1999-08-05 2003-05-29 Orbotech Ltd Illumination for inspecting surfaces of articles
US20010048765A1 (en) * 2000-02-29 2001-12-06 Steven Yi Color characterization for inspection of a product having nonuniform color characteristics
US7231080B2 (en) * 2001-02-13 2007-06-12 Orbotech Ltd. Multiple optical input inspection system
CN1308893C (zh) * 2001-05-02 2007-04-04 良瑞科技股份有限公司 生成电路板检验系统中使用的电路板特征调色板的方法
US6765185B2 (en) * 2001-10-04 2004-07-20 Koninklijke Philips Electronics N.V. Computer vision recognition of metallic objects against a poorly contrasting background
US6903813B2 (en) * 2002-02-21 2005-06-07 Jjl Technologies Llc Miniaturized system and method for measuring optical characteristics
FR2842383B1 (fr) * 2002-07-11 2004-12-03 Solystic Installation de tri postal comprenant une tete de lecture couleur a deux cameras
US7419085B2 (en) * 2003-05-13 2008-09-02 Matsushita Electric Industrial Co., Ltd. Optical processing apparatus
US7365854B2 (en) * 2004-05-11 2008-04-29 Nordson Corporation Apparatus and methods for high speed RGB color discrimination
JP4345930B2 (ja) * 2005-01-28 2009-10-14 Ｙｋｋ株式会社 物品の外観検査装置
US7924434B2 (en) 2005-08-02 2011-04-12 Kla-Tencor Technologies Corp. Systems configured to generate output corresponding to defects on a specimen
TW200949241A (en) * 2008-05-28 2009-12-01 Asustek Comp Inc Apparatus and method for detecting circuit board
CN101813639B (zh) * 2010-04-23 2012-01-25 浙江中烟工业有限责任公司 一种检查印刷凹版辊筒体表面缺陷装置
US8737727B2 (en) * 2010-12-30 2014-05-27 Pelco, Inc. Color similarity sorting for video forensics search
KR20170040778A (ko) * 2015-10-05 2017-04-13 에프이아이 컴파니 Vlsi 디바이스들을 위한 최적화된 파장의 광자 방출 현미경
CN111128777B (zh) * 2019-12-12 2022-08-19 福建省福联集成电路有限公司 一种芯粒缺陷检测的方法和存储介质

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4105123A (en) * 1976-07-22 1978-08-08 Fmc Corporation Fruit sorting circuitry
US4205752A (en) * 1977-07-13 1980-06-03 Tri/Valley Growers Color sorting of produce
US4152723A (en) * 1977-12-19 1979-05-01 Sperry Rand Corporation Method of inspecting circuit boards and apparatus therefor
US4731663A (en) * 1987-05-20 1988-03-15 American Telephone And Telegraph Method and apparatus for color identification
FR2626074B1 (fr) * 1988-01-18 1990-05-04 Commissariat Energie Atomique Procede d'optimisation du contraste dans une image d'un echantillon
US5085325A (en) * 1988-03-08 1992-02-04 Simco/Ramic Corporation Color sorting system and method
US5014329A (en) * 1990-07-24 1991-05-07 Eastman Kodak Company Automatic detection and selection of a drop-out color using zone calibration in conjunction with optical character recognition of preprinted forms

Also Published As

Publication number Publication date
US5524152A (en) 1996-06-04
JPH0643103A (ja) 1994-02-18
TW277164B (de) 1996-06-01
EP0560565A2 (de) 1993-09-15
EP0560565B1 (de) 2000-01-19
EP0560565A3 (en) 1994-06-15
KR930020153A (ko) 1993-10-19
DE69327601T2 (de) 2000-11-16
CA2089332A1 (en) 1993-09-13
CN1077028A (zh) 1993-10-06
TW277165B (de) 1996-06-01

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Legal Events

Date Code Title Description
8332 No legal effect for de
8370 Indication of lapse of patent is to be deleted
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee