DE69101648T2 - Farbstrahlaufzeichnungskopf, Substrat dafür und Vorrichtung. - Google Patents

Farbstrahlaufzeichnungskopf, Substrat dafür und Vorrichtung.

Info

Publication number
DE69101648T2
DE69101648T2 DE69101648T DE69101648T DE69101648T2 DE 69101648 T2 DE69101648 T2 DE 69101648T2 DE 69101648 T DE69101648 T DE 69101648T DE 69101648 T DE69101648 T DE 69101648T DE 69101648 T2 DE69101648 T2 DE 69101648T2
Authority
DE
Germany
Prior art keywords
electrothermal transducers
recording head
image
functional devices
electrode wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69101648T
Other languages
English (en)
Other versions
DE69101648D1 (de
Inventor
Hiroyuki C O Canon K Ishinaga
Asao C O Canon K K Saito
Toshihiro C O Canon K K Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69101648D1 publication Critical patent/DE69101648D1/de
Publication of DE69101648T2 publication Critical patent/DE69101648T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14379—Edge shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)
  • Recording Measured Values (AREA)
DE69101648T 1990-01-25 1991-01-24 Farbstrahlaufzeichnungskopf, Substrat dafür und Vorrichtung. Expired - Lifetime DE69101648T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1348990 1990-01-25
JP1349090 1990-01-25

Publications (2)

Publication Number Publication Date
DE69101648D1 DE69101648D1 (de) 1994-05-19
DE69101648T2 true DE69101648T2 (de) 1994-08-04

Family

ID=26349304

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69127707T Expired - Lifetime DE69127707T2 (de) 1990-01-25 1991-01-24 Tintenstrahlaufzeichnungskopf, Substrat dafür und Tintenstrahlaufzeichnungsgerät
DE69101648T Expired - Lifetime DE69101648T2 (de) 1990-01-25 1991-01-24 Farbstrahlaufzeichnungskopf, Substrat dafür und Vorrichtung.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69127707T Expired - Lifetime DE69127707T2 (de) 1990-01-25 1991-01-24 Tintenstrahlaufzeichnungskopf, Substrat dafür und Tintenstrahlaufzeichnungsgerät

Country Status (6)

Country Link
US (2) US5182577A (de)
EP (2) EP0579338B1 (de)
JP (1) JP2916006B2 (de)
AT (1) ATE158234T1 (de)
DE (2) DE69127707T2 (de)
ES (1) ES2051560T3 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0579338B1 (de) * 1990-01-25 1997-09-17 Canon Kabushiki Kaisha Tintenstrahlaufzeichnungskopf, Substrat dafür und Tintenstrahlaufzeichnungsgerät
CA2075097C (en) * 1991-08-02 2000-03-28 Hiroyuki Ishinaga Recording apparatus, recording head and substrate therefor
US5598189A (en) * 1993-09-07 1997-01-28 Hewlett-Packard Company Bipolar integrated ink jet printhead driver
US5660739A (en) * 1994-08-26 1997-08-26 Canon Kabushiki Kaisha Method of producing substrate for ink jet recording head, ink jet recording head and ink jet recording apparatus
JPH08118641A (ja) 1994-10-20 1996-05-14 Canon Inc インクジェットヘッド、インクジェットヘッドカートリッジ、インクジェット装置およびインクが再注入されたインクジェットヘッドカートリッジ用インク容器
JP3397473B2 (ja) * 1994-10-21 2003-04-14 キヤノン株式会社 液体噴射ヘッド用素子基板を用いた液体噴射ヘッド、該ヘッドを用いた液体噴射装置
JP3413063B2 (ja) 1996-07-09 2003-06-03 キヤノン株式会社 液体吐出方法及び液体吐出ヘッド
JP3652016B2 (ja) 1996-07-12 2005-05-25 キヤノン株式会社 液体吐出ヘッドおよび液体吐出方法
US5901425A (en) 1996-08-27 1999-05-11 Topaz Technologies Inc. Inkjet print head apparatus
JPH11129483A (ja) 1997-07-03 1999-05-18 Canon Inc 液体吐出ヘッド用オリフィスプレートの製造方法、オリフィスプレート、該オリフィスプレートを有する液体吐出ヘッド及び液体吐出ヘッドの製造方法
US6286927B1 (en) 1997-12-25 2001-09-11 Canon Kabushiki Kaisha Ink jet element substrate and ink jet head that employs the substrate, and ink jet apparatus on which the head is mounted
US6494563B2 (en) 1997-12-25 2002-12-17 Canon Kabushiki Kaisha Ink jet element substrate and ink jet head that employs the substrate, and ink jet apparatus on which the head is mounted
US6213587B1 (en) 1999-07-19 2001-04-10 Lexmark International, Inc. Ink jet printhead having improved reliability
JP2001038908A (ja) 1999-07-27 2001-02-13 Canon Inc 液体吐出ヘッド、ヘッドカートリッジおよび液体吐出装置
JP2001138521A (ja) * 1999-11-11 2001-05-22 Canon Inc インクジェット記録ヘッドおよび該記録ヘッドを用いたインクジェット記録装置
US6309053B1 (en) * 2000-07-24 2001-10-30 Hewlett-Packard Company Ink jet printhead having a ground bus that overlaps transistor active regions
AT412314B (de) * 2001-03-21 2004-12-27 Siemens Ag Oesterreich Verfahren und vorrichtung zum verbinden eines nach dem bluetooth standard arbeitenden gerätes mit einem datennetz
US6543883B1 (en) 2001-09-29 2003-04-08 Hewlett-Packard Company Fluid ejection device with drive circuitry proximate to heating element
US7152957B2 (en) * 2002-12-18 2006-12-26 Canon Kabushiki Kaisha Recording device board having a plurality of bumps for connecting an electrode pad and an electrode lead, liquid ejection head, and manufacturing method for the same
JP5679665B2 (ja) * 2009-02-06 2015-03-04 キヤノン株式会社 インクジェット記録ヘッド
JP5762104B2 (ja) 2011-04-15 2015-08-12 キヤノン株式会社 インクジェット記録ヘッド基板、インクジェット記録ヘッドおよびインクジェット記録装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4099046A (en) * 1977-04-11 1978-07-04 Northern Telecom Limited Thermal printing device
AU531269B2 (en) * 1979-03-06 1983-08-18 Canon Kabushiki Kaisha Ink jet printer
US4429321A (en) * 1980-10-23 1984-01-31 Canon Kabushiki Kaisha Liquid jet recording device
JPS5772867A (en) * 1980-10-23 1982-05-07 Canon Inc Liquid injecting recording apparatus
FR2501443B1 (fr) * 1981-03-06 1985-06-28 Cit Alcatel Tete d'impression d'image
JPS6074644A (ja) * 1983-09-30 1985-04-26 Fujitsu Ltd Ｃｍｏｓゲ−トアレ−
JPH0679853B2 (ja) * 1983-12-09 1994-10-12 キヤノン株式会社 液体噴射装置
US4719477A (en) * 1986-01-17 1988-01-12 Hewlett-Packard Company Integrated thermal ink jet printhead and method of manufacture
US4791440A (en) * 1987-05-01 1988-12-13 International Business Machine Corporation Thermal drop-on-demand ink jet print head
US5081474A (en) * 1988-07-04 1992-01-14 Canon Kabushiki Kaisha Recording head having multi-layer matrix wiring
US5212503A (en) * 1988-07-26 1993-05-18 Canon Kabushiki Kaisha Liquid jet recording head having a substrate with minimized electrode overlap
US5175565A (en) * 1988-07-26 1992-12-29 Canon Kabushiki Kaisha Ink jet substrate including plural temperature sensors and heaters
EP0394598B1 (de) * 1989-04-28 1996-03-06 International Business Machines Corporation Gate-Array-Zelle, bestehend aus FET's von verschiedener und optimierter Grösse
EP0579338B1 (de) * 1990-01-25 1997-09-17 Canon Kabushiki Kaisha Tintenstrahlaufzeichnungskopf, Substrat dafür und Tintenstrahlaufzeichnungsgerät

Also Published As

Publication number Publication date
US5182577A (en) 1993-01-26
EP0441503B1 (de) 1994-04-13
DE69101648D1 (de) 1994-05-19
JPH04211953A (ja) 1992-08-03
DE69127707T2 (de) 1998-01-29
ATE158234T1 (de) 1997-10-15
US6113220A (en) 2000-09-05
DE69127707D1 (de) 1997-10-23
JP2916006B2 (ja) 1999-07-05
EP0579338A1 (de) 1994-01-19
EP0579338B1 (de) 1997-09-17
EP0441503A2 (de) 1991-08-14
EP0441503A3 (en) 1992-01-08
ES2051560T3 (es) 1994-06-16

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Legal Events

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8364 No opposition during term of opposition