DE69101621T2 - Verfahren zur elektrolytischen Regenerierung von ammoniakalischen Kupferätzbädern. - Google Patents

Verfahren zur elektrolytischen Regenerierung von ammoniakalischen Kupferätzbädern.

Info

Publication number
DE69101621T2
DE69101621T2 DE69101621T DE69101621T DE69101621T2 DE 69101621 T2 DE69101621 T2 DE 69101621T2 DE 69101621 T DE69101621 T DE 69101621T DE 69101621 T DE69101621 T DE 69101621T DE 69101621 T2 DE69101621 T2 DE 69101621T2
Authority
DE
Germany
Prior art keywords
copper etching
electrolytic regeneration
ammoniacal copper
etching baths
baths
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69101621T
Other languages
English (en)
Other versions
DE69101621D1 (de
Inventor
John L Cordani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MacDermid Inc
Original Assignee
MacDermid Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MacDermid Inc filed Critical MacDermid Inc
Publication of DE69101621D1 publication Critical patent/DE69101621D1/de
Application granted granted Critical
Publication of DE69101621T2 publication Critical patent/DE69101621T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25C—PROCESSES FOR THE ELECTROLYTIC PRODUCTION, RECOVERY OR REFINING OF METALS; APPARATUS THEREFOR
    • C25C1/00—Electrolytic production, recovery or refining of metals by electrolysis of solutions
    • C25C1/06—Electrolytic production, recovery or refining of metals by electrolysis of solutions or iron group metals, refractory metals or manganese
    • C25C1/08—Electrolytic production, recovery or refining of metals by electrolysis of solutions or iron group metals, refractory metals or manganese of nickel or cobalt
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/46—Regeneration of etching compositions
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25C—PROCESSES FOR THE ELECTROLYTIC PRODUCTION, RECOVERY OR REFINING OF METALS; APPARATUS THEREFOR
    • C25C1/00—Electrolytic production, recovery or refining of metals by electrolysis of solutions
    • C25C1/12—Electrolytic production, recovery or refining of metals by electrolysis of solutions of copper

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Electrolytic Production Of Metals (AREA)
  • ing And Chemical Polishing (AREA)
DE69101621T 1990-11-16 1991-11-10 Verfahren zur elektrolytischen Regenerierung von ammoniakalischen Kupferätzbädern. Expired - Fee Related DE69101621T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/614,929 US5248398A (en) 1990-11-16 1990-11-16 Process for direct electrolytic regeneration of chloride-based ammoniacal copper etchant bath

Publications (2)

Publication Number Publication Date
DE69101621D1 DE69101621D1 (de) 1994-05-11
DE69101621T2 true DE69101621T2 (de) 1994-09-01

Family

ID=24463302

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69101621T Expired - Fee Related DE69101621T2 (de) 1990-11-16 1991-11-10 Verfahren zur elektrolytischen Regenerierung von ammoniakalischen Kupferätzbädern.

Country Status (7)

Country Link
US (1) US5248398A (de)
EP (1) EP0486187B1 (de)
JP (1) JPH04314899A (de)
CA (1) CA2052933C (de)
DE (1) DE69101621T2 (de)
ES (1) ES2055546T3 (de)
NO (1) NO914463L (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0627503B1 (de) * 1993-05-03 1999-09-01 Ecochem Aktiengesellschaft Verfahren zur Elektrogewinnung von schweren Metallen
US5431776A (en) * 1993-09-08 1995-07-11 Phibro-Tech, Inc. Copper etchant solution additives
DE4438692C2 (de) * 1994-10-29 2003-05-28 Outokumpu Oy Verfahren zur elektrochemischen Gewinnung der Metalle Kupfer, Zink, Blei, Nickel oder Kobalt
US5560838A (en) * 1994-12-05 1996-10-01 Training `N` Technology, Inc. Process and apparatus for converting spent etchants
US6372081B1 (en) 1999-01-05 2002-04-16 International Business Machines Corporation Process to prevent copper contamination of semiconductor fabs
US6398939B1 (en) 2001-03-09 2002-06-04 Phelps Dodge Corporation Method and apparatus for controlling flow in an electrodeposition process
US20090240275A9 (en) * 2002-03-08 2009-09-24 Erblan Surgical Inc. Surgical actuator and locking system
US7470351B2 (en) * 2002-09-12 2008-12-30 Teck Cominco Metals Ltd. Discrete particle electrolyzer cathode and method of making same
US6863825B2 (en) 2003-01-29 2005-03-08 Union Oil Company Of California Process for removing arsenic from aqueous streams
JP4761143B2 (ja) * 2006-03-31 2011-08-31 独立行政法人産業技術総合研究所 銅の析出回収方法及びその装置
US8066874B2 (en) 2006-12-28 2011-11-29 Molycorp Minerals, Llc Apparatus for treating a flow of an aqueous solution containing arsenic
US8349764B2 (en) 2007-10-31 2013-01-08 Molycorp Minerals, Llc Composition for treating a fluid
US8252087B2 (en) 2007-10-31 2012-08-28 Molycorp Minerals, Llc Process and apparatus for treating a gas containing a contaminant
PE20121145A1 (es) * 2009-04-09 2012-08-30 Molycorp Minerals Llc Proceso para la remocion de uno o mas contaminantes de una solucion de electro-refinacion utilizando metales de tierras raras
US9233863B2 (en) 2011-04-13 2016-01-12 Molycorp Minerals, Llc Rare earth removal of hydrated and hydroxyl species
CN106457073A (zh) 2014-03-07 2017-02-22 安全自然资源有限公司 具有杰出的砷去除性质的氧化铈(iv)
CN104959378B (zh) * 2015-07-27 2017-09-29 福建师范大学 一种可去除土壤中重金属阳离子的双极膜电解槽
CN104959377B (zh) * 2015-07-27 2017-11-07 福建师范大学 一种应用双极膜技术去除土壤中铬的电解槽
CN106906489B (zh) * 2015-12-22 2019-06-18 深圳市洁驰科技有限公司 酸性蚀刻液循环再生的电解槽装置、系统及应用

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3979275A (en) * 1974-02-25 1976-09-07 Kennecott Copper Corporation Apparatus for series electrowinning and electrorefining of metal
US3875041A (en) * 1974-02-25 1975-04-01 Kennecott Copper Corp Apparatus for the electrolytic recovery of metal employing improved electrolyte convection
GB1497542A (en) * 1974-05-30 1978-01-12 Parel Sa Electrochemical apparatus
US4033839A (en) * 1975-02-26 1977-07-05 Kennecott Copper Corporation Method for series electrowinning and electrorefining of metals
US4146438A (en) * 1976-03-31 1979-03-27 Diamond Shamrock Technologies S.A. Sintered electrodes with electrocatalytic coating
US4033838A (en) * 1976-05-19 1977-07-05 Kawecki Berylco Industries, Inc. Recovery of copper from waste nitrate liquors by electrolysis
US4154661A (en) * 1978-05-26 1979-05-15 Aluminum Company Of America Lowermost bipolar spacing for electrolytic cell
US4207153A (en) * 1979-02-16 1980-06-10 Kennecott Copper Corporation Electrorefining cell with bipolar electrode and electrorefining method
JPS5629686A (en) * 1979-08-17 1981-03-25 Kazuo Ogawa Electrolytic cathode plate for copper recovery
GB2133806B (en) * 1983-01-20 1986-06-04 Electricity Council Regenerating solutions for etching copper
DE3376853D1 (en) * 1983-04-13 1988-07-07 Kernforschungsanlage Juelich Apparatus for regenerating an ammoniacal etching solution
DE3324450A1 (de) * 1983-07-07 1985-01-17 ELO-CHEM Ätztechnik GmbH, 7758 Meersburg Ammoniumsulfathaltige aetzloesung sowie verfahren zur regeneration der aetzloesung
DE3340342A1 (de) * 1983-11-08 1985-05-15 ELO-CHEM Ätztechnik GmbH, 7758 Meersburg Verfahren und anlage zum regenerieren einer ammoniakalischen aetzloesung
US4490224A (en) * 1984-04-16 1984-12-25 Lancy International, Inc. Process for reconditioning a used ammoniacal copper etching solution containing copper solute
DE3539886A1 (de) * 1985-11-11 1987-05-14 Hoellmueller Maschbau H Verfahren und vorrichtung zum aetzen eines zumindest teilweise aus metall, vorzugsweise kupfer, bestehenden aetzguts
IT1203794B (it) * 1986-06-06 1989-02-23 Rinetto Collini Elettrodeposizione del rame,o altri metalli,su elettrodi di piombo bipolari
JPS62297476A (ja) * 1986-06-17 1987-12-24 Nec Corp 塩化銅エツチング廃液の再生方法及び再生装置
JPS6372893A (ja) * 1986-09-12 1988-04-02 Toagosei Chem Ind Co Ltd 金属銅回収用陰極並びに塩酸及び塩化銅を含有する溶液から金属銅を回収する方法
US4784785A (en) * 1987-12-29 1988-11-15 Macdermid, Incorporated Copper etchant compositions
EP0393270A1 (de) * 1989-04-21 1990-10-24 Ming-Hsing Lee Ätzverfahren für Kupfer mit ammoniakalischen Ätzlösungen und Verfahren zur Auffrischung der verbrauchten Lösung
US5085730A (en) * 1990-11-16 1992-02-04 Macdermid, Incorporated Process for regenerating ammoniacal chloride etchants

Also Published As

Publication number Publication date
CA2052933A1 (en) 1992-05-17
EP0486187A2 (de) 1992-05-20
EP0486187A3 (en) 1992-08-19
CA2052933C (en) 2000-05-09
DE69101621D1 (de) 1994-05-11
JPH04314899A (ja) 1992-11-06
EP0486187B1 (de) 1994-04-06
NO914463D0 (no) 1991-11-14
US5248398A (en) 1993-09-28
NO914463L (no) 1992-05-18
ES2055546T3 (es) 1994-08-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee