DE69321686D1 - Verfahren zur Feststellung von Bestandteilen in Plattierungsbädern - Google Patents

Verfahren zur Feststellung von Bestandteilen in Plattierungsbädern

Info

Publication number
DE69321686D1
DE69321686D1 DE69321686T DE69321686T DE69321686D1 DE 69321686 D1 DE69321686 D1 DE 69321686D1 DE 69321686 T DE69321686 T DE 69321686T DE 69321686 T DE69321686 T DE 69321686T DE 69321686 D1 DE69321686 D1 DE 69321686D1
Authority
DE
Germany
Prior art keywords
detection
components
plating baths
baths
plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69321686T
Other languages
English (en)
Other versions
DE69321686T2 (de
Inventor
Frank A Ludwig
Bruce M Eliash
Nguyet H Phan
Vilambi Nrk Reddy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Technic Inc
Original Assignee
Technic Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technic Inc filed Critical Technic Inc
Application granted granted Critical
Publication of DE69321686D1 publication Critical patent/DE69321686D1/de
Publication of DE69321686T2 publication Critical patent/DE69321686T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems
    • G01N27/49—Systems involving the determination of the current at a single specific value, or small range of values, of applied voltage for producing selective measurement of one or more particular ionic species

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
DE69321686T 1992-11-17 1993-11-16 Verfahren zur Feststellung von Bestandteilen in Plattierungsbädern Expired - Fee Related DE69321686T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/977,344 US5320724A (en) 1992-11-17 1992-11-17 Method of monitoring constituents in plating baths

Publications (2)

Publication Number Publication Date
DE69321686D1 true DE69321686D1 (de) 1998-11-26
DE69321686T2 DE69321686T2 (de) 1999-06-17

Family

ID=25525054

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69321686T Expired - Fee Related DE69321686T2 (de) 1992-11-17 1993-11-16 Verfahren zur Feststellung von Bestandteilen in Plattierungsbädern

Country Status (4)

Country Link
US (1) US5320724A (de)
EP (1) EP0598380B1 (de)
JP (1) JP2922766B2 (de)
DE (1) DE69321686T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5755954A (en) * 1996-01-17 1998-05-26 Technic, Inc. Method of monitoring constituents in electroless plating baths
US5753101A (en) * 1996-08-01 1998-05-19 Ludwig; Frank A. Method of monitoring constituents in conversion coating baths
US20030127334A1 (en) * 2002-01-08 2003-07-10 Applied Materials, Inc. Method for determining a concentration of conductive species in an aqueous system
US6709568B2 (en) * 2002-06-13 2004-03-23 Advanced Technology Materials, Inc. Method for determining concentrations of additives in acid copper electrochemical deposition baths
US7205153B2 (en) 2003-04-11 2007-04-17 Applied Materials, Inc. Analytical reagent for acid copper sulfate solutions
US20050067304A1 (en) * 2003-09-26 2005-03-31 King Mackenzie E. Electrode assembly for analysis of metal electroplating solution, comprising self-cleaning mechanism, plating optimization mechanism, and/or voltage limiting mechanism
US20050236280A1 (en) * 2004-04-27 2005-10-27 Jianwen Han Methods for analyzing inorganic components of an electrolytic solution, and /or cleaning an electrochemical analytical cell
US7851222B2 (en) * 2005-07-26 2010-12-14 Applied Materials, Inc. System and methods for measuring chemical concentrations of a plating solution
US8142640B2 (en) * 2007-09-06 2012-03-27 Eci Technology, Inc. Chloride analysis in acid copper plating baths
ATE546730T1 (de) * 2008-11-26 2012-03-15 Atotech Deutschland Gmbh Verfahren zur kontrolle von stabilisatoradditiven in elektrolyten zur chemischen metall- und metalllegierungsabscheidung
JP7012301B2 (ja) * 2017-09-12 2022-02-14 株式会社八光電機 薬物検出システム

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4132605A (en) * 1976-12-27 1979-01-02 Rockwell International Corporation Method for evaluating the quality of electroplating baths
CH659327A5 (en) * 1982-11-23 1987-01-15 Inst Elektrokhimii Akademii Na Method and apparatus for determining the organic carbon content of water or of an aqueous solution
US4631116A (en) * 1985-06-05 1986-12-23 Hughes Aircraft Company Method of monitoring trace constituents in plating baths
US4917774A (en) * 1986-04-24 1990-04-17 Shipley Company Inc. Method for analyzing additive concentration

Also Published As

Publication number Publication date
EP0598380A3 (en) 1995-10-11
JPH06213867A (ja) 1994-08-05
DE69321686T2 (de) 1999-06-17
EP0598380A2 (de) 1994-05-25
JP2922766B2 (ja) 1999-07-26
EP0598380B1 (de) 1998-10-21
US5320724A (en) 1994-06-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee