DE69420298D1 - Verfahren zur Überwachung von wesentlichen Bestandteilen in Plattierungsbädern - Google Patents

Verfahren zur Überwachung von wesentlichen Bestandteilen in Plattierungsbädern

Info

Publication number
DE69420298D1
DE69420298D1 DE69420298T DE69420298T DE69420298D1 DE 69420298 D1 DE69420298 D1 DE 69420298D1 DE 69420298 T DE69420298 T DE 69420298T DE 69420298 T DE69420298 T DE 69420298T DE 69420298 D1 DE69420298 D1 DE 69420298D1
Authority
DE
Germany
Prior art keywords
essential components
plating baths
monitoring essential
monitoring
baths
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69420298T
Other languages
English (en)
Other versions
DE69420298T2 (de
Inventor
Nguyet H Phan
Vilambi Nrk Reddy
Frank A Ludwig
Bruce M Eliash
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Technic Inc
Original Assignee
Technic Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technic Inc filed Critical Technic Inc
Publication of DE69420298D1 publication Critical patent/DE69420298D1/de
Application granted granted Critical
Publication of DE69420298T2 publication Critical patent/DE69420298T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems
    • G01N27/49—Systems involving the determination of the current at a single specific value, or small range of values, of applied voltage for producing selective measurement of one or more particular ionic species
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems
    • G01N27/48—Systems using polarography, i.e. measuring changes in current under a slowly-varying voltage

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
DE69420298T 1993-03-25 1994-03-18 Verfahren zur Überwachung von wesentlichen Bestandteilen in Plattierungsbädern Expired - Fee Related DE69420298T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/037,158 US5336380A (en) 1993-03-25 1993-03-25 Method of monitoring major constituents in plating baths

Publications (2)

Publication Number Publication Date
DE69420298D1 true DE69420298D1 (de) 1999-10-07
DE69420298T2 DE69420298T2 (de) 2000-05-11

Family

ID=21892759

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69420298T Expired - Fee Related DE69420298T2 (de) 1993-03-25 1994-03-18 Verfahren zur Überwachung von wesentlichen Bestandteilen in Plattierungsbädern

Country Status (4)

Country Link
US (1) US5336380A (de)
EP (1) EP0617280B1 (de)
JP (1) JP2878588B2 (de)
DE (1) DE69420298T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5631845A (en) * 1995-10-10 1997-05-20 Ford Motor Company Method and system for controlling phosphate bath constituents
US5755954A (en) * 1996-01-17 1998-05-26 Technic, Inc. Method of monitoring constituents in electroless plating baths
US5753101A (en) * 1996-08-01 1998-05-19 Ludwig; Frank A. Method of monitoring constituents in conversion coating baths
US20030127334A1 (en) * 2002-01-08 2003-07-10 Applied Materials, Inc. Method for determining a concentration of conductive species in an aqueous system
JP2005534012A (ja) * 2002-07-19 2005-11-10 テクニツク・インコーポレーテツド 工業電解液をリアルタイムモニターする方法と装置
US20050236280A1 (en) * 2004-04-27 2005-10-27 Jianwen Han Methods for analyzing inorganic components of an electrolytic solution, and /or cleaning an electrochemical analytical cell
US7951600B2 (en) 2008-11-07 2011-05-31 Xtalic Corporation Electrodeposition baths, systems and methods
US8992691B2 (en) 2011-04-05 2015-03-31 International Business Machines Corporation Partial solution replacement in recyclable persulfuric acid cleaning systems
US20150345039A1 (en) * 2015-07-20 2015-12-03 National Institute Of Standards And Technology Composition having alkaline ph and process for forming superconformation therewith
US11579344B2 (en) 2012-09-17 2023-02-14 Government Of The United States Of America, As Represented By The Secretary Of Commerce Metallic grating

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4631116A (en) * 1985-06-05 1986-12-23 Hughes Aircraft Company Method of monitoring trace constituents in plating baths

Also Published As

Publication number Publication date
JPH0772120A (ja) 1995-03-17
US5336380A (en) 1994-08-09
EP0617280A3 (de) 1996-03-13
EP0617280B1 (de) 1999-09-01
JP2878588B2 (ja) 1999-04-05
DE69420298T2 (de) 2000-05-11
EP0617280A2 (de) 1994-09-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee