DE69033602T2 - Verfahren zur Herstellung von Isolationsstrukturen mit variabler Breite - Google Patents
Verfahren zur Herstellung von Isolationsstrukturen mit variabler BreiteInfo
- Publication number
- DE69033602T2 DE69033602T2 DE69033602T DE69033602T DE69033602T2 DE 69033602 T2 DE69033602 T2 DE 69033602T2 DE 69033602 T DE69033602 T DE 69033602T DE 69033602 T DE69033602 T DE 69033602T DE 69033602 T2 DE69033602 T2 DE 69033602T2
- Authority
- DE
- Germany
- Prior art keywords
- production
- isolation structures
- variable width
- variable
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000002955 isolation Methods 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/763—Polycrystalline semiconductor regions
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/374,960 US5017999A (en) | 1989-06-30 | 1989-06-30 | Method for forming variable width isolation structures |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69033602D1 DE69033602D1 (de) | 2000-09-14 |
DE69033602T2 true DE69033602T2 (de) | 2001-04-12 |
Family
ID=23478918
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69033602T Expired - Fee Related DE69033602T2 (de) | 1989-06-30 | 1990-06-26 | Verfahren zur Herstellung von Isolationsstrukturen mit variabler Breite |
Country Status (5)
Country | Link |
---|---|
US (1) | US5017999A (de) |
EP (1) | EP0405923B1 (de) |
JP (1) | JP2775194B2 (de) |
CA (1) | CA2015891C (de) |
DE (1) | DE69033602T2 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5223736A (en) * | 1989-09-27 | 1993-06-29 | Texas Instruments Incorporated | Trench isolation process with reduced topography |
JP3144817B2 (ja) * | 1990-03-23 | 2001-03-12 | 株式会社東芝 | 半導体装置 |
JP2551203B2 (ja) * | 1990-06-05 | 1996-11-06 | 三菱電機株式会社 | 半導体装置 |
US5382541A (en) * | 1992-08-26 | 1995-01-17 | Harris Corporation | Method for forming recessed oxide isolation containing deep and shallow trenches |
EP0635884A1 (de) * | 1993-07-13 | 1995-01-25 | Siemens Aktiengesellschaft | Verfahren zur Herstellung eines Grabens in einem Substrat und dessen Verwendung in der Smart-Power-Technologie |
US5366925A (en) * | 1993-09-27 | 1994-11-22 | United Microelectronics Corporation | Local oxidation of silicon by using aluminum spiking technology |
US5372968A (en) * | 1993-09-27 | 1994-12-13 | United Microelectronics Corporation | Planarized local oxidation by trench-around technology |
US5294562A (en) * | 1993-09-27 | 1994-03-15 | United Microelectronics Corporation | Trench isolation with global planarization using flood exposure |
US5308786A (en) * | 1993-09-27 | 1994-05-03 | United Microelectronics Corporation | Trench isolation for both large and small areas by means of silicon nodules after metal etching |
US5672242A (en) * | 1996-01-31 | 1997-09-30 | Integrated Device Technology, Inc. | High selectivity nitride to oxide etch process |
KR100242466B1 (ko) * | 1996-06-27 | 2000-02-01 | 김영환 | 채널스탑이온주입에 따른 좁은폭효과 방지를 위한 소자분리 구조를 갖는 반도체장치 및 그 제조방법 |
EP1641045A3 (de) | 2002-11-12 | 2006-06-07 | Micron Technology, Inc. | Geerdete Gateelektrode und Isolationstechniken für reduzierte Dunkelströme im CMOS-Bildsensoren |
KR200405882Y1 (ko) * | 2005-10-21 | 2006-01-11 | 김대영 | 핸드폰 보호 필름 구조 |
US8642419B2 (en) | 2012-02-20 | 2014-02-04 | Globalfoundries Inc. | Methods of forming isolation structures for semiconductor devices |
US9330959B2 (en) * | 2014-04-13 | 2016-05-03 | Texas Instruments Incorporated | Isolated semiconductor layer in bulk wafer by localized silicon epitaxial seed formation |
US11387319B2 (en) | 2019-09-11 | 2022-07-12 | International Business Machines Corporation | Nanosheet transistor device with bottom isolation |
Family Cites Families (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4139401A (en) * | 1963-12-04 | 1979-02-13 | Rockwell International Corporation | Method of producing electrically isolated semiconductor devices on common crystalline substrate |
US3717514A (en) * | 1970-10-06 | 1973-02-20 | Motorola Inc | Single crystal silicon contact for integrated circuits and method for making same |
US4470062A (en) * | 1979-08-31 | 1984-09-04 | Hitachi, Ltd. | Semiconductor device having isolation regions |
US4487639A (en) * | 1980-09-26 | 1984-12-11 | Texas Instruments Incorporated | Localized epitaxy for VLSI devices |
EP0075589B1 (de) * | 1981-03-27 | 1987-01-14 | Western Electric Company, Incorporated | Gate-gesteuerter diodeschalter |
US4508579A (en) * | 1981-03-30 | 1985-04-02 | International Business Machines Corporation | Lateral device structures using self-aligned fabrication techniques |
US4454646A (en) * | 1981-08-27 | 1984-06-19 | International Business Machines Corporation | Isolation for high density integrated circuits |
US4412868A (en) * | 1981-12-23 | 1983-11-01 | General Electric Company | Method of making integrated circuits utilizing ion implantation and selective epitaxial growth |
US4502913A (en) * | 1982-06-30 | 1985-03-05 | International Business Machines Corporation | Total dielectric isolation for integrated circuits |
US4473598A (en) * | 1982-06-30 | 1984-09-25 | International Business Machines Corporation | Method of filling trenches with silicon and structures |
US4400411A (en) * | 1982-07-19 | 1983-08-23 | The United States Of America As Represented By The Secretary Of The Air Force | Technique of silicon epitaxial refill |
JPS5939711A (ja) * | 1982-08-26 | 1984-03-05 | Ushio Inc | ウエハ−上のアモルファスシリコンもしくは多結晶シリコンをエピタキシアル成長させる方法 |
US4507158A (en) * | 1983-08-12 | 1985-03-26 | Hewlett-Packard Co. | Trench isolated transistors in semiconductor films |
KR900001267B1 (ko) * | 1983-11-30 | 1990-03-05 | 후지쓰 가부시끼가이샤 | Soi형 반도체 장치의 제조방법 |
JPS60136361A (ja) * | 1983-12-26 | 1985-07-19 | Hitachi Ltd | 半導体装置 |
US4547793A (en) * | 1983-12-27 | 1985-10-15 | International Business Machines Corporation | Trench-defined semiconductor structure |
US4688069A (en) * | 1984-03-22 | 1987-08-18 | International Business Machines Corporation | Isolation for high density integrated circuits |
JPS60207363A (ja) * | 1984-03-31 | 1985-10-18 | Toshiba Corp | 半導体装置 |
JPS60244036A (ja) * | 1984-05-18 | 1985-12-03 | Hitachi Ltd | 半導体装置とその製造方法 |
FR2566179B1 (fr) * | 1984-06-14 | 1986-08-22 | Commissariat Energie Atomique | Procede d'autopositionnement d'un oxyde de champ localise par rapport a une tranchee d'isolement |
US4680614A (en) * | 1984-06-25 | 1987-07-14 | Beyer Klaus D | Planar void free isolation structure |
US4526631A (en) * | 1984-06-25 | 1985-07-02 | International Business Machines Corporation | Method for forming a void free isolation pattern utilizing etch and refill techniques |
US4689656A (en) * | 1984-06-25 | 1987-08-25 | International Business Machines Corporation | Method for forming a void free isolation pattern and resulting structure |
US4528047A (en) * | 1984-06-25 | 1985-07-09 | International Business Machines Corporation | Method for forming a void free isolation structure utilizing etch and refill techniques |
US4551394A (en) * | 1984-11-26 | 1985-11-05 | Honeywell Inc. | Integrated three-dimensional localized epitaxial growth of Si with localized overgrowth of GaAs |
US4592792A (en) * | 1985-01-23 | 1986-06-03 | Rca Corporation | Method for forming uniformly thick selective epitaxial silicon |
JPS61230333A (ja) * | 1985-04-05 | 1986-10-14 | Nec Corp | 集積回路 |
JPS61263067A (ja) * | 1985-05-15 | 1986-11-21 | Kobe Steel Ltd | 内部リフオ−ミング式燃料電池のための複合化構成要素 |
JPS6365641A (ja) * | 1986-09-05 | 1988-03-24 | Nec Corp | 半導体集積回路 |
US4819052A (en) * | 1986-12-22 | 1989-04-04 | Texas Instruments Incorporated | Merged bipolar/CMOS technology using electrically active trench |
JPS6432672A (en) * | 1987-07-29 | 1989-02-02 | Hitachi Ltd | Semiconductor device |
US4791073A (en) * | 1987-11-17 | 1988-12-13 | Motorola Inc. | Trench isolation method for semiconductor devices |
US4908328A (en) * | 1989-06-06 | 1990-03-13 | National Semiconductor Corporation | High voltage power IC process |
-
1989
- 1989-06-30 US US07/374,960 patent/US5017999A/en not_active Expired - Lifetime
-
1990
- 1990-05-02 CA CA002015891A patent/CA2015891C/en not_active Expired - Lifetime
- 1990-06-26 DE DE69033602T patent/DE69033602T2/de not_active Expired - Fee Related
- 1990-06-26 JP JP2165829A patent/JP2775194B2/ja not_active Expired - Lifetime
- 1990-06-26 EP EP90306993A patent/EP0405923B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CA2015891A1 (en) | 1990-12-31 |
JPH0338857A (ja) | 1991-02-19 |
EP0405923A3 (en) | 1992-09-30 |
CA2015891C (en) | 2000-06-06 |
EP0405923B1 (de) | 2000-08-09 |
DE69033602D1 (de) | 2000-09-14 |
JP2775194B2 (ja) | 1998-07-16 |
EP0405923A2 (de) | 1991-01-02 |
US5017999A (en) | 1991-05-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |