DE69033302D1 - Abstandshalter zur Halterung eines Heizelementes in einem elektrischen Ofen - Google Patents
Abstandshalter zur Halterung eines Heizelementes in einem elektrischen OfenInfo
- Publication number
- DE69033302D1 DE69033302D1 DE69033302T DE69033302T DE69033302D1 DE 69033302 D1 DE69033302 D1 DE 69033302D1 DE 69033302 T DE69033302 T DE 69033302T DE 69033302 T DE69033302 T DE 69033302T DE 69033302 D1 DE69033302 D1 DE 69033302D1
- Authority
- DE
- Germany
- Prior art keywords
- spacers
- holding
- heating element
- electric oven
- oven
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/06—Crucible or pot furnaces heated electrically, e.g. induction crucible furnaces with or without any other source of heat
- F27B14/061—Induction furnaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/0003—Linings or walls
- F27D1/0006—Linings or walls formed from bricks or layers with a particular composition or specific characteristics
- F27D1/0009—Comprising ceramic fibre elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/0003—Linings or walls
- F27D1/0036—Linings or walls comprising means for supporting electric resistances in the furnace
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D11/00—Arrangement of elements for electric heating in or on furnaces
- F27D11/02—Ohmic resistance heating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/62—Heating elements specially adapted for furnaces
- H05B3/66—Supports or mountings for heaters on or in the wall or roof
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/08—Details peculiar to crucible or pot furnaces
- F27B2014/0862—Flux guides
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Resistance Heating (AREA)
- Furnace Details (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/475,741 US5038019A (en) | 1990-02-06 | 1990-02-06 | High temperature diffusion furnace |
US475741 | 1990-02-06 |
Publications (3)
Publication Number | Publication Date |
---|---|
DE69033302D1 true DE69033302D1 (de) | 1999-10-28 |
DE69033302T2 DE69033302T2 (de) | 2000-03-02 |
DE69033302T3 DE69033302T3 (de) | 2004-10-14 |
Family
ID=23888915
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69033302T Expired - Lifetime DE69033302T3 (de) | 1990-02-06 | 1990-12-20 | Abstandshalter zur Halterung eines Heizelementes in einem elektrischen Ofen |
DE69025955T Expired - Lifetime DE69025955T3 (de) | 1990-02-06 | 1990-12-20 | Hochtemperatur-diffusionsofen |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69025955T Expired - Lifetime DE69025955T3 (de) | 1990-02-06 | 1990-12-20 | Hochtemperatur-diffusionsofen |
Country Status (5)
Country | Link |
---|---|
US (2) | US5038019A (de) |
EP (2) | EP0514407B2 (de) |
JP (1) | JP3104992B2 (de) |
DE (2) | DE69033302T3 (de) |
WO (1) | WO1991012477A1 (de) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH079036Y2 (ja) * | 1990-11-13 | 1995-03-06 | 東京エレクトロン東北株式会社 | 縦型熱処理炉 |
JPH0739908B2 (ja) * | 1991-02-28 | 1995-05-01 | ニチアス株式会社 | 加熱装置 |
JP3174379B2 (ja) * | 1992-02-03 | 2001-06-11 | 東京エレクトロン株式会社 | 加熱装置 |
US5592581A (en) * | 1993-07-19 | 1997-01-07 | Tokyo Electron Kabushiki Kaisha | Heat treatment apparatus |
DE4330954A1 (de) * | 1993-09-09 | 1995-03-16 | Reetz Teja Prof Dr Rer Nat Hab | Rohrofen für hohe Temperaturen |
US5506389A (en) * | 1993-11-10 | 1996-04-09 | Tokyo Electron Kabushiki Kaisha | Thermal processing furnace and fabrication method thereof |
US5536919A (en) * | 1994-11-22 | 1996-07-16 | Taheri; Ramtin | Heating chamber |
US6005225A (en) * | 1997-03-28 | 1999-12-21 | Silicon Valley Group, Inc. | Thermal processing apparatus |
DE19746872C2 (de) * | 1997-10-23 | 2001-09-27 | Heraeus Quarzglas | Heizelement und unter seiner Verwendung hergestellter Ofen |
US6059567A (en) * | 1998-02-10 | 2000-05-09 | Silicon Valley Group, Inc. | Semiconductor thermal processor with recirculating heater exhaust cooling system |
US6512206B1 (en) * | 2002-01-02 | 2003-01-28 | Mrl Industries | Continuous process furnace |
AU2002238956A1 (en) * | 2002-03-19 | 2003-09-29 | Koyo Thermo Systems Co., Ltd. | Electric heater for thermal treatment furnace |
KR20040003434A (ko) * | 2002-07-03 | 2004-01-13 | 조성호 | 전기로의 전열선용 애자 |
US6807220B1 (en) * | 2003-05-23 | 2004-10-19 | Mrl Industries | Retention mechanism for heating coil of high temperature diffusion furnace |
NL1028057C2 (nl) * | 2005-01-18 | 2006-07-19 | Tempress Systems | Inrichting voor het op zijn plaats houden van verhittingsdraden in een horizontale oven. |
US7335864B2 (en) * | 2005-06-01 | 2008-02-26 | Mrl Industries, Inc. | Magnetic field reduction resistive heating elements |
US7872009B2 (en) * | 2005-11-21 | 2011-01-18 | Amgen Inc. | Beta-Secretase modulators and methods of use |
US7745484B2 (en) * | 2005-11-21 | 2010-06-29 | Amgen Inc. | Beta-secretase modulators and methods of use |
JP4331768B2 (ja) * | 2007-02-28 | 2009-09-16 | 東京エレクトロン株式会社 | 熱処理炉及び縦型熱処理装置 |
SE530968C2 (sv) * | 2007-03-05 | 2008-11-04 | Sandvik Intellectual Property | Insats och värmeelement för elektriska ugnar |
CA2687608C (en) * | 2007-05-25 | 2013-07-02 | Amgen Inc. | Substituted hydroxyethyl amine compounds as beta-secretase modulators and methods of use |
JP5096182B2 (ja) * | 2008-01-31 | 2012-12-12 | 東京エレクトロン株式会社 | 熱処理炉 |
DE102008017784B4 (de) * | 2008-04-08 | 2014-04-17 | Ivoclar Vivadent Ag | Vorrichtung zum Anfertigen einer Muffel |
US8395096B2 (en) * | 2009-02-05 | 2013-03-12 | Sandvik Thermal Process, Inc. | Precision strip heating element |
JP5114449B2 (ja) * | 2009-03-31 | 2013-01-09 | 株式会社ハナガタ | ヒートトンネル用加熱装置 |
KR101844602B1 (ko) * | 2010-06-25 | 2018-04-02 | 샌드빅 써멀 프로세스. 인크. | 발열체 코일용 지지구조물과 스페이서 및 발열체 코일의 위치를 제어하는 방법 |
US20120168143A1 (en) * | 2010-12-30 | 2012-07-05 | Poole Ventura, Inc. | Thermal Diffusion Chamber With Heat Exchanger |
CN103620926B (zh) * | 2012-01-25 | 2016-09-28 | 新日铁住金株式会社 | 金属部件的退火方法 |
JP2015021598A (ja) * | 2013-07-23 | 2015-02-02 | 東京エレクトロン株式会社 | 断熱ユニット及びそれを備えた熱処理装置 |
CA2993657A1 (en) | 2015-07-30 | 2017-02-02 | Certainteed Corporation | System, method and apparatus for compressed insulation |
KR102403525B1 (ko) * | 2016-08-05 | 2022-05-27 | 샌드빅 써멀 프로세스. 인크. | 비-균일한 절연부를 갖는 열적 프로세스 디바이스 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1240584A (en) * | 1916-09-06 | 1917-09-18 | Hotpoint Electric Heating Company | Articulated metal shell for an electric hot-pad. |
US2097981A (en) * | 1934-09-03 | 1937-11-02 | Firm Deutsche Gold Und Silber | Immersion heater for salt baths |
US2398874A (en) * | 1940-02-14 | 1946-04-23 | Edmund A Steinbock | Electric furnace |
US3299196A (en) * | 1964-07-13 | 1967-01-17 | Electroglas Inc | Diffusion furnace |
US3361863A (en) * | 1965-04-12 | 1968-01-02 | Karl A. Lang | Furnace |
US3933200A (en) * | 1974-06-21 | 1976-01-20 | Emerson Electric Co. | Temperature conditioning means |
US4159415A (en) * | 1977-01-21 | 1979-06-26 | Klein Tools, Inc. | Electric slot furnace |
JPS583726B2 (ja) * | 1977-04-06 | 1983-01-22 | 株式会社クボタ | 汚泥の脱水装置 |
US4147888A (en) * | 1977-07-20 | 1979-04-03 | Seiki Sato | Electric heating element for electric resistance furnaces |
US4596922A (en) * | 1984-01-24 | 1986-06-24 | Thermtec | Heating element |
US4849608A (en) * | 1987-02-14 | 1989-07-18 | Dainippon Screen Mfg. Co., Ltd. | Apparatus for heat-treating wafers |
US4885454A (en) * | 1988-04-29 | 1989-12-05 | Centorr Associates, Inc. | High temperature furnace for oxidizing atmospheres |
-
1990
- 1990-02-06 US US07/475,741 patent/US5038019A/en not_active Expired - Lifetime
- 1990-12-20 DE DE69033302T patent/DE69033302T3/de not_active Expired - Lifetime
- 1990-12-20 WO PCT/US1990/007577 patent/WO1991012477A1/en active IP Right Grant
- 1990-12-20 EP EP91903081A patent/EP0514407B2/de not_active Expired - Lifetime
- 1990-12-20 EP EP95110767A patent/EP0683622B2/de not_active Expired - Lifetime
- 1990-12-20 DE DE69025955T patent/DE69025955T3/de not_active Expired - Lifetime
- 1990-12-20 JP JP03503298A patent/JP3104992B2/ja not_active Expired - Lifetime
-
1991
- 1991-04-19 US US07/687,991 patent/US5095192A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0514407B1 (de) | 1996-03-13 |
EP0514407A4 (en) | 1992-12-02 |
DE69025955T3 (de) | 2002-05-29 |
US5095192A (en) | 1992-03-10 |
EP0683622B2 (de) | 2004-03-17 |
EP0514407A1 (de) | 1992-11-25 |
US5038019A (en) | 1991-08-06 |
DE69025955D1 (de) | 1996-04-18 |
EP0683622A3 (de) | 1995-12-06 |
EP0683622A2 (de) | 1995-11-22 |
DE69033302T3 (de) | 2004-10-14 |
DE69025955T2 (de) | 1996-09-12 |
EP0514407B2 (de) | 2001-03-28 |
EP0683622B1 (de) | 1999-09-22 |
JPH05504227A (ja) | 1993-07-01 |
JP3104992B2 (ja) | 2000-10-30 |
DE69033302T2 (de) | 2000-03-02 |
WO1991012477A1 (en) | 1991-08-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent | ||
8366 | Restricted maintained after opposition proceedings |