DE69032066D1 - Umwandlung von organischen bzw. anorganischen gasen oder verdampfbaren verbindungen in inerte feststoffe - Google Patents

Umwandlung von organischen bzw. anorganischen gasen oder verdampfbaren verbindungen in inerte feststoffe

Info

Publication number
DE69032066D1
DE69032066D1 DE69032066T DE69032066T DE69032066D1 DE 69032066 D1 DE69032066 D1 DE 69032066D1 DE 69032066 T DE69032066 T DE 69032066T DE 69032066 T DE69032066 T DE 69032066T DE 69032066 D1 DE69032066 D1 DE 69032066D1
Authority
DE
Germany
Prior art keywords
chamber
conversion
elements
organic
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69032066T
Other languages
English (en)
Inventor
Charles Beatty
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TBX, INC., KEY BISCAYNE, FLA., US
Original Assignee
TBX Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TBX Inc filed Critical TBX Inc
Application granted granted Critical
Publication of DE69032066D1 publication Critical patent/DE69032066D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • A—HUMAN NECESSITIES
    • A62—LIFE-SAVING; FIRE-FIGHTING
    • A62D—CHEMICAL MEANS FOR EXTINGUISHING FIRES OR FOR COMBATING OR PROTECTING AGAINST HARMFUL CHEMICAL AGENTS; CHEMICAL MATERIALS FOR USE IN BREATHING APPARATUS
    • A62D3/00—Processes for making harmful chemical substances harmless or less harmful, by effecting a chemical change in the substances
    • A62D3/10—Processes for making harmful chemical substances harmless or less harmful, by effecting a chemical change in the substances by subjecting to electric or wave energy or particle or ionizing radiation
    • A62D3/19—Processes for making harmful chemical substances harmless or less harmful, by effecting a chemical change in the substances by subjecting to electric or wave energy or particle or ionizing radiation to plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/126—Microwaves
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10B—DESTRUCTIVE DISTILLATION OF CARBONACEOUS MATERIALS FOR PRODUCTION OF GAS, COKE, TAR, OR SIMILAR MATERIALS
    • C10B53/00—Destructive distillation, specially adapted for particular solid raw materials or solid raw materials in special form
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • A—HUMAN NECESSITIES
    • A62—LIFE-SAVING; FIRE-FIGHTING
    • A62D—CHEMICAL MEANS FOR EXTINGUISHING FIRES OR FOR COMBATING OR PROTECTING AGAINST HARMFUL CHEMICAL AGENTS; CHEMICAL MATERIALS FOR USE IN BREATHING APPARATUS
    • A62D2101/00—Harmful chemical substances made harmless, or less harmful, by effecting chemical change
    • A62D2101/20—Organic substances
    • A—HUMAN NECESSITIES
    • A62—LIFE-SAVING; FIRE-FIGHTING
    • A62D—CHEMICAL MEANS FOR EXTINGUISHING FIRES OR FOR COMBATING OR PROTECTING AGAINST HARMFUL CHEMICAL AGENTS; CHEMICAL MATERIALS FOR USE IN BREATHING APPARATUS
    • A62D2101/00—Harmful chemical substances made harmless, or less harmful, by effecting chemical change
    • A62D2101/20—Organic substances
    • A62D2101/22—Organic substances containing halogen
    • A—HUMAN NECESSITIES
    • A62—LIFE-SAVING; FIRE-FIGHTING
    • A62D—CHEMICAL MEANS FOR EXTINGUISHING FIRES OR FOR COMBATING OR PROTECTING AGAINST HARMFUL CHEMICAL AGENTS; CHEMICAL MATERIALS FOR USE IN BREATHING APPARATUS
    • A62D2101/00—Harmful chemical substances made harmless, or less harmful, by effecting chemical change
    • A62D2101/20—Organic substances
    • A62D2101/24—Organic substances containing heavy metals
    • A—HUMAN NECESSITIES
    • A62—LIFE-SAVING; FIRE-FIGHTING
    • A62D—CHEMICAL MEANS FOR EXTINGUISHING FIRES OR FOR COMBATING OR PROTECTING AGAINST HARMFUL CHEMICAL AGENTS; CHEMICAL MATERIALS FOR USE IN BREATHING APPARATUS
    • A62D2203/00—Aspects of processes for making harmful chemical substances harmless, or less harmful, by effecting chemical change in the substances
    • A62D2203/10—Apparatus specially adapted for treating harmful chemical agents; Details thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894—Processes carried out in the presence of a plasma

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Preparation Of Compounds By Using Micro-Organisms (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Drying Of Gases (AREA)
DE69032066T 1989-09-15 1990-09-12 Umwandlung von organischen bzw. anorganischen gasen oder verdampfbaren verbindungen in inerte feststoffe Expired - Lifetime DE69032066D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/407,868 US5028452A (en) 1989-09-15 1989-09-15 Closed loop system and process for conversion of gaseous or vaporizable organic and/or organo-metallic compounds to inert solid matrix resistant to solvent extraction
PCT/US1990/005146 WO1991004104A1 (en) 1989-09-15 1990-09-12 Converting organic/organometallic gaseous or vaporizable compounds to inert solids

Publications (1)

Publication Number Publication Date
DE69032066D1 true DE69032066D1 (de) 1998-04-02

Family

ID=23613870

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69032066T Expired - Lifetime DE69032066D1 (de) 1989-09-15 1990-09-12 Umwandlung von organischen bzw. anorganischen gasen oder verdampfbaren verbindungen in inerte feststoffe

Country Status (8)

Country Link
US (1) US5028452A (de)
EP (1) EP0448660B1 (de)
JP (1) JPH04502882A (de)
CN (1) CN1029296C (de)
AT (1) ATE163367T1 (de)
CA (1) CA2040436A1 (de)
DE (1) DE69032066D1 (de)
WO (1) WO1991004104A1 (de)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5288969A (en) * 1991-08-16 1994-02-22 Regents Of The University Of California Electrodeless plasma torch apparatus and methods for the dissociation of hazardous waste
DE4205161A1 (de) * 1992-01-28 1993-07-29 Conrad Siegfried Dr Verfahren zur entsorgung, insbesondere zur verwertung von abfallstoffen
US5366764A (en) * 1992-06-15 1994-11-22 Sunthankar Mandar B Environmentally safe methods and apparatus for depositing and/or reclaiming a metal or semi-conductor material using sublimation
DE4327958C1 (de) * 1993-08-19 1994-11-17 Ppv Verwaltungs Ag Verfahren und Vorrichtung zum Recyceln von Kunststoff und/oder organisches Material enthaltendem Abfall
DE4428418C2 (de) * 1994-08-11 1997-03-06 Buck Chem Tech Werke Verfahren und Vorrichtung zum Inertisieren toxischer Gase oder toxischer vergasbarer Stoffe
US5874014A (en) * 1995-06-07 1999-02-23 Berkeley Scholars, Inc. Durable plasma treatment apparatus and method
FI101681B (fi) * 1996-01-23 1998-08-14 Valtion Teknillinen Menetelmä radioaktiivisen ongelmajätteen käsittelemiseksi
US5997825A (en) * 1996-10-17 1999-12-07 Carrier Corporation Refrigerant disposal
DE19722649A1 (de) * 1997-05-30 1998-12-03 Buck Chem Tech Werke Mobiles modulares Entsorgungssystem
DE19738038A1 (de) * 1997-08-30 1999-03-04 Nukem Gmbh Verfahren und Vorrichtung zur Entfernung von Schadstoffen aus einem Abluftstrom
US6153852A (en) * 1999-02-12 2000-11-28 Thermal Conversion Corp Use of a chemically reactive plasma for thermal-chemical processes
WO2000061283A1 (fr) * 1999-04-09 2000-10-19 Mitsubishi Heavy Industries, Ltd. Dispositif de decomposition de compose halogene organique et dispositif de chauffage de fluide
EP1093849A4 (de) 1999-04-12 2003-06-18 Mitsubishi Heavy Ind Ltd Verfahren zur zersetzung von organischen halogenierten verbindungen und dafür verwendete vorrichtung
US6614000B1 (en) 1999-04-12 2003-09-02 Mitsubishi Heavy Industries, Ltd. Organic halogen compound decomposing device and operation control method therefor, and organic halogen compound decomposing method
JP2000296313A (ja) * 1999-04-12 2000-10-24 Mitsubishi Heavy Ind Ltd 有機ハロゲン化合物の分解装置
US6552295B2 (en) 1999-12-20 2003-04-22 Research Triangle Institute Plasma furnace disposal of hazardous wastes
US6930041B2 (en) * 2000-12-07 2005-08-16 Micron Technology, Inc. Photo-assisted method for semiconductor fabrication
US20040255862A1 (en) * 2001-02-26 2004-12-23 Lee Chung J. Reactor for producing reactive intermediates for low dielectric constant polymer thin films
RU2200058C1 (ru) * 2002-02-12 2003-03-10 Открытое акционерное общество "ТВЭЛ" Способ проведения гомогенных и гетерогенных химических реакций с использованием плазмы
US7026570B2 (en) * 2002-03-28 2006-04-11 Aerospace Consulting Corporation Spain, S.L. Transportable, self-controlled plasma neutralization of highly toxic bio-chemical waste and method therefore
US6784620B1 (en) * 2003-03-10 2004-08-31 Lockheed Martin Corporation Plasma filter
US20050148199A1 (en) * 2003-12-31 2005-07-07 Frank Jansen Apparatus for atomic layer deposition
NZ537176A (en) * 2004-12-13 2006-01-27 Rajeev Prasad Gupta Apparatus to generate energy using microwave
JP2008279754A (ja) * 2007-04-09 2008-11-20 Dainippon Screen Mfg Co Ltd 印刷機
JP4955027B2 (ja) * 2009-04-02 2012-06-20 クリーン・テクノロジー株式会社 排ガス処理装置における磁場によるプラズマの制御方法
US20110053204A1 (en) * 2009-09-01 2011-03-03 EcoSphere Energy, LLC. Use of an adaptive chemically reactive plasma for production of microbial derived materials
CN102000691B (zh) * 2010-09-28 2013-07-10 徐州浩通新材料科技股份有限公司 一种含有机质废弃物的两级等离子体气化熔融裂解方法及其装置
US20160042916A1 (en) * 2014-08-06 2016-02-11 Applied Materials, Inc. Post-chamber abatement using upstream plasma sources
EP3544726A4 (de) * 2016-11-22 2020-06-03 Hepatochem, Inc. Fotochemische vorrichtung
CN111558192A (zh) * 2020-05-21 2020-08-21 重庆工商大学 一种介质微孔道放电处理工业废盐中的有机物的处理装置
CN112023844A (zh) * 2020-08-12 2020-12-04 陕西科技大学 一种用于材料制备的水热感应加热法及其制备系统
CN113549892B (zh) * 2021-07-01 2023-06-16 安徽理工大学 一种用于金属管内壁改性的装置及方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4479443A (en) * 1982-03-08 1984-10-30 Inge Faldt Method and apparatus for thermal decomposition of stable compounds
JPS59137311A (ja) * 1983-01-21 1984-08-07 Natl Inst For Res In Inorg Mater 多結晶質ダイヤモンドの合成法
CA1225441A (en) * 1984-01-23 1987-08-11 Edward S. Fox Plasma pyrolysis waste destruction
US4564532A (en) * 1985-01-07 1986-01-14 Kms Fusion, Inc. Glass-surface microcarrier for anchorage-dependent cell cultivation
US4717585A (en) * 1985-02-09 1988-01-05 Canon Kabushiki Kaisha Process for forming deposited film
JPS61231716A (ja) * 1985-04-08 1986-10-16 Hitachi Ltd 成膜装置
US4735633A (en) * 1987-06-23 1988-04-05 Chiu Kin Chung R Method and system for vapor extraction from gases

Also Published As

Publication number Publication date
ATE163367T1 (de) 1998-03-15
EP0448660A4 (en) 1992-10-14
WO1991004104A1 (en) 1991-04-04
US5028452A (en) 1991-07-02
CA2040436A1 (en) 1991-03-16
EP0448660A1 (de) 1991-10-02
EP0448660B1 (de) 1998-02-25
JPH04502882A (ja) 1992-05-28
CN1057010A (zh) 1991-12-18
CN1029296C (zh) 1995-07-12

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: TBX, INC., KEY BISCAYNE, FLA., US

8332 No legal effect for de