DE69022487D1 - Vorrichtung zum Verdampfen von Substanzen. - Google Patents

Vorrichtung zum Verdampfen von Substanzen.

Info

Publication number
DE69022487D1
DE69022487D1 DE69022487T DE69022487T DE69022487D1 DE 69022487 D1 DE69022487 D1 DE 69022487D1 DE 69022487 T DE69022487 T DE 69022487T DE 69022487 T DE69022487 T DE 69022487T DE 69022487 D1 DE69022487 D1 DE 69022487D1
Authority
DE
Germany
Prior art keywords
evaporating substances
evaporating
substances
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69022487T
Other languages
English (en)
Other versions
DE69022487T2 (de
Inventor
Yoichiro Tabata
Yoshihiro Ueda
Shigeo Ueguri
Kazuhiko Hara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP15192789A external-priority patent/JPH0317260A/ja
Priority claimed from JP15193389A external-priority patent/JPH0318076A/ja
Priority claimed from JP1152675A external-priority patent/JP2760059B2/ja
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Application granted granted Critical
Publication of DE69022487D1 publication Critical patent/DE69022487D1/de
Publication of DE69022487T2 publication Critical patent/DE69022487T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/031—Metal vapour lasers, e.g. metal vapour generation

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
DE69022487T 1989-06-14 1990-06-12 Vorrichtung zum Verdampfen von Substanzen. Expired - Fee Related DE69022487T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP15192789A JPH0317260A (ja) 1989-06-14 1989-06-14 物質蒸気発生装置
JP15193389A JPH0318076A (ja) 1989-06-14 1989-06-14 金属蒸気レーザ装置
JP1152675A JP2760059B2 (ja) 1989-06-14 1989-06-14 物質蒸気発生装置

Publications (2)

Publication Number Publication Date
DE69022487D1 true DE69022487D1 (de) 1995-10-26
DE69022487T2 DE69022487T2 (de) 1996-02-08

Family

ID=27320189

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69031430T Expired - Fee Related DE69031430T2 (de) 1989-06-14 1990-06-12 Apparat zur Verdampfung von Substanzen
DE69022487T Expired - Fee Related DE69022487T2 (de) 1989-06-14 1990-06-12 Vorrichtung zum Verdampfen von Substanzen.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69031430T Expired - Fee Related DE69031430T2 (de) 1989-06-14 1990-06-12 Apparat zur Verdampfung von Substanzen

Country Status (3)

Country Link
US (1) US5150375A (de)
EP (2) EP0622875B1 (de)
DE (2) DE69031430T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2262184B (en) * 1991-11-07 1995-06-07 Mitsubishi Electric Corp Pulse laser apparatus
JPH0613196A (ja) * 1992-06-25 1994-01-21 Matsushita Electric Ind Co Ltd プラズマ発生方法および発生装置
US5327446A (en) * 1993-03-26 1994-07-05 The United States Of America As Represented By The Secretary Of The Department Of Health And Human Services Method of exciting laser action and delivering laser energy for medical and scientific applications
US6738400B1 (en) * 1993-07-07 2004-05-18 The United States Of America As Represented By The United States Department Of Energy Large diameter lasing tube cooling arrangement
DE4422697C1 (de) * 1994-06-29 1996-01-25 Zsw Verdampferquelle für eine Aufdampfanlage und ihre Verwendung
FR2743204B1 (fr) * 1996-01-03 1998-02-13 Commissariat Energie Atomique Dispositif laser a vapeur metallique
FR2836772B1 (fr) * 2002-03-04 2004-07-09 Absys Generateur de gaz pour un systeme de sterilisation
US20030168013A1 (en) * 2002-03-08 2003-09-11 Eastman Kodak Company Elongated thermal physical vapor deposition source with plural apertures for making an organic light-emitting device
DE102010055285A1 (de) 2010-12-21 2012-06-21 Solarion Ag Photovoltaik Verdampferquelle, Verdampferkammer und Beschichtungsverfahren
RU2618477C1 (ru) * 2015-12-24 2017-05-03 Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский Томский государственный университет" (ТГУ, НИ ТГУ) Импульсно-периодический лазер на парах химических элементов

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2092912B1 (de) * 1970-06-30 1973-12-21 Comp Generale Electricite
US4021845A (en) * 1975-10-16 1977-05-03 Xerox Corporation Laser for generating white light
US4052680A (en) * 1976-07-01 1977-10-04 Xerox Corporation Metal vapor laser having cataphoresis means
DE2824761A1 (de) * 1977-06-08 1978-12-14 Gen Electric Entladungserhitzter kupferdampf-laser
US4639926A (en) * 1980-06-09 1987-01-27 Xerox Corporation Efficient cathode assembly for metal vapor laser
JPS5835992A (ja) * 1981-08-28 1983-03-02 Mita Ind Co Ltd 負グロ−を利用するレ−ザ管
JPS61244081A (ja) * 1985-04-23 1986-10-30 Koito Mfg Co Ltd 金属イオンレ−ザ−
JPH06101605B2 (ja) * 1985-07-22 1994-12-12 株式会社小糸製作所 金属イオンレ−ザ−
US4677636A (en) * 1985-10-23 1987-06-30 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Multiplex electric discharge gas laser system
GB8711212D0 (en) * 1987-05-12 1987-06-17 English Electric Valve Co Ltd Laser apparatus
JPS63281484A (ja) * 1987-05-13 1988-11-17 Ushio Inc ホロ−カソ−ド型金属蒸気レ−ザ管
WO1989001713A1 (en) * 1987-08-13 1989-02-23 Mitsubishi Denki Kabushiki Kaisha Metal vapor laser

Also Published As

Publication number Publication date
DE69022487T2 (de) 1996-02-08
EP0402842A2 (de) 1990-12-19
EP0622875B1 (de) 1997-09-10
EP0622875A1 (de) 1994-11-02
US5150375A (en) 1992-09-22
DE69031430T2 (de) 1998-01-22
DE69031430D1 (de) 1997-10-16
EP0402842B1 (de) 1995-09-20
EP0402842A3 (de) 1992-02-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee