DE69004624D1 - Elektrostatische Mikromotorvorrichtung. - Google Patents

Elektrostatische Mikromotorvorrichtung.

Info

Publication number
DE69004624D1
DE69004624D1 DE90306271T DE69004624T DE69004624D1 DE 69004624 D1 DE69004624 D1 DE 69004624D1 DE 90306271 T DE90306271 T DE 90306271T DE 69004624 T DE69004624 T DE 69004624T DE 69004624 D1 DE69004624 D1 DE 69004624D1
Authority
DE
Germany
Prior art keywords
electrostatic micromotor
micromotor device
electrostatic
micromotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE90306271T
Other languages
English (en)
Other versions
DE69004624T2 (de
Inventor
Narito Shibaike
Shinji Uchida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE69004624D1 publication Critical patent/DE69004624D1/de
Application granted granted Critical
Publication of DE69004624T2 publication Critical patent/DE69004624T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/10—Structural association with clutches, brakes, gears, pulleys or mechanical starters
    • H02K7/116—Structural association with clutches, brakes, gears, pulleys or mechanical starters with gears
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/004—Electrostatic motors in which a body is moved along a path due to interaction with an electric field travelling along the path
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/19—Gearing
    • Y10T74/19642—Directly cooperating gears
    • Y10T74/19679—Spur
    • Y10T74/19684—Motor and gearing
DE90306271T 1989-06-16 1990-06-08 Elektrostatische Mikromotorvorrichtung. Expired - Fee Related DE69004624T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1155365A JPH078149B2 (ja) 1989-06-16 1989-06-16 静電型マイクロモータの駆動力伝達装置

Publications (2)

Publication Number Publication Date
DE69004624D1 true DE69004624D1 (de) 1993-12-23
DE69004624T2 DE69004624T2 (de) 1994-03-10

Family

ID=15604329

Family Applications (1)

Application Number Title Priority Date Filing Date
DE90306271T Expired - Fee Related DE69004624T2 (de) 1989-06-16 1990-06-08 Elektrostatische Mikromotorvorrichtung.

Country Status (5)

Country Link
US (1) US5013954A (de)
EP (1) EP0403179B1 (de)
JP (1) JPH078149B2 (de)
KR (1) KR930001801B1 (de)
DE (1) DE69004624T2 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5428259A (en) * 1990-02-02 1995-06-27 Nec Corporation Micromotion mechanical structure and a process for the production thereof
CH680322A5 (de) * 1990-02-09 1992-07-31 Asulab Sa
US5206983A (en) * 1991-06-24 1993-05-04 Wisconsin Alumni Research Foundation Method of manufacturing micromechanical devices
JP3060639B2 (ja) * 1991-09-05 2000-07-10 日本電気株式会社 微小可動機械の製造方法
JP2738199B2 (ja) * 1992-03-02 1998-04-08 三菱電機株式会社 回転又は移動検出方法及びその装置
US6472794B1 (en) * 1992-07-10 2002-10-29 Matsushita Electric Industrial Co., Ltd. Microactuator
US5331236A (en) * 1992-08-19 1994-07-19 The United States Of America As Represented By The Secretary Of The Navy Microdynamic devices fabricated on silicon-on-sapphire substrates
US5412265A (en) * 1993-04-05 1995-05-02 Ford Motor Company Planar micro-motor and method of fabrication
DE4316856A1 (de) * 1993-05-19 1994-11-24 Siemens Ag Mikromechanisches Bauteil und Verfahren zu seiner Herstellung
DE4445177C5 (de) 1994-11-22 2015-09-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung mikromechanischer Bauelemente mit freistehenden Mikrostrukturen
US5466980A (en) * 1994-11-29 1995-11-14 International Business Machines Corporation Charged rotor pole micromachine motor
US5710466A (en) * 1995-06-19 1998-01-20 Georgia Tech Research Corporation Fully integrated magnetic micromotors and methods for their fabrication
TW374211B (en) * 1995-08-03 1999-11-11 Ibm Machine structures fabricated of multiple microstructure layers
US5943223A (en) * 1997-10-15 1999-08-24 Reliance Electric Industrial Company Electric switches for reducing on-state power loss
US6082208A (en) * 1998-04-01 2000-07-04 Sandia Corporation Method for fabricating five-level microelectromechanical structures and microelectromechanical transmission formed
US6211599B1 (en) * 1999-08-03 2001-04-03 Sandia Corporation Microelectromechanical ratcheting apparatus
WO2001042131A1 (fr) * 1999-12-06 2001-06-14 Takashi Nishi Engrenage et procede de fabrication
TWI223036B (en) * 2002-03-22 2004-11-01 Sumitomo Heavy Industries Speed reduction device for gear reduction motor, gear reduction motor and products thereof
SG140447A1 (en) * 2003-08-12 2008-03-28 Sony Corp Method of forming a micro-rotating device, and a micro-rotating device produced by the method
US7146814B2 (en) * 2004-05-17 2006-12-12 Micron Technology, Inc. Micro-machine and a method of powering a micro-machine
JP4409499B2 (ja) 2005-10-25 2010-02-03 国立大学法人浜松医科大学 血栓溶解装置
JP2007298407A (ja) * 2006-04-28 2007-11-15 Matsushita Electric Works Ltd 静電容量式センサ
EP1921520B1 (de) 2006-11-13 2009-01-28 ETA SA Manufacture Horlogère Suisse Einen MEMS-Mikromotor umfassendes Antriebsmodul, Verfahren zur Herstellung dieses Moduls und mit diesem Modul ausgerüstete Uhr
EP1921522B1 (de) 2006-11-13 2010-07-21 ETA SA Manufacture Horlogère Suisse Anordnung zur mechanischen Verbindung eines MEMS-Mikromotors mit einem Uhrrädchen und diese Anordnung umfassende Uhr
ATE495481T1 (de) * 2006-11-13 2011-01-15 Eta Sa Mft Horlogere Suisse Mems-mikromotor und mit diesem mikromotor ausgerüstete uhr
US7967360B2 (en) * 2007-03-19 2011-06-28 Johnson Controls Technology Company Removable visor
US11632062B2 (en) 2020-01-24 2023-04-18 Toyota Motor Engineering & Manufacturing North America, Inc. Electrostatically rotatable gear and gear set

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2702353A (en) * 1952-07-17 1955-02-15 Jacob L Herson Miniature printed circuit electrostatic generator
US3629624A (en) * 1970-03-23 1971-12-21 Juergen H Staudte Electrostatic motor
US4006374A (en) * 1975-02-19 1977-02-01 Kabushiki Kaisha Daini Seikosha Electric micro motor for a timepiece
US4075518A (en) * 1976-06-22 1978-02-21 Bulova Watch Company, Inc. Micro-miniature stepping motor
US4291248A (en) * 1978-12-26 1981-09-22 Rainbolt Research, Inc. Electric motor
CH644238B (fr) * 1980-08-18 Complications Sa Montre electronique a affichage analogique.
US4754185A (en) * 1986-10-16 1988-06-28 American Telephone And Telegraph Company, At&T Bell Laboratories Micro-electrostatic motor
US4943750A (en) * 1987-05-20 1990-07-24 Massachusetts Institute Of Technology Electrostatic micromotor
US4740410A (en) * 1987-05-28 1988-04-26 The Regents Of The University Of California Micromechanical elements and methods for their fabrication
NL8701504A (nl) * 1987-06-26 1989-01-16 Kinetron Bv Electromechanische tijdaanduider met stappenmotor.
DE3736519A1 (de) * 1987-10-28 1989-05-11 Standard Elektrik Lorenz Ag Gleichstrommaschine mit permanentmagnetischem staender

Also Published As

Publication number Publication date
DE69004624T2 (de) 1994-03-10
KR910002073A (ko) 1991-01-31
EP0403179A1 (de) 1990-12-19
JPH0322885A (ja) 1991-01-31
KR930001801B1 (ko) 1993-03-13
JPH078149B2 (ja) 1995-01-30
EP0403179B1 (de) 1993-11-18
US5013954A (en) 1991-05-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee