DE68921126T2 - Flüssigkeitshandhabungsvorrichtung mit Filter und Verfahren zu deren Herstellung. - Google Patents

Flüssigkeitshandhabungsvorrichtung mit Filter und Verfahren zu deren Herstellung.

Info

Publication number
DE68921126T2
DE68921126T2 DE68921126T DE68921126T DE68921126T2 DE 68921126 T2 DE68921126 T2 DE 68921126T2 DE 68921126 T DE68921126 T DE 68921126T DE 68921126 T DE68921126 T DE 68921126T DE 68921126 T2 DE68921126 T2 DE 68921126T2
Authority
DE
Germany
Prior art keywords
manufacture
filter
handling device
liquid handling
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68921126T
Other languages
English (en)
Other versions
DE68921126D1 (de
Inventor
Gary A Kneezel
Donald J Drake
Almon P Fisher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Application granted granted Critical
Publication of DE68921126D1 publication Critical patent/DE68921126D1/de
Publication of DE68921126T2 publication Critical patent/DE68921126T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1625—Manufacturing processes electroforming
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B41J2/17563—Ink filters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)
DE68921126T 1988-09-22 1989-09-20 Flüssigkeitshandhabungsvorrichtung mit Filter und Verfahren zu deren Herstellung. Expired - Fee Related DE68921126T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/247,819 US4864329A (en) 1988-09-22 1988-09-22 Fluid handling device with filter and fabrication process therefor

Publications (2)

Publication Number Publication Date
DE68921126D1 DE68921126D1 (de) 1995-03-23
DE68921126T2 true DE68921126T2 (de) 1995-09-14

Family

ID=22936509

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68921126T Expired - Fee Related DE68921126T2 (de) 1988-09-22 1989-09-20 Flüssigkeitshandhabungsvorrichtung mit Filter und Verfahren zu deren Herstellung.

Country Status (6)

Country Link
US (1) US4864329A (de)
EP (1) EP0360580B1 (de)
JP (1) JPH02164549A (de)
BR (1) BR8904765A (de)
CA (1) CA1321360C (de)
DE (1) DE68921126T2 (de)

Families Citing this family (63)

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US5073785A (en) * 1990-04-30 1991-12-17 Xerox Corporation Coating processes for an ink jet printhead
DE59009749D1 (de) * 1990-07-24 1995-11-09 Eastman Kodak Co Anordnung für die Tintenzuführung in einen Tintenschreibkopf.
US5124717A (en) * 1990-12-06 1992-06-23 Xerox Corporation Ink jet printhead having integral filter
EP0498293B1 (de) * 1991-01-30 1996-10-30 Canon Information Systems Research Australia Pty Ltd. Strahldrucker mit Bläschen für Bildaufzeichnungsvorrichtung
US6019457A (en) * 1991-01-30 2000-02-01 Canon Information Systems Research Australia Pty Ltd. Ink jet print device and print head or print apparatus using the same
US5204690A (en) * 1991-07-01 1993-04-20 Xerox Corporation Ink jet printhead having intergral silicon filter
US5141596A (en) * 1991-07-29 1992-08-25 Xerox Corporation Method of fabricating an ink jet printhead having integral silicon filter
US5154815A (en) * 1991-10-23 1992-10-13 Xerox Corporation Method of forming integral electroplated filters on fluid handling devices such as ink jet printheads
US6000792A (en) * 1992-09-02 1999-12-14 Canon Kabushiki Kaisha Ink jet apparatus provided with an improved recovery mechanism
EP0585901B1 (de) * 1992-09-02 1999-12-08 Canon Kabushiki Kaisha Farbstrahlgerät mit Rückgewinnungsvorrichtung
US5489930A (en) * 1993-04-30 1996-02-06 Tektronix, Inc. Ink jet head with internal filter
US5610645A (en) * 1993-04-30 1997-03-11 Tektronix, Inc. Ink jet head with channel filter
DE69428975T2 (de) * 1993-07-09 2002-06-06 Canon Kk Harzfilter für einen tintenstrahldruckkopf und verfahren zu deren herstellung
US5898449A (en) * 1993-12-20 1999-04-27 Xerox Corporation Interface seal between printhead and ink supply cartridge
FR2729891B1 (fr) * 1995-01-31 1997-04-11 Imaje Sa Dispositif de modulation equipe d'un filtre de securite pour tete d'impression a jet d'encre
US6336714B1 (en) 1996-02-07 2002-01-08 Hewlett-Packard Company Fully integrated thermal inkjet printhead having thin film layer shelf
US6000787A (en) 1996-02-07 1999-12-14 Hewlett-Packard Company Solid state ink jet print head
US6305790B1 (en) 1996-02-07 2001-10-23 Hewlett-Packard Company Fully integrated thermal inkjet printhead having multiple ink feed holes per nozzle
US6543884B1 (en) 1996-02-07 2003-04-08 Hewlett-Packard Company Fully integrated thermal inkjet printhead having etched back PSG layer
US5847737A (en) * 1996-06-18 1998-12-08 Kaufman; Micah Abraham Filter for ink jet printhead
US6243112B1 (en) 1996-07-01 2001-06-05 Xerox Corporation High density remote plasma deposited fluoropolymer films
EP0910478A4 (de) * 1996-07-08 1999-09-01 Corning Inc Nach dem prinzip der rayleigh-auflösung in tropfen arbeitende zerstäubungsvorrichtung und deren herstellungsverfahren
US6352209B1 (en) 1996-07-08 2002-03-05 Corning Incorporated Gas assisted atomizing devices and methods of making gas-assisted atomizing devices
CN1226960A (zh) 1996-07-08 1999-08-25 康宁股份有限公司 气体助推式雾化装置
US5901425A (en) 1996-08-27 1999-05-11 Topaz Technologies Inc. Inkjet print head apparatus
US5716533A (en) * 1997-03-03 1998-02-10 Xerox Corporation Method of fabricating ink jet printheads
US6155675A (en) * 1997-08-28 2000-12-05 Hewlett-Packard Company Printhead structure and method for producing the same
US6139674A (en) * 1997-09-10 2000-10-31 Xerox Corporation Method of making an ink jet printhead filter by laser ablation
US6280013B1 (en) 1997-11-05 2001-08-28 Hewlett-Packard Company Heat exchanger for an inkjet printhead
US6264309B1 (en) * 1997-12-18 2001-07-24 Lexmark International, Inc. Filter formed as part of a heater chip for removing contaminants from a fluid and a method for forming same
US6267251B1 (en) 1997-12-18 2001-07-31 Lexmark International, Inc. Filter assembly for a print cartridge container for removing contaminants from a fluid
NL1008754C2 (nl) * 1998-03-30 1999-10-01 Stork Digital Imaging Bv Inktdoseerinrichting, alsmede inktstraaldrukkop voorzien van een dergelijke inktdoseerinrichting.
US6151969A (en) * 1998-07-14 2000-11-28 Southwest Research Institute Electromechanical and electrochemical impedance spectroscopy for measuring and imaging fatigue damage
US6086195A (en) * 1998-09-24 2000-07-11 Hewlett-Packard Company Filter for an inkjet printhead
US6084618A (en) * 1999-07-22 2000-07-04 Lexmark International, Inc. Filter for an inkjet printhead
US6199980B1 (en) 1999-11-01 2001-03-13 Xerox Corporation Efficient fluid filtering device and an ink jet printhead including the same
KR100374788B1 (ko) 2000-04-26 2003-03-04 삼성전자주식회사 버블 젯 방식의 잉크 젯 프린트 헤드, 그 제조방법 및잉크 토출방법
KR100397604B1 (ko) 2000-07-18 2003-09-13 삼성전자주식회사 버블 젯 방식의 잉크 젯 프린트 헤드 및 그 제조방법
NL1016030C1 (nl) * 2000-08-28 2002-03-01 Aquamarijn Holding B V Sproei inrichting met een nozzleplaat, een nozzleplaat, alsmede werkwijzen ter vervaardiging en voor toepassing van een dergelijke nozzleplaat.
US6364466B1 (en) 2000-11-30 2002-04-02 Hewlett-Packard Company Particle tolerant ink-feed channel structure for fully integrated inkjet printhead
US6481832B2 (en) 2001-01-29 2002-11-19 Hewlett-Packard Company Fluid-jet ejection device
US6517735B2 (en) 2001-03-15 2003-02-11 Hewlett-Packard Company Ink feed trench etch technique for a fully integrated thermal inkjet printhead
US6779877B2 (en) 2002-07-15 2004-08-24 Xerox Corporation Ink jet printhead having a channel plate with integral filter
US6669336B1 (en) 2002-07-30 2003-12-30 Xerox Corporation Ink jet printhead having an integral internal filter
US6817708B2 (en) * 2002-10-29 2004-11-16 Xerox Corporation Conical or cylindrical laser ablated filter
US6789886B2 (en) * 2002-10-30 2004-09-14 Xerox Corporation Pleated laser ablated filter
JP4239593B2 (ja) * 2003-01-10 2009-03-18 リコープリンティングシステムズ株式会社 インクジェットヘッド及びインクジェット記録装置
US7220271B2 (en) * 2003-01-30 2007-05-22 Ev3 Inc. Embolic filters having multiple layers and controlled pore size
US7323001B2 (en) 2003-01-30 2008-01-29 Ev3 Inc. Embolic filters with controlled pore size
US7101030B2 (en) * 2003-05-21 2006-09-05 Xerox Corporation Formation of novel ink jet filter printhead using transferable photopatterned filter layer
JP4455287B2 (ja) * 2003-12-26 2010-04-21 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP4186884B2 (ja) * 2004-06-30 2008-11-26 ブラザー工業株式会社 インクジェットプリンタヘッド
US20060146091A1 (en) * 2004-12-30 2006-07-06 Bertelsen Craig M Methods for reducing deformations of films in micro-fluid ejection devices
JP2007069435A (ja) * 2005-09-06 2007-03-22 Brother Ind Ltd 液滴吐出装置
US20070195143A1 (en) * 2006-02-17 2007-08-23 Xerox Corporation Microfilter manufacture process
US8534307B2 (en) * 2008-08-30 2013-09-17 Corning Incorporated Methods and devices for fluid handling
US8684499B2 (en) 2010-09-24 2014-04-01 Xerox Corporation Method for forming an aperture and actuator layer for an inkjet printhead
US8702216B2 (en) * 2011-12-21 2014-04-22 Xerox Corporation Polymer internal contamination filter for ink jet printhead
US8979241B2 (en) * 2012-02-24 2015-03-17 Xerox Corporation Using saturated mesh to control adhesive bond line quality
SG11201404287PA (en) * 2012-08-20 2014-10-30 Instant Off Inc Apparatus and method for conserving and filtering water
US9776407B2 (en) 2013-04-30 2017-10-03 Hewlett-Packard Development Company, L.P. Fluid ejection device with ink feedhole bridge
US9254674B2 (en) 2014-02-25 2016-02-09 Palo Alto Research Center Incorporated Reservoir having particle trapping features
US11380557B2 (en) * 2017-06-05 2022-07-05 Applied Materials, Inc. Apparatus and method for gas delivery in semiconductor process chambers

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US3606973A (en) * 1969-11-17 1971-09-21 Mead Corp Filter plate for a coating head
US4106030A (en) * 1977-02-14 1978-08-08 Recognition Equipment Incorporated Ink jet printer ink heater
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JPS5675867A (en) * 1979-11-22 1981-06-23 Seiko Epson Corp Ink jet recorder
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JPS56166074A (en) * 1980-05-27 1981-12-19 Ricoh Co Ltd Ink jet printing machine
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US4571599A (en) * 1984-12-03 1986-02-18 Xerox Corporation Ink cartridge for an ink jet printer
JPS61277460A (ja) * 1985-06-04 1986-12-08 Ricoh Co Ltd インクジエツト記録装置のインク容器
US4639748A (en) * 1985-09-30 1987-01-27 Xerox Corporation Ink jet printhead with integral ink filter
JPS62214961A (ja) * 1986-03-17 1987-09-21 Seiko Epson Corp インク容器
JP2661016B2 (ja) * 1986-06-24 1997-10-08 セイコーエプソン株式会社 インクジェット記録ヘッド
US4678529A (en) * 1986-07-02 1987-07-07 Xerox Corporation Selective application of adhesive and bonding process for ink jet printheads
US4814786A (en) * 1987-04-28 1989-03-21 Spectra, Inc. Hot melt ink supply system
US4789425A (en) * 1987-08-06 1988-12-06 Xerox Corporation Thermal ink jet printhead fabricating process
JPH0238054A (ja) * 1988-07-29 1990-02-07 Canon Inc インクジェット記録ヘッドの製造方法

Also Published As

Publication number Publication date
JPH02164549A (ja) 1990-06-25
CA1321360C (en) 1993-08-17
BR8904765A (pt) 1990-05-01
EP0360580A3 (de) 1991-03-20
DE68921126D1 (de) 1995-03-23
EP0360580B1 (de) 1995-02-15
US4864329A (en) 1989-09-05
EP0360580A2 (de) 1990-03-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee