DE68920514T2 - Matrixanordnung von Mikrolinsen und Herstellungsverfahren. - Google Patents

Matrixanordnung von Mikrolinsen und Herstellungsverfahren.

Info

Publication number
DE68920514T2
DE68920514T2 DE68920514T DE68920514T DE68920514T2 DE 68920514 T2 DE68920514 T2 DE 68920514T2 DE 68920514 T DE68920514 T DE 68920514T DE 68920514 T DE68920514 T DE 68920514T DE 68920514 T2 DE68920514 T2 DE 68920514T2
Authority
DE
Germany
Prior art keywords
microlenses
manufacturing process
matrix arrangement
matrix
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68920514T
Other languages
English (en)
Other versions
DE68920514D1 (de
Inventor
Hiroshi Hamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Publication of DE68920514D1 publication Critical patent/DE68920514D1/de
Application granted granted Critical
Publication of DE68920514T2 publication Critical patent/DE68920514T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/46Systems using spatial filters
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0888Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using transparant moulds
    • B29C35/0894Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using transparant moulds provided with masks or diaphragms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C41/00Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
    • B29C41/02Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor for making articles of definite length, i.e. discrete articles
    • B29C41/20Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor for making articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. moulding inserts or for coating articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C70/00Shaping composites, i.e. plastics material comprising reinforcements, fillers or preformed parts, e.g. inserts
    • B29C70/68Shaping composites, i.e. plastics material comprising reinforcements, fillers or preformed parts, e.g. inserts by incorporating or moulding on preformed parts, e.g. inserts or layers, e.g. foam blocks
    • B29C70/78Moulding material on one side only of the preformed part
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00Producing optical elements, e.g. lenses or prisms
    • B29D11/00009Production of simple or compound lenses
    • B29D11/00278Lenticular sheets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00Producing optical elements, e.g. lenses or prisms
    • B29D11/0074Production of other optical elements not provided for in B29D11/00009- B29D11/0073
    • B29D11/00855Producing cylindrical lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0006Arrays
    • G02B3/0012Arrays characterised by the manufacturing method
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/1221Basic optical elements, e.g. light-guiding paths made from organic materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0805Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
    • B29C2035/0827Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using UV radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2011/00Optical elements, e.g. lenses, prisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2011/00Optical elements, e.g. lenses, prisms
    • B29L2011/0016Lenses

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Ophthalmology & Optometry (AREA)
  • Chemical & Material Sciences (AREA)
  • Composite Materials (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Toxicology (AREA)
  • Oral & Maxillofacial Surgery (AREA)
  • Thermal Sciences (AREA)
  • Liquid Crystal (AREA)
DE68920514T 1988-08-30 1989-08-30 Matrixanordnung von Mikrolinsen und Herstellungsverfahren. Expired - Fee Related DE68920514T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63218187A JPH0264501A (ja) 1988-08-30 1988-08-30 マイクロレンズアレイ及びその製造方法

Publications (2)

Publication Number Publication Date
DE68920514D1 DE68920514D1 (de) 1995-02-23
DE68920514T2 true DE68920514T2 (de) 1995-08-17

Family

ID=16715977

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68920514T Expired - Fee Related DE68920514T2 (de) 1988-08-30 1989-08-30 Matrixanordnung von Mikrolinsen und Herstellungsverfahren.

Country Status (4)

Country Link
US (1) US5453876A (de)
EP (1) EP0357396B1 (de)
JP (1) JPH0264501A (de)
DE (1) DE68920514T2 (de)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5359454A (en) * 1992-08-18 1994-10-25 Applied Physics Research, L.P. Apparatus for providing autostereoscopic and dynamic images
KR100234357B1 (ko) * 1992-11-21 1999-12-15 윤종용 투영노광장치
US5410285A (en) * 1993-05-18 1995-04-25 Uniden Corporation Quasi-TEM mode dielectric filter
US5481385A (en) * 1993-07-01 1996-01-02 Alliedsignal Inc. Direct view display device with array of tapered waveguide on viewer side
US5462700A (en) * 1993-11-08 1995-10-31 Alliedsignal Inc. Process for making an array of tapered photopolymerized waveguides
SG63687A1 (en) * 1996-01-10 1999-03-30 Sumitomo Chemical Co A microlens-array production method thereof and liquid crystal display device using the same
DE19602736A1 (de) * 1996-01-26 1997-07-31 Inst Mikrotechnik Mainz Gmbh Verfahren und Vorrichtung zur Herstellung von optischen Linsen und optischen Linsenarrays
EP0796729A3 (de) * 1996-02-21 1998-08-05 Mitsubishi Gas Chemical Company, Inc. Verfahren zur Herstellung eines optischen Elementes
US5808657A (en) * 1996-06-17 1998-09-15 Eastman Kodak Company Laser printer with low fill modulator array and high pixel fill at a media plane
US5903039A (en) * 1997-07-15 1999-05-11 Hewlett-Packard Company Enhanced-light-collection-efficiency sensor
US6002524A (en) * 1997-09-29 1999-12-14 Imation Corp. Flexible lens
US6057537A (en) * 1997-09-29 2000-05-02 Eastman Kodak Company Optical scanner feedback system having a reflected cylinder lens
US5932151A (en) * 1997-09-29 1999-08-03 Imation Corp. Method of making a flexible lens
US6108025A (en) * 1997-09-29 2000-08-22 Eastman Kodak Company Optical scanner system having a laser beam power attentuation mechanism
KR100310102B1 (ko) * 1998-03-05 2001-12-17 윤종용 고체 컬러 이미지 소자 및 그의 제조 방법
US6094287A (en) * 1998-12-03 2000-07-25 Eastman Kodak Company Wobble correcting monogon scanner for a laser imaging system
JP2000221442A (ja) * 1999-01-28 2000-08-11 Nippon Sheet Glass Co Ltd 結像光学装置
US6307243B1 (en) 1999-07-19 2001-10-23 Micron Technology, Inc. Microlens array with improved fill factor
US6835535B2 (en) 2000-07-31 2004-12-28 Corning Incorporated Microlens arrays having high focusing efficiency
US7033736B2 (en) 2000-07-31 2006-04-25 Corning Incorporated Structured screens for controlled spreading of light
US7092165B2 (en) * 2000-07-31 2006-08-15 Corning Incorporated Microlens arrays having high focusing efficiency
JP2002228805A (ja) * 2000-11-30 2002-08-14 Nikon Corp 樹脂接合型光学素子及びその成形型並びに光学物品
EP1377853B1 (de) * 2001-04-10 2008-09-17 President And Fellows of Harvard College Mikrolinse zur projektionslithographie und ihr herstellungsverfahren
US6813958B2 (en) 2001-06-21 2004-11-09 The United States Of America As Represented By The Secretary Of Commerce Method for combinatorially measuring adhesion strength
US6597510B2 (en) 2001-11-02 2003-07-22 Corning Incorporated Methods and apparatus for making optical devices including microlens arrays
JP4037197B2 (ja) * 2002-07-17 2008-01-23 富士フイルム株式会社 半導体撮像装置実装構造体の製造方法
TWI294529B (en) * 2004-12-22 2008-03-11 Ind Tech Res Inst Method of forming micro pattern
KR20060112565A (ko) * 2005-04-27 2006-11-01 삼성전자주식회사 렌티큘라스크린의 제조방법 및 이에 의해 제조된디스플레이장치
US7706073B2 (en) * 2005-06-29 2010-04-27 Reflexite Corporation Collimating microlens array
US7295375B2 (en) * 2005-08-02 2007-11-13 International Business Machines Corporation Injection molded microlenses for optical interconnects
CN100465667C (zh) * 2006-08-14 2009-03-04 西南大学 方形孔径自聚焦透镜阵列及其制作方法
KR101522977B1 (ko) * 2007-04-23 2015-05-28 난창 오-필름 옵토일렉트로닉스 테크놀로지 리미티드 마이크로 광학 장치의 대량 생산, 그에 대응하는 도구 및 결과적인 구조물
JP2008308291A (ja) * 2007-06-14 2008-12-25 Shin Meiwa Ind Co Ltd 廃棄物収集車
WO2010033211A1 (en) * 2008-09-18 2010-03-25 Tessera North America, Inc. Recessed optical surfaces
TWI378314B (en) * 2008-10-15 2012-12-01 Coretronic Corp Screen of a projecting device
KR20120081856A (ko) * 2011-01-12 2012-07-20 삼성전기주식회사 렌즈 제조 방법 및 렌즈
TWI535555B (zh) * 2011-09-13 2016-06-01 鴻海精密工業股份有限公司 鏡片製造方法
WO2021229848A1 (ja) * 2020-05-13 2021-11-18 Scivax株式会社 光学系装置および光学素子製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940751A (de) * 1972-08-22 1974-04-16
JPS5833812B2 (ja) * 1975-08-27 1983-07-22 日本板硝子株式会社 レンズアレイノセイゾウホウホウ
JPS57148728A (en) * 1981-03-11 1982-09-14 Canon Inc Diffusing plate
NL8300359A (nl) * 1982-02-01 1983-09-01 Nippon Sheet Glass Co Ltd Plaatvormige lens en een werkwijze voor het vervaardigen ervan.
JPS60192901A (ja) * 1984-03-14 1985-10-01 Canon Inc アレイレンズ
US4689291A (en) * 1985-08-30 1987-08-25 Xerox Corporation Pedestal-type microlens fabrication process
JPS62250401A (ja) * 1986-04-24 1987-10-31 Matsushita Electric Ind Co Ltd 光学装置及びその製造方法
CA1294470C (en) * 1986-07-26 1992-01-21 Toshihiro Suzuki Process for the production of optical elements
US5216543A (en) * 1987-03-04 1993-06-01 Minnesota Mining And Manufacturing Company Apparatus and method for patterning a film
US4882262A (en) * 1987-09-28 1989-11-21 Honeywell Inc. Self-aligning aperture

Also Published As

Publication number Publication date
EP0357396B1 (de) 1995-01-11
DE68920514D1 (de) 1995-02-23
JPH0264501A (ja) 1990-03-05
EP0357396A2 (de) 1990-03-07
US5453876A (en) 1995-09-26
EP0357396A3 (de) 1991-09-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: PATENTANWAELTE MUELLER & HOFFMANN, 81667 MUENCHEN

8339 Ceased/non-payment of the annual fee