DE68920246D1 - Mit einem keramischen Film überzogener Gegenstand. - Google Patents

Mit einem keramischen Film überzogener Gegenstand.

Info

Publication number
DE68920246D1
DE68920246D1 DE68920246T DE68920246T DE68920246D1 DE 68920246 D1 DE68920246 D1 DE 68920246D1 DE 68920246 T DE68920246 T DE 68920246T DE 68920246 T DE68920246 T DE 68920246T DE 68920246 D1 DE68920246 D1 DE 68920246D1
Authority
DE
Germany
Prior art keywords
ceramic film
object covered
covered
ceramic
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68920246T
Other languages
English (en)
Other versions
DE68920246T2 (de
Inventor
Shunpei Yamazaki
Shigenori Hayashi
Naoki Hirose
Noriya Ishida
Junichi Takeyama
Mari Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Publication of DE68920246D1 publication Critical patent/DE68920246D1/de
Application granted granted Critical
Publication of DE68920246T2 publication Critical patent/DE68920246T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/10—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by other chemical means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
DE68920246T 1988-09-13 1989-09-12 Mit einem keramischen Film überzogener Gegenstand. Expired - Fee Related DE68920246T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP23078888 1988-09-13
JP23078788 1988-09-13

Publications (2)

Publication Number Publication Date
DE68920246D1 true DE68920246D1 (de) 1995-02-09
DE68920246T2 DE68920246T2 (de) 1995-05-04

Family

ID=26529538

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68920246T Expired - Fee Related DE68920246T2 (de) 1988-09-13 1989-09-12 Mit einem keramischen Film überzogener Gegenstand.

Country Status (5)

Country Link
EP (1) EP0361206B1 (de)
JP (1) JPH07102642B2 (de)
KR (1) KR930010193B1 (de)
CN (1) CN1041188A (de)
DE (1) DE68920246T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5041201A (en) * 1988-09-16 1991-08-20 Semiconductor Energy Laboratory Co., Ltd. Plasma processing method and apparatus
CA2072384A1 (en) * 1991-08-29 1993-03-01 Clifford L. Spiro Carbon fluoride compositions
DE4423891A1 (de) * 1994-07-07 1996-01-11 Daimler Benz Ag Schichtaufbau mit einer organischen Schicht und einer die organische Schicht bedeckenden und gegenüber der organischen Schicht härteren, transparenten Deckschicht sowie Verfahren zur Herstellung des Schichtaufbaus
DE4439924A1 (de) * 1994-11-08 1996-05-09 Bayerische Motoren Werke Ag Verwendung von kohlenstoffhaltigen Schichten
JP3637687B2 (ja) * 1996-07-13 2005-04-13 日新電機株式会社 自動車用ダイヤフラムの製造方法
EP1354640A1 (de) * 2002-04-19 2003-10-22 Dürr Systems GmbH Verfahren und Vorrichtung zum Härten einer Beschichtung
US7866342B2 (en) 2002-12-18 2011-01-11 Vapor Technologies, Inc. Valve component for faucet
US8220489B2 (en) 2002-12-18 2012-07-17 Vapor Technologies Inc. Faucet with wear-resistant valve component
US7866343B2 (en) 2002-12-18 2011-01-11 Masco Corporation Of Indiana Faucet
US8555921B2 (en) 2002-12-18 2013-10-15 Vapor Technologies Inc. Faucet component with coating
US20070026205A1 (en) 2005-08-01 2007-02-01 Vapor Technologies Inc. Article having patterned decorative coating
CN101570844B (zh) * 2008-04-30 2012-01-25 财团法人工业技术研究院 半透明涂层及其制造方法与应用
CN108688729B (zh) * 2017-11-22 2024-01-30 王子齐 轻量化乘用车承载式车身和车身覆盖件

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4675206A (en) * 1985-04-19 1987-06-23 Sumitomo Electric Industries, Ltd. Process for the production of a surface-coated article
JPH0676666B2 (ja) * 1987-02-10 1994-09-28 株式会社半導体エネルギ−研究所 炭素膜作製方法
KR930001013B1 (ko) * 1987-08-10 1993-02-12 가부시끼가이샤 한도다이 에네르기 겐뀨소 할로겐을 함유하는 카본 재료 및 그의 침착방법

Also Published As

Publication number Publication date
JPH07102642B2 (ja) 1995-11-08
KR930010193B1 (ko) 1993-10-15
DE68920246T2 (de) 1995-05-04
CN1041188A (zh) 1990-04-11
KR900004414A (ko) 1990-04-12
EP0361206A1 (de) 1990-04-04
EP0361206B1 (de) 1994-12-28
JPH02175142A (ja) 1990-07-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee