KR900004414A - 세라믹 필름 피복 물체 및 그 제작방법 - Google Patents
세라믹 필름 피복 물체 및 그 제작방법 Download PDFInfo
- Publication number
- KR900004414A KR900004414A KR1019890013109A KR890013109A KR900004414A KR 900004414 A KR900004414 A KR 900004414A KR 1019890013109 A KR1019890013109 A KR 1019890013109A KR 890013109 A KR890013109 A KR 890013109A KR 900004414 A KR900004414 A KR 900004414A
- Authority
- KR
- South Korea
- Prior art keywords
- carbon
- containing film
- film
- carbonaceous
- base member
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/10—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by other chemical means
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
- Automatic Cycles, And Cycles In General (AREA)
- Body Structure For Vehicles (AREA)
- Laminated Bodies (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1(A) 내지 1(C)도는 탄소 또는 주성분이 탄소인 물질로 만들어진 본 발명의 탄소 함유 필림의 보호 코팅으로 덮여진 샤시 등의 주요부분을 도시한 도면.
제2도는 본 발명의 플라즈마 CVD제조장치의 개략도.
Claims (15)
- 전도체 및 전도성 표면을 갖는 부재등에서 선정되고, 도표로 도색되고 유기물질을 갖는 기본 부재를 구비한 세라믹 필림과, 반투명 세라믹 필림으로 피복된 물체.
- 제1항에 있어서, 상기 세라믹 필림은 할로겐 원소가 첨가된 탄소함유 필림인 것을 특징으로 하는 물체.
- 제1항에 있어서, 상기 세라믹 필림은 Si3N4필림인 것을 특징으로 하는 물체.
- 제2항에 있어서, 상기 탄소질 필림은 방수적 특성을 갖는 것을 특징으로 하는 물체.
- 세라믹 필림으로 피복된 물체에 있어서, 상기 물체는 바람이나 우수에 노출된 도색 표면을 갖는 오토바이, 자전거, 자동차, 선박 및 항공기 등의 한 부재에 사용하기 위해 형성된 것을 특징으로 하는 물체.
- 제5항에 있어서, 상기 물체는 샤시를 형성하는 것을 특징으로 하는 물체.
- 제2항에 있어서, 상기 할로겐 원소는 플루오르인 것을 특징으로 하는 물체.
- 제2항에 있어서, 탄소함유 필림은 1×10Ω 내지 1013Ωcm의 고유저항을 갖는 것을 특징으로 하는 물체.
- 탄소질 함유 필림으로 피복된 물체에 있어서, 상기 탄소질 함유 필림은 전도체 및 전도성 표면을 갖는 부재에서 선정되고 도료로 도색되었으며 유기 물질을 갖는 기본부재와, 탄소 및 탄소를 주성분으로 하는 물질에서 선정된 탄소 함유 필림을 구비하고, 상기 탄소 함유 필림의 고유저항은 1×10Ω 내지 1.013Ωcm인 것을 특징으로 하는 물체.
- 제9항에 있어서, 상기 도료는 고유저항이 1×1015Ωcm이고 절연 특성이 있는 것을 특징으로 하는 물체.
- 제9항에 있어서, 상기 탄소 함유 필림은 반투명체인 것을 특징으로 하는 물체.
- 제9항에 있어서, 상기 물체는 바람 및 우수에 노출된 도색 표면을 갖는 오토바이, 자건거, 자동차, 선박 및 항공기 등의 부재에 사용하기 위해 형성된 것을 특징으로 하는 물체.
- 제9항에 있어서, 상기 물체는 샤시를 형성하는 것을 특징으로 하는 물체.
- 탄소질 함유 필름으로 피복된 물체의 제작방법에 있어서, 전도체 및 전도성 표면을 갖는 부재등으로부터 선정된 기본부재를 저압력 분위기 상태로 유지시키고, 상기 기본부재에 교류 및 직류바이어스를 가하며, 플라즈마를 생성하기 위해 저압력 분위기 상태에 탄소 함유 가스를 주입하고, 물체 및 탄소 및 탄소를 주성분으로 하는 물질로부터 선정된 탄소질 함유 필림을 형성하기 위해 기본부재상에 탄소질 함유 필림을 형성하는 단계를 구비하는 것을 특징으로 하는 물체의 제작방법.
- 제14항에 있어서, 상기 기본부재는 요철부를 가지며, 바이어스 전계는, 요부의 두꺼운 탄소질 함유 필림을 형성하기 위해 철부보다도 요부상에 집중된 것을 특징으로 하는 물체의 방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63-230788 | 1988-09-13 | ||
JP23078788 | 1988-09-13 | ||
JP63-230787 | 1988-09-13 | ||
JP23078888 | 1988-09-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR900004414A true KR900004414A (ko) | 1990-04-12 |
KR930010193B1 KR930010193B1 (ko) | 1993-10-15 |
Family
ID=26529538
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019890013109A KR930010193B1 (ko) | 1988-09-13 | 1989-09-11 | 세라믹막 및 탄소막으로 덮인 부품과 그 부품 제작방법 |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0361206B1 (ko) |
JP (1) | JPH07102642B2 (ko) |
KR (1) | KR930010193B1 (ko) |
CN (1) | CN1041188A (ko) |
DE (1) | DE68920246T2 (ko) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5041201A (en) * | 1988-09-16 | 1991-08-20 | Semiconductor Energy Laboratory Co., Ltd. | Plasma processing method and apparatus |
CA2072384A1 (en) * | 1991-08-29 | 1993-03-01 | Clifford L. Spiro | Carbon fluoride compositions |
DE4423891A1 (de) * | 1994-07-07 | 1996-01-11 | Daimler Benz Ag | Schichtaufbau mit einer organischen Schicht und einer die organische Schicht bedeckenden und gegenüber der organischen Schicht härteren, transparenten Deckschicht sowie Verfahren zur Herstellung des Schichtaufbaus |
DE4439924A1 (de) * | 1994-11-08 | 1996-05-09 | Bayerische Motoren Werke Ag | Verwendung von kohlenstoffhaltigen Schichten |
JP3637687B2 (ja) * | 1996-07-13 | 2005-04-13 | 日新電機株式会社 | 自動車用ダイヤフラムの製造方法 |
EP1354640A1 (de) | 2002-04-19 | 2003-10-22 | Dürr Systems GmbH | Verfahren und Vorrichtung zum Härten einer Beschichtung |
US7866342B2 (en) | 2002-12-18 | 2011-01-11 | Vapor Technologies, Inc. | Valve component for faucet |
US7866343B2 (en) | 2002-12-18 | 2011-01-11 | Masco Corporation Of Indiana | Faucet |
US8220489B2 (en) | 2002-12-18 | 2012-07-17 | Vapor Technologies Inc. | Faucet with wear-resistant valve component |
US8555921B2 (en) | 2002-12-18 | 2013-10-15 | Vapor Technologies Inc. | Faucet component with coating |
US20070026205A1 (en) | 2005-08-01 | 2007-02-01 | Vapor Technologies Inc. | Article having patterned decorative coating |
CN101570844B (zh) * | 2008-04-30 | 2012-01-25 | 财团法人工业技术研究院 | 半透明涂层及其制造方法与应用 |
CN108688729B (zh) * | 2017-11-22 | 2024-01-30 | 王子齐 | 轻量化乘用车承载式车身和车身覆盖件 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4675206A (en) * | 1985-04-19 | 1987-06-23 | Sumitomo Electric Industries, Ltd. | Process for the production of a surface-coated article |
JPH0676666B2 (ja) * | 1987-02-10 | 1994-09-28 | 株式会社半導体エネルギ−研究所 | 炭素膜作製方法 |
DE3852357T2 (de) * | 1987-08-10 | 1995-04-27 | Semiconductor Energy Lab | Dünnfilmkohlewerkstoff und Verfahren zum Aufbringen. |
-
1989
- 1989-09-11 KR KR1019890013109A patent/KR930010193B1/ko not_active IP Right Cessation
- 1989-09-12 EP EP89116885A patent/EP0361206B1/en not_active Expired - Lifetime
- 1989-09-12 JP JP1236335A patent/JPH07102642B2/ja not_active Expired - Fee Related
- 1989-09-12 DE DE68920246T patent/DE68920246T2/de not_active Expired - Fee Related
- 1989-09-13 CN CN89107368A patent/CN1041188A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
DE68920246D1 (de) | 1995-02-09 |
KR930010193B1 (ko) | 1993-10-15 |
JPH07102642B2 (ja) | 1995-11-08 |
EP0361206B1 (en) | 1994-12-28 |
DE68920246T2 (de) | 1995-05-04 |
CN1041188A (zh) | 1990-04-11 |
JPH02175142A (ja) | 1990-07-06 |
EP0361206A1 (en) | 1990-04-04 |
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