KR900004414A - 세라믹 필름 피복 물체 및 그 제작방법 - Google Patents

세라믹 필름 피복 물체 및 그 제작방법 Download PDF

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KR900004414A
KR900004414A KR1019890013109A KR890013109A KR900004414A KR 900004414 A KR900004414 A KR 900004414A KR 1019890013109 A KR1019890013109 A KR 1019890013109A KR 890013109 A KR890013109 A KR 890013109A KR 900004414 A KR900004414 A KR 900004414A
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South Korea
Prior art keywords
carbon
containing film
film
carbonaceous
base member
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KR1019890013109A
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KR930010193B1 (ko
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순페이 야마자끼
시게노리 하야시
나오끼 히로세
노리야 이시다
준이찌 다께야마
마리 사사끼
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가부시끼 가이샤 한도다이 에네르기겐뀨쇼
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Publication of KR900004414A publication Critical patent/KR900004414A/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/10—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by other chemical means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes

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  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Automatic Cycles, And Cycles In General (AREA)
  • Body Structure For Vehicles (AREA)
  • Laminated Bodies (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

내용 없음

Description

세라믹 필림 피복 물체 및 그 제작방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1(A) 내지 1(C)도는 탄소 또는 주성분이 탄소인 물질로 만들어진 본 발명의 탄소 함유 필림의 보호 코팅으로 덮여진 샤시 등의 주요부분을 도시한 도면.
제2도는 본 발명의 플라즈마 CVD제조장치의 개략도.

Claims (15)

  1. 전도체 및 전도성 표면을 갖는 부재등에서 선정되고, 도표로 도색되고 유기물질을 갖는 기본 부재를 구비한 세라믹 필림과, 반투명 세라믹 필림으로 피복된 물체.
  2. 제1항에 있어서, 상기 세라믹 필림은 할로겐 원소가 첨가된 탄소함유 필림인 것을 특징으로 하는 물체.
  3. 제1항에 있어서, 상기 세라믹 필림은 Si3N4필림인 것을 특징으로 하는 물체.
  4. 제2항에 있어서, 상기 탄소질 필림은 방수적 특성을 갖는 것을 특징으로 하는 물체.
  5. 세라믹 필림으로 피복된 물체에 있어서, 상기 물체는 바람이나 우수에 노출된 도색 표면을 갖는 오토바이, 자전거, 자동차, 선박 및 항공기 등의 한 부재에 사용하기 위해 형성된 것을 특징으로 하는 물체.
  6. 제5항에 있어서, 상기 물체는 샤시를 형성하는 것을 특징으로 하는 물체.
  7. 제2항에 있어서, 상기 할로겐 원소는 플루오르인 것을 특징으로 하는 물체.
  8. 제2항에 있어서, 탄소함유 필림은 1×10Ω 내지 1013Ωcm의 고유저항을 갖는 것을 특징으로 하는 물체.
  9. 탄소질 함유 필림으로 피복된 물체에 있어서, 상기 탄소질 함유 필림은 전도체 및 전도성 표면을 갖는 부재에서 선정되고 도료로 도색되었으며 유기 물질을 갖는 기본부재와, 탄소 및 탄소를 주성분으로 하는 물질에서 선정된 탄소 함유 필림을 구비하고, 상기 탄소 함유 필림의 고유저항은 1×10Ω 내지 1.013Ωcm인 것을 특징으로 하는 물체.
  10. 제9항에 있어서, 상기 도료는 고유저항이 1×1015Ωcm이고 절연 특성이 있는 것을 특징으로 하는 물체.
  11. 제9항에 있어서, 상기 탄소 함유 필림은 반투명체인 것을 특징으로 하는 물체.
  12. 제9항에 있어서, 상기 물체는 바람 및 우수에 노출된 도색 표면을 갖는 오토바이, 자건거, 자동차, 선박 및 항공기 등의 부재에 사용하기 위해 형성된 것을 특징으로 하는 물체.
  13. 제9항에 있어서, 상기 물체는 샤시를 형성하는 것을 특징으로 하는 물체.
  14. 탄소질 함유 필름으로 피복된 물체의 제작방법에 있어서, 전도체 및 전도성 표면을 갖는 부재등으로부터 선정된 기본부재를 저압력 분위기 상태로 유지시키고, 상기 기본부재에 교류 및 직류바이어스를 가하며, 플라즈마를 생성하기 위해 저압력 분위기 상태에 탄소 함유 가스를 주입하고, 물체 및 탄소 및 탄소를 주성분으로 하는 물질로부터 선정된 탄소질 함유 필림을 형성하기 위해 기본부재상에 탄소질 함유 필림을 형성하는 단계를 구비하는 것을 특징으로 하는 물체의 제작방법.
  15. 제14항에 있어서, 상기 기본부재는 요철부를 가지며, 바이어스 전계는, 요부의 두꺼운 탄소질 함유 필림을 형성하기 위해 철부보다도 요부상에 집중된 것을 특징으로 하는 물체의 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019890013109A 1988-09-13 1989-09-11 세라믹막 및 탄소막으로 덮인 부품과 그 부품 제작방법 KR930010193B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP63-230788 1988-09-13
JP23078788 1988-09-13
JP63-230787 1988-09-13
JP23078888 1988-09-13

Publications (2)

Publication Number Publication Date
KR900004414A true KR900004414A (ko) 1990-04-12
KR930010193B1 KR930010193B1 (ko) 1993-10-15

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Application Number Title Priority Date Filing Date
KR1019890013109A KR930010193B1 (ko) 1988-09-13 1989-09-11 세라믹막 및 탄소막으로 덮인 부품과 그 부품 제작방법

Country Status (5)

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EP (1) EP0361206B1 (ko)
JP (1) JPH07102642B2 (ko)
KR (1) KR930010193B1 (ko)
CN (1) CN1041188A (ko)
DE (1) DE68920246T2 (ko)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5041201A (en) * 1988-09-16 1991-08-20 Semiconductor Energy Laboratory Co., Ltd. Plasma processing method and apparatus
CA2072384A1 (en) * 1991-08-29 1993-03-01 Clifford L. Spiro Carbon fluoride compositions
DE4423891A1 (de) * 1994-07-07 1996-01-11 Daimler Benz Ag Schichtaufbau mit einer organischen Schicht und einer die organische Schicht bedeckenden und gegenüber der organischen Schicht härteren, transparenten Deckschicht sowie Verfahren zur Herstellung des Schichtaufbaus
DE4439924A1 (de) * 1994-11-08 1996-05-09 Bayerische Motoren Werke Ag Verwendung von kohlenstoffhaltigen Schichten
JP3637687B2 (ja) * 1996-07-13 2005-04-13 日新電機株式会社 自動車用ダイヤフラムの製造方法
EP1354640A1 (de) 2002-04-19 2003-10-22 Dürr Systems GmbH Verfahren und Vorrichtung zum Härten einer Beschichtung
US7866342B2 (en) 2002-12-18 2011-01-11 Vapor Technologies, Inc. Valve component for faucet
US7866343B2 (en) 2002-12-18 2011-01-11 Masco Corporation Of Indiana Faucet
US8220489B2 (en) 2002-12-18 2012-07-17 Vapor Technologies Inc. Faucet with wear-resistant valve component
US8555921B2 (en) 2002-12-18 2013-10-15 Vapor Technologies Inc. Faucet component with coating
US20070026205A1 (en) 2005-08-01 2007-02-01 Vapor Technologies Inc. Article having patterned decorative coating
CN101570844B (zh) * 2008-04-30 2012-01-25 财团法人工业技术研究院 半透明涂层及其制造方法与应用
CN108688729B (zh) * 2017-11-22 2024-01-30 王子齐 轻量化乘用车承载式车身和车身覆盖件

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4675206A (en) * 1985-04-19 1987-06-23 Sumitomo Electric Industries, Ltd. Process for the production of a surface-coated article
JPH0676666B2 (ja) * 1987-02-10 1994-09-28 株式会社半導体エネルギ−研究所 炭素膜作製方法
DE3852357T2 (de) * 1987-08-10 1995-04-27 Semiconductor Energy Lab Dünnfilmkohlewerkstoff und Verfahren zum Aufbringen.

Also Published As

Publication number Publication date
DE68920246D1 (de) 1995-02-09
KR930010193B1 (ko) 1993-10-15
JPH07102642B2 (ja) 1995-11-08
EP0361206B1 (en) 1994-12-28
DE68920246T2 (de) 1995-05-04
CN1041188A (zh) 1990-04-11
JPH02175142A (ja) 1990-07-06
EP0361206A1 (en) 1990-04-04

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