DE68911987T2 - Ladungsteilchenstrahlgerät. - Google Patents

Ladungsteilchenstrahlgerät.

Info

Publication number
DE68911987T2
DE68911987T2 DE68911987T DE68911987T DE68911987T2 DE 68911987 T2 DE68911987 T2 DE 68911987T2 DE 68911987 T DE68911987 T DE 68911987T DE 68911987 T DE68911987 T DE 68911987T DE 68911987 T2 DE68911987 T2 DE 68911987T2
Authority
DE
Germany
Prior art keywords
charged particle
particle beam
beam device
charged
particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68911987T
Other languages
English (en)
Other versions
DE68911987D1 (de
Inventor
Pieter Kruit
Der Mast Karel Diederick Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of DE68911987D1 publication Critical patent/DE68911987D1/de
Application granted granted Critical
Publication of DE68911987T2 publication Critical patent/DE68911987T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H01J37/1416—Electromagnetic lenses with superconducting coils
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Electron Sources, Ion Sources (AREA)
DE68911987T 1988-05-09 1989-05-03 Ladungsteilchenstrahlgerät. Expired - Fee Related DE68911987T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8801208A NL8801208A (nl) 1988-05-09 1988-05-09 Geladen deeltjes bundel apparaat.

Publications (2)

Publication Number Publication Date
DE68911987D1 DE68911987D1 (de) 1994-02-17
DE68911987T2 true DE68911987T2 (de) 1994-07-07

Family

ID=19852277

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68911987T Expired - Fee Related DE68911987T2 (de) 1988-05-09 1989-05-03 Ladungsteilchenstrahlgerät.

Country Status (5)

Country Link
US (1) US4977324A (de)
EP (1) EP0341781B1 (de)
JP (1) JPH0249339A (de)
DE (1) DE68911987T2 (de)
NL (1) NL8801208A (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5466904A (en) * 1993-12-23 1995-11-14 International Business Machines Corporation Electron beam lithography system
US5635719A (en) * 1996-07-23 1997-06-03 International Business Machines Corporation Variable curvilinear axis deflection means for particle optical lenses
US5757010A (en) * 1996-12-18 1998-05-26 International Business Machines Corporation Curvilinear variable axis lens correction with centered dipoles
US6053241A (en) * 1998-09-17 2000-04-25 Nikon Corporation Cooling method and apparatus for charged particle lenses and deflectors
US6130432A (en) * 1999-04-13 2000-10-10 International Business Machines Corporation Particle beam system with dynamic focusing
US6768117B1 (en) * 2000-07-25 2004-07-27 Applied Materials, Inc. Immersion lens with magnetic shield for charged particle beam system
DE10044199B9 (de) 2000-09-07 2005-07-28 Carl Zeiss Smt Ag Ablenkanordnung und Projektionssystem für geladene Teilchen
DE10109965A1 (de) 2001-03-01 2002-09-12 Zeiss Carl Teilchenoptische Linsenanordnung und Verfahren unter Einsatz einer solchen Linsenanordnung
SG11201700803VA (en) 2015-02-03 2017-03-30 Mitsubishi Gas Chemical Co Resin composition, prepreg, metal foil-clad laminate, resin composite sheet, and printed wiring board

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL294726A (de) * 1962-07-05
FR2413776A1 (fr) * 1978-01-03 1979-07-27 Thomson Csf Objectif d'optique electronique
US4376249A (en) * 1980-11-06 1983-03-08 International Business Machines Corporation Variable axis electron beam projection system
FR2532112A1 (fr) * 1982-08-17 1984-02-24 Commissariat Energie Atomique Procede pour faire varier en fonction du temps la trajectoire d'un faisceau de particules chargees
US4544846A (en) * 1983-06-28 1985-10-01 International Business Machines Corporation Variable axis immersion lens electron beam projection system
GB2164202A (en) * 1984-09-05 1986-03-12 Philips Electronic Associated Charged particle beam apparatus
NL8602177A (nl) * 1986-08-27 1988-03-16 Philips Nv Electronen detectie met energie discriminatie.

Also Published As

Publication number Publication date
EP0341781B1 (de) 1994-01-05
DE68911987D1 (de) 1994-02-17
JPH0249339A (ja) 1990-02-19
EP0341781A1 (de) 1989-11-15
US4977324A (en) 1990-12-11
NL8801208A (nl) 1989-12-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PHILIPS ELECTRONICS N.V., EINDHOVEN, NL

8339 Ceased/non-payment of the annual fee