DE3684228D1 - Geladenes teilchenstrahl-lithographiesystem. - Google Patents

Geladenes teilchenstrahl-lithographiesystem.

Info

Publication number
DE3684228D1
DE3684228D1 DE8686114612T DE3684228T DE3684228D1 DE 3684228 D1 DE3684228 D1 DE 3684228D1 DE 8686114612 T DE8686114612 T DE 8686114612T DE 3684228 T DE3684228 T DE 3684228T DE 3684228 D1 DE3684228 D1 DE 3684228D1
Authority
DE
Germany
Prior art keywords
charged particle
particle beam
lithography system
beam lithography
charged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686114612T
Other languages
English (en)
Inventor
Norio Saitou
Masahide Okumura
Tsutomu Komoda
Mitsuo Ooyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE3684228D1 publication Critical patent/DE3684228D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H01J37/3177—Multi-beam, e.g. fly's eye, comb probe
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Electron Beam Exposure (AREA)
DE8686114612T 1985-10-25 1986-10-22 Geladenes teilchenstrahl-lithographiesystem. Expired - Lifetime DE3684228D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60237498A JPS6298724A (ja) 1985-10-25 1985-10-25 電子線描画装置

Publications (1)

Publication Number Publication Date
DE3684228D1 true DE3684228D1 (de) 1992-04-16

Family

ID=17016205

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686114612T Expired - Lifetime DE3684228D1 (de) 1985-10-25 1986-10-22 Geladenes teilchenstrahl-lithographiesystem.

Country Status (4)

Country Link
US (1) US4829444A (de)
EP (1) EP0220668B1 (de)
JP (1) JPS6298724A (de)
DE (1) DE3684228D1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6420619A (en) * 1987-07-15 1989-01-24 Toshiba Corp Electron beam aligner
US5089774A (en) * 1989-12-26 1992-02-18 Sharp Kabushiki Kaisha Apparatus and a method for checking a semiconductor
JP3400601B2 (ja) * 1995-04-06 2003-04-28 富士通株式会社 荷電粒子ビーム露光方法及び装置
JP3728015B2 (ja) 1996-06-12 2005-12-21 キヤノン株式会社 電子ビーム露光システム及びそれを用いたデバイス製造方法
US5798524A (en) * 1996-08-07 1998-08-25 Gatan, Inc. Automated adjustment of an energy filtering transmission electron microscope
US6184524B1 (en) 1996-08-07 2001-02-06 Gatan, Inc. Automated set up of an energy filtering transmission electron microscope
JP2867982B2 (ja) * 1996-11-29 1999-03-10 日本電気株式会社 半導体装置の製造装置
JPH11329928A (ja) * 1998-05-12 1999-11-30 Advantest Corp 電子ビーム露光装置
JP3982913B2 (ja) * 1998-07-17 2007-09-26 株式会社アドバンテスト 荷電粒子ビーム露光装置
JP4251784B2 (ja) * 2001-04-09 2009-04-08 株式会社アドバンテスト 電子ビーム露光装置、照射位置算出方法
JP2005276869A (ja) * 2004-03-23 2005-10-06 Jeol Ltd 荷電粒子ビーム描画装置。

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56124234A (en) * 1980-03-05 1981-09-29 Hitachi Ltd Correcting method for electron beam deflection
US4430571A (en) * 1981-04-16 1984-02-07 Control Data Corporation Method and apparatus for exposing multi-level registered patterns interchangeably between stations of a multi-station electron-beam array lithography (EBAL) system
JPS57180128A (en) * 1981-04-30 1982-11-06 Toshiba Corp Equipment for electron beam exposure
US4390789A (en) * 1981-05-21 1983-06-28 Control Data Corporation Electron beam array lithography system employing multiple parallel array optics channels and method of operation
US4433384A (en) * 1981-10-05 1984-02-21 Varian Associates, Inc. Pattern data handling system for an electron beam exposure system
US4694178A (en) * 1985-06-28 1987-09-15 Control Data Corporation Multiple channel electron beam optical column lithography system and method of operation

Also Published As

Publication number Publication date
EP0220668A3 (en) 1989-01-11
JPS6298724A (ja) 1987-05-08
EP0220668A2 (de) 1987-05-06
US4829444A (en) 1989-05-09
EP0220668B1 (de) 1992-03-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition