NL8801208A - Geladen deeltjes bundel apparaat. - Google Patents

Geladen deeltjes bundel apparaat. Download PDF

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Publication number
NL8801208A
NL8801208A NL8801208A NL8801208A NL8801208A NL 8801208 A NL8801208 A NL 8801208A NL 8801208 A NL8801208 A NL 8801208A NL 8801208 A NL8801208 A NL 8801208A NL 8801208 A NL8801208 A NL 8801208A
Authority
NL
Netherlands
Prior art keywords
particle beam
charged particle
beam device
axis
superconducting
Prior art date
Application number
NL8801208A
Other languages
English (en)
Dutch (nl)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Priority to NL8801208A priority Critical patent/NL8801208A/nl
Priority to US07/344,196 priority patent/US4977324A/en
Priority to DE68911987T priority patent/DE68911987T2/de
Priority to EP89201150A priority patent/EP0341781B1/de
Priority to JP1114312A priority patent/JPH0249339A/ja
Publication of NL8801208A publication Critical patent/NL8801208A/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H01J37/1416—Electromagnetic lenses with superconducting coils
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Electron Sources, Ion Sources (AREA)
NL8801208A 1988-05-09 1988-05-09 Geladen deeltjes bundel apparaat. NL8801208A (nl)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NL8801208A NL8801208A (nl) 1988-05-09 1988-05-09 Geladen deeltjes bundel apparaat.
US07/344,196 US4977324A (en) 1988-05-09 1989-04-27 Charged particle beam apparatus
DE68911987T DE68911987T2 (de) 1988-05-09 1989-05-03 Ladungsteilchenstrahlgerät.
EP89201150A EP0341781B1 (de) 1988-05-09 1989-05-03 Ladungsteilchenstrahlgerät
JP1114312A JPH0249339A (ja) 1988-05-09 1989-05-09 荷電粒子ビーム装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8801208 1988-05-09
NL8801208A NL8801208A (nl) 1988-05-09 1988-05-09 Geladen deeltjes bundel apparaat.

Publications (1)

Publication Number Publication Date
NL8801208A true NL8801208A (nl) 1989-12-01

Family

ID=19852277

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8801208A NL8801208A (nl) 1988-05-09 1988-05-09 Geladen deeltjes bundel apparaat.

Country Status (5)

Country Link
US (1) US4977324A (de)
EP (1) EP0341781B1 (de)
JP (1) JPH0249339A (de)
DE (1) DE68911987T2 (de)
NL (1) NL8801208A (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5466904A (en) * 1993-12-23 1995-11-14 International Business Machines Corporation Electron beam lithography system
US5635719A (en) * 1996-07-23 1997-06-03 International Business Machines Corporation Variable curvilinear axis deflection means for particle optical lenses
US5757010A (en) * 1996-12-18 1998-05-26 International Business Machines Corporation Curvilinear variable axis lens correction with centered dipoles
US6053241A (en) * 1998-09-17 2000-04-25 Nikon Corporation Cooling method and apparatus for charged particle lenses and deflectors
US6130432A (en) * 1999-04-13 2000-10-10 International Business Machines Corporation Particle beam system with dynamic focusing
US6768117B1 (en) * 2000-07-25 2004-07-27 Applied Materials, Inc. Immersion lens with magnetic shield for charged particle beam system
DE10044199B9 (de) 2000-09-07 2005-07-28 Carl Zeiss Smt Ag Ablenkanordnung und Projektionssystem für geladene Teilchen
DE10109965A1 (de) 2001-03-01 2002-09-12 Zeiss Carl Teilchenoptische Linsenanordnung und Verfahren unter Einsatz einer solchen Linsenanordnung
WO2016125657A1 (ja) 2015-02-03 2016-08-11 三菱瓦斯化学株式会社 樹脂組成物、プリプレグ、金属箔張積層板、樹脂複合シート、及びプリント配線板

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL294726A (de) * 1962-07-05
FR2413776A1 (fr) * 1978-01-03 1979-07-27 Thomson Csf Objectif d'optique electronique
US4376249A (en) * 1980-11-06 1983-03-08 International Business Machines Corporation Variable axis electron beam projection system
FR2532112A1 (fr) * 1982-08-17 1984-02-24 Commissariat Energie Atomique Procede pour faire varier en fonction du temps la trajectoire d'un faisceau de particules chargees
US4544846A (en) * 1983-06-28 1985-10-01 International Business Machines Corporation Variable axis immersion lens electron beam projection system
GB2164202A (en) * 1984-09-05 1986-03-12 Philips Electronic Associated Charged particle beam apparatus
NL8602177A (nl) * 1986-08-27 1988-03-16 Philips Nv Electronen detectie met energie discriminatie.

Also Published As

Publication number Publication date
JPH0249339A (ja) 1990-02-19
EP0341781A1 (de) 1989-11-15
EP0341781B1 (de) 1994-01-05
DE68911987D1 (de) 1994-02-17
DE68911987T2 (de) 1994-07-07
US4977324A (en) 1990-12-11

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Legal Events

Date Code Title Description
A1B A search report has been drawn up
BV The patent application has lapsed