DE68909988D1 - Vorrichtung zur kontinuierlichen Vacuumbeschichtung. - Google Patents

Vorrichtung zur kontinuierlichen Vacuumbeschichtung.

Info

Publication number
DE68909988D1
DE68909988D1 DE89106353T DE68909988T DE68909988D1 DE 68909988 D1 DE68909988 D1 DE 68909988D1 DE 89106353 T DE89106353 T DE 89106353T DE 68909988 T DE68909988 T DE 68909988T DE 68909988 D1 DE68909988 D1 DE 68909988D1
Authority
DE
Germany
Prior art keywords
vacuum coating
continuous vacuum
continuous
coating
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE89106353T
Other languages
English (en)
Other versions
DE68909988T2 (de
Inventor
Kenichi Hiroshima Techn Yanagi
Toshio Hiroshima Techn Taguchi
Hajime Hiroshima Techn I Okita
Heizaburo Hiroshima M Furukawa
Susumu Hiroshima Mach Kamikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP8730688A external-priority patent/JPH0733577B2/ja
Priority claimed from JP9903888A external-priority patent/JPH0730450B2/ja
Priority claimed from JP63113469A external-priority patent/JPH0768621B2/ja
Priority claimed from JP63270943A external-priority patent/JPH02118073A/ja
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Application granted granted Critical
Publication of DE68909988D1 publication Critical patent/DE68909988D1/de
Publication of DE68909988T2 publication Critical patent/DE68909988T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/168—Sealings between relatively-moving surfaces which permits material to be continuously conveyed
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
DE89106353T 1988-04-11 1989-04-11 Vorrichtung zur kontinuierlichen Vacuumbeschichtung. Expired - Fee Related DE68909988T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP8730688A JPH0733577B2 (ja) 1988-04-11 1988-04-11 真空蒸着装置
JP9903888A JPH0730450B2 (ja) 1988-04-21 1988-04-21 連続真空蒸着装置
JP63113469A JPH0768621B2 (ja) 1988-05-12 1988-05-12 連続真空蒸着装置
JP63270943A JPH02118073A (ja) 1988-10-28 1988-10-28 連続真空蒸着装置

Publications (2)

Publication Number Publication Date
DE68909988D1 true DE68909988D1 (de) 1993-11-25
DE68909988T2 DE68909988T2 (de) 1994-03-17

Family

ID=27467365

Family Applications (1)

Application Number Title Priority Date Filing Date
DE89106353T Expired - Fee Related DE68909988T2 (de) 1988-04-11 1989-04-11 Vorrichtung zur kontinuierlichen Vacuumbeschichtung.

Country Status (4)

Country Link
US (1) US5000114A (de)
EP (1) EP0337369B1 (de)
KR (1) KR920003591B1 (de)
DE (1) DE68909988T2 (de)

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US5356672A (en) * 1990-05-09 1994-10-18 Jet Process Corporation Method for microwave plasma assisted supersonic gas jet deposition of thin films
ATE125392T1 (de) * 1990-05-10 1995-08-15 Eastman Kodak Co Gerät zur plasmabehandlung eines durchgehenden materials.
AU644177B2 (en) * 1990-05-10 1993-12-02 Eastman Kodak Company Apparatus for-plasma treatment of continuous material
DE4019965A1 (de) * 1990-06-21 1992-01-09 Deutsche Forsch Luft Raumfahrt Verfahren und vorrichtung zum beschichten von substratmaterial
US5356673A (en) * 1991-03-18 1994-10-18 Jet Process Corporation Evaporation system and method for gas jet deposition of thin film materials
DE4324320B4 (de) * 1992-07-24 2006-08-31 Fuji Electric Co., Ltd., Kawasaki Verfahren und Vorrichtung zur Herstellung einer als dünne Schicht ausgebildeten fotovoltaischen Umwandlungsvorrichtung
JP3315238B2 (ja) * 1994-02-10 2002-08-19 富士写真フイルム株式会社 感光材料用支持体の真空処理用シール方法及び装置
US5571332A (en) * 1995-02-10 1996-11-05 Jet Process Corporation Electron jet vapor deposition system
US5826773A (en) * 1997-01-31 1998-10-27 Straemke; Siegfried Rope material transfer structure
EP0989455A1 (de) * 1998-09-22 2000-03-29 Agfa-Gevaert N.V. Gerät zur kontinuierlichen Vakuumbehandlung von Blattmaterial
US6250222B1 (en) * 1998-09-22 2001-06-26 Agfa-Gevaert Apparatus for the continuous treatment of sheet material under reduced pressure
DE19843818A1 (de) 1998-09-24 2000-03-30 Leybold Systems Gmbh Bedampfungsvorrichtung für Vakuum-Bedampfungsanlagen
DE19844357C2 (de) * 1998-09-28 2001-04-05 Hilmar Weinert Bandbedampfungsanlage und Verfahren zur Herstellung von planparallelen Plättchen
DK1004369T4 (da) † 1998-11-26 2009-03-09 Cockerill Rech & Dev Forseglingssluse til et vakuumkammer
US6082292A (en) * 1999-01-05 2000-07-04 Wisconsin Alumni Research Foundation Sealing roller system for surface treatment gas reactors
DE60143926D1 (de) * 2000-06-22 2011-03-10 Junji Kido Vorrichtung und Verfahren zum Vakuum-Ausdampfen
JP2003344595A (ja) * 2002-05-31 2003-12-03 Fuji Photo Film Co Ltd シート体製造装置
EP1479789A1 (de) * 2003-05-23 2004-11-24 Recherche Et Developpement Du Groupe Cockerill Sambre Abgedichtete Schleuse für eine in-line Vakuumbeschichtungsanlage
JP2006085933A (ja) * 2004-09-14 2006-03-30 Toshiba Matsushita Display Technology Co Ltd 表示装置の製造方法及び製造装置
US7288285B2 (en) 2004-09-21 2007-10-30 Eastman Kodak Company Delivering organic powder to a vaporization zone
US7501152B2 (en) * 2004-09-21 2009-03-10 Eastman Kodak Company Delivering particulate material to a vaporization zone
US7501151B2 (en) * 2004-09-21 2009-03-10 Eastman Kodak Company Delivering particulate material to a vaporization zone
US7288286B2 (en) 2004-09-21 2007-10-30 Eastman Kodak Company Delivering organic powder to a vaporization zone
JP4789551B2 (ja) * 2005-09-06 2011-10-12 株式会社半導体エネルギー研究所 有機ｅｌ成膜装置
US7638168B2 (en) * 2005-11-10 2009-12-29 Eastman Kodak Company Deposition system using sealed replenishment container
US20080241366A1 (en) * 2007-03-29 2008-10-02 Intevac Corporation Apparatus for and method of applying lubricant coatings to magnetic disks via a vapor flow path including a selectively opened and closed shutter
US20090047417A1 (en) * 2007-03-30 2009-02-19 Barnes Michael S Method and system for vapor phase application of lubricant in disk media manufacturing process
US8323408B2 (en) * 2007-12-10 2012-12-04 Solopower, Inc. Methods and apparatus to provide group VIA materials to reactors for group IBIIIAVIA film formation
US20100159132A1 (en) * 2008-12-18 2010-06-24 Veeco Instruments, Inc. Linear Deposition Source
US20100285218A1 (en) * 2008-12-18 2010-11-11 Veeco Instruments Inc. Linear Deposition Source
US20100282167A1 (en) * 2008-12-18 2010-11-11 Veeco Instruments Inc. Linear Deposition Source
DE102010060292B4 (de) 2010-11-01 2023-05-25 Antec Solar Gmbh Verfahren und CSS-Reaktor zum kontinuierlichen Beschichten von Substraten
WO2013028977A2 (en) * 2011-08-24 2013-02-28 Mustang Vacuum Systems, Inc. Apparatus and method for the evaporation and deposition of materials
US10155263B2 (en) 2012-09-28 2018-12-18 Ati Properties Llc Continuous casting of materials using pressure differential
KR101461738B1 (ko) * 2012-12-21 2014-11-14 주식회사 포스코 가열장치 및 이를 포함하는 코팅 시스템
CN108385081B (zh) * 2018-05-04 2024-01-12 华仪行(北京)科技有限公司 一种双仓自动镀膜装置

Family Cites Families (21)

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US814124A (en) * 1897-05-15 1906-03-06 Charles Henry Fish Apparatus for steaming fabrics.
NL85130C (de) * 1953-01-26
US2853047A (en) * 1954-12-23 1958-09-23 Vac Anstalt Installations for continuously treating strip-like materials in vacuum
US2989026A (en) * 1957-11-19 1961-06-20 Nat Steel Corp Vacuum coating apparatus
US2975753A (en) * 1958-11-18 1961-03-21 Nat Res Corp Vacuum coating apparatus
US3158507A (en) * 1960-01-11 1964-11-24 Continental Can Co Floating roller seal
NL293028A (de) * 1962-06-05
US3329524A (en) * 1963-06-12 1967-07-04 Temescal Metallurgical Corp Centrifugal-type vapor source
US3326177A (en) * 1963-09-12 1967-06-20 Pennsalt Chemicals Corp Metal vapor coating apparatus
US3365992A (en) * 1965-09-23 1968-01-30 Donald F. Dreher Web severing apparatus
GB1355798A (en) * 1970-05-28 1974-06-05 Bekaert Sa Nv Process for the deposition of metal coatings on to metal elements and on apparatus therefor
US3989862A (en) * 1970-10-13 1976-11-02 Jones & Laughlin Steel Corporation Method and apparatus for vapor-depositing coatings on substrates
US3683847A (en) * 1971-02-19 1972-08-15 Du Pont Apparatus for vacuum metallizing
BE795116A (fr) * 1972-02-08 1973-05-29 Cockerill Procede d'alimentation de bain d'evaporation
DE2747061A1 (de) * 1977-10-20 1979-04-26 Leybold Heraeus Gmbh & Co Kg Verfahren und vorrichtung zum beschichten von baendern in vakuumanlagen mit schleuseneinrichtungen
US4364995A (en) * 1981-02-04 1982-12-21 Minnesota Mining And Manufacturing Company Metal/metal oxide coatings
JPS6067657A (ja) * 1983-09-21 1985-04-18 Toshiba Corp 真空蒸着法
JPS60197872A (ja) * 1984-03-19 1985-10-07 Taiyo Yuden Co Ltd 合金の真空蒸着方法
JPS6173875A (ja) * 1984-09-17 1986-04-16 Mitsubishi Heavy Ind Ltd 流路幅調整板付き真空蒸着装置
JPS6196071A (ja) * 1984-10-17 1986-05-14 Hitachi Ltd 真空連続処理装置
JPS61280027A (ja) * 1985-06-06 1986-12-10 Canon Inc 磁気記録媒体の製造方法

Also Published As

Publication number Publication date
DE68909988T2 (de) 1994-03-17
US5000114A (en) 1991-03-19
KR920003591B1 (ko) 1992-05-04
EP0337369B1 (de) 1993-10-20
EP0337369A1 (de) 1989-10-18
KR890017388A (ko) 1989-12-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee