DE68902668D1 - Verfahren zur thermischen behandlung von galliumarsenid-einkristallen. - Google Patents

Verfahren zur thermischen behandlung von galliumarsenid-einkristallen.

Info

Publication number
DE68902668D1
DE68902668D1 DE8989303058T DE68902668T DE68902668D1 DE 68902668 D1 DE68902668 D1 DE 68902668D1 DE 8989303058 T DE8989303058 T DE 8989303058T DE 68902668 T DE68902668 T DE 68902668T DE 68902668 D1 DE68902668 D1 DE 68902668D1
Authority
DE
Germany
Prior art keywords
thermal treatment
gallium arsenide
arsenide crystals
crystals
gallium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8989303058T
Other languages
English (en)
Other versions
DE68902668T2 (de
Inventor
Yutaka Kitigawara
Susumu Kuwahara
Takao Takenaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Application granted granted Critical
Publication of DE68902668D1 publication Critical patent/DE68902668D1/de
Publication of DE68902668T2 publication Critical patent/DE68902668T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C30B29/42—Gallium arsenide
DE8989303058T 1988-03-25 1989-03-28 Verfahren zur thermischen behandlung von galliumarsenid-einkristallen. Expired - Lifetime DE68902668T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63069733A JPH01242498A (ja) 1988-03-25 1988-03-25 砒化ガリウム単結晶の熱処理方法

Publications (2)

Publication Number Publication Date
DE68902668D1 true DE68902668D1 (de) 1992-10-08
DE68902668T2 DE68902668T2 (de) 1993-01-28

Family

ID=13411314

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8989303058T Expired - Lifetime DE68902668T2 (de) 1988-03-25 1989-03-28 Verfahren zur thermischen behandlung von galliumarsenid-einkristallen.

Country Status (3)

Country Link
EP (1) EP0334684B1 (de)
JP (1) JPH01242498A (de)
DE (1) DE68902668T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2639470B2 (ja) * 1988-07-20 1997-08-13 株式会社ジャパンエナジー ＧａＡｓ単結晶のウエハの製造方法
JPH02293399A (ja) * 1989-05-08 1990-12-04 Showa Denko Kk ＧａＡｓインゴットの熱処理方法
JP3656261B2 (ja) * 1994-10-24 2005-06-08 住友電気工業株式会社 ＧａＡｓ結晶の熱処理方法
JP2005272201A (ja) * 2004-03-24 2005-10-06 Sumitomo Electric Ind Ltd ガリウム砒素単結晶とその製造方法
JP6459900B2 (ja) * 2015-10-26 2019-01-30 株式会社Sumco シリコンウェーハの検査方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2570394B1 (fr) * 1984-09-14 1986-12-05 Labo Electronique Physique Procede de realisation d'un monocristal d'arseniure de gallium et d'indium

Also Published As

Publication number Publication date
EP0334684B1 (de) 1992-09-02
EP0334684A1 (de) 1989-09-27
JPH01242498A (ja) 1989-09-27
DE68902668T2 (de) 1993-01-28
JPH0474320B2 (de) 1992-11-25

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Legal Events

Date Code Title Description
8381 Inventor (new situation)

Free format text: KITAGAWARA, YUTAKA, TAKASAKI-SHI GUNMA-KEN, JP KUWABARA, SUSUMU, ANNAKA-SHI GUNMA-KEN, JP TAKENAKA, TAKAO, HARAICHI, JP

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee