DE60335511D1 - Strahlteilender oder polarisierender Kubus und Herstellungsverfahren - Google Patents

Strahlteilender oder polarisierender Kubus und Herstellungsverfahren

Info

Publication number
DE60335511D1
DE60335511D1 DE60335511T DE60335511T DE60335511D1 DE 60335511 D1 DE60335511 D1 DE 60335511D1 DE 60335511 T DE60335511 T DE 60335511T DE 60335511 T DE60335511 T DE 60335511T DE 60335511 D1 DE60335511 D1 DE 60335511D1
Authority
DE
Germany
Prior art keywords
manufacturing process
beam splitting
polarizing cube
cube
polarizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60335511T
Other languages
English (en)
Inventor
Samad M Edlou
David H Peterson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML Holding NV
Original Assignee
ASML Holding NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML Holding NV filed Critical ASML Holding NV
Application granted granted Critical
Publication of DE60335511D1 publication Critical patent/DE60335511D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/142—Coating structures, e.g. thin films multilayers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Ceramic Engineering (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Optical Filters (AREA)
  • Polarising Elements (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Optical Elements (AREA)
DE60335511T 2002-10-01 2003-10-01 Strahlteilender oder polarisierender Kubus und Herstellungsverfahren Expired - Lifetime DE60335511D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/260,308 US6824654B2 (en) 2002-10-01 2002-10-01 Method of making a cube

Publications (1)

Publication Number Publication Date
DE60335511D1 true DE60335511D1 (de) 2011-02-10

Family

ID=31993528

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60335511T Expired - Lifetime DE60335511D1 (de) 2002-10-01 2003-10-01 Strahlteilender oder polarisierender Kubus und Herstellungsverfahren

Country Status (8)

Country Link
US (2) US6824654B2 (de)
EP (1) EP1406110B1 (de)
JP (1) JP2004126585A (de)
KR (1) KR100609794B1 (de)
CN (1) CN1329751C (de)
DE (1) DE60335511D1 (de)
SG (1) SG105589A1 (de)
TW (1) TWI278663B (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100406920C (zh) * 2005-03-22 2008-07-30 精工爱普生株式会社 光学制品及光学制品的制造方法
JP2006301585A (ja) * 2005-03-22 2006-11-02 Seiko Epson Corp 光学製品および光学製品の製造方法
US7593004B2 (en) 2005-06-02 2009-09-22 Eastman Kodak Company Touchscreen with conductive layer comprising carbon nanotubes
US20070141244A1 (en) * 2005-12-19 2007-06-21 Eastman Kodak Company Method of making a polarizer plate
US8867130B1 (en) 2010-07-22 2014-10-21 Vuv Analytics, Inc. Polarization device for vacuum ultraviolet or shorter wavelengths
CN102116917B (zh) * 2011-01-19 2012-06-27 四川欧瑞特光电科技有限公司 一种光学元件的光胶方法及其在角锥阵列中实施的方法
US9116158B2 (en) 2012-10-18 2015-08-25 Vuv Analytics, Inc. Vacuum ultraviolet absorption spectroscopy system and method
CN105676408B (zh) * 2016-03-14 2018-03-02 中国科学院西安光学精密机械研究所 用于棱镜胶合的支撑结构及胶合工艺
US10677767B2 (en) 2018-06-12 2020-06-09 Vuv Analytics, Inc. Vacuum ultraviolet absorption spectroscopy system and method

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB191301869A (en) * 1909-03-22 1913-03-20 Zeiss Carl Improvements in Optical Squares
DE1203978B (de) 1962-03-23 1965-10-28 Zeiss Carl Fa Spektralpolarimeter
US3559090A (en) * 1968-10-08 1971-01-26 Bausch & Lomb Polarization free beam divider
US3704934A (en) * 1971-08-16 1972-12-05 Union Carbide Corp Laser polarizing beam splitter
DE3206040A1 (de) * 1982-02-19 1983-09-01 Siemens AG, 1000 Berlin und 8000 München Reflexionsfreier optischer polarisator mit einem prisma
US4627688A (en) * 1983-07-01 1986-12-09 Sano Kiko Co., Ltd. Beam splitter
JPS6064304A (ja) 1983-09-19 1985-04-12 Nitto Koki Kk 無偏光ビ−ムスプリッタ−
JP2594902B2 (ja) * 1985-02-15 1997-03-26 株式会社日立製作所 テレビジョンカメラの補正方法
US5725626A (en) * 1986-06-18 1998-03-10 Canon Kabushiki Kaisha Method for manufacturing an optical element by bonding a plurality of elements
US4733926A (en) * 1986-11-10 1988-03-29 Lockheed Missiles & Space Company, Inc. Infrared polarizing beamsplitter
JPS63299591A (ja) * 1987-05-29 1988-12-07 Matsushita Electric Ind Co Ltd 色分解光学系
JPH0223301A (ja) * 1988-07-12 1990-01-25 Toyo Commun Equip Co Ltd 光学部品の接着力強化構造
US5400179A (en) * 1992-02-18 1995-03-21 Asahi Kogaku Kogyo Kabushiki Kaisha Optical multilayer thin film and beam splitter
ATE160884T1 (de) * 1992-06-23 1997-12-15 Koninkl Philips Electronics Nv Polarisationsempfindlicher strahlteiler, methode zur herstellung eines solchen und magneto- optische abtastvorrichtung mit einem solchen strahlteiler
US5339441A (en) * 1992-07-02 1994-08-16 Advanced Intervention Systems, Inc. Polarizing device with optically contacted thin film interface for high power density ultraviolet light
JPH07110961A (ja) * 1993-10-14 1995-04-25 Sony Corp 接合プリズム
CN1067118C (zh) * 1994-07-08 2001-06-13 松下电器产业株式会社 磁控管溅射装置
JPH095518A (ja) * 1995-06-19 1997-01-10 Nikon Corp 偏光ビームスプリッター及びその製造方法
JPH09243808A (ja) * 1996-03-14 1997-09-19 Olympus Optical Co Ltd ビームスプリッター
TW304232B (en) * 1996-11-23 1997-05-01 Ind Tech Res Inst The wide band polarizer with multi-layers film
JPH11264904A (ja) * 1998-03-17 1999-09-28 Nikon Corp プリズム型光学素子
US6480330B1 (en) 2000-02-24 2002-11-12 Silicon Valley Group, Inc. Ultraviolet polarization beam splitter for microlithography
US20020005990A1 (en) * 2000-07-11 2002-01-17 Nikon Corporation Optical element formed with optical thin film and exposure apparatus
US6710351B2 (en) * 2001-09-18 2004-03-23 Euv, Llc EUV mirror based absolute incident flux detector

Also Published As

Publication number Publication date
TWI278663B (en) 2007-04-11
SG105589A1 (en) 2004-08-27
US20040061116A1 (en) 2004-04-01
KR100609794B1 (ko) 2006-08-09
US6824654B2 (en) 2004-11-30
US20040179260A1 (en) 2004-09-16
TW200407562A (en) 2004-05-16
JP2004126585A (ja) 2004-04-22
EP1406110A1 (de) 2004-04-07
EP1406110B1 (de) 2010-12-29
CN1329751C (zh) 2007-08-01
CN1514260A (zh) 2004-07-21
KR20040030333A (ko) 2004-04-09

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