DE60324960D1 - Herstellung von hohlräumen in einer siliziumscheibe - Google Patents

Herstellung von hohlräumen in einer siliziumscheibe

Info

Publication number
DE60324960D1
DE60324960D1 DE60324960T DE60324960T DE60324960D1 DE 60324960 D1 DE60324960 D1 DE 60324960D1 DE 60324960 T DE60324960 T DE 60324960T DE 60324960 T DE60324960 T DE 60324960T DE 60324960 D1 DE60324960 D1 DE 60324960D1
Authority
DE
Germany
Prior art keywords
hollows
preparation
insulation layer
silicon disc
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60324960T
Other languages
English (en)
Inventor
Walter Schwarzenbach
Christophe Maleville
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Original Assignee
Soitec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR0216409A external-priority patent/FR2849269B1/fr
Application filed by Soitec SA filed Critical Soitec SA
Application granted granted Critical
Publication of DE60324960D1 publication Critical patent/DE60324960D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/005—Bulk micromachining
    • B81C1/00507—Formation of buried layers by techniques other than deposition, e.g. by deep implantation of elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/764—Air gaps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/266—Bombardment with radiation with high-energy radiation producing ion implantation using masks

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Power Engineering (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Element Separation (AREA)
  • Thin Film Transistor (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Recrystallisation Techniques (AREA)
DE60324960T 2002-12-20 2003-12-19 Herstellung von hohlräumen in einer siliziumscheibe Expired - Lifetime DE60324960D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0216409A FR2849269B1 (fr) 2002-12-20 2002-12-20 Procede de realisation de cavites dans une plaque de silicium
US44812403P 2003-02-20 2003-02-20
PCT/FR2003/003820 WO2004059725A1 (fr) 2002-12-20 2003-12-19 Procede de realisation de cavites dans une plaque de silicium

Publications (1)

Publication Number Publication Date
DE60324960D1 true DE60324960D1 (de) 2009-01-08

Family

ID=32683899

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60324960T Expired - Lifetime DE60324960D1 (de) 2002-12-20 2003-12-19 Herstellung von hohlräumen in einer siliziumscheibe

Country Status (5)

Country Link
EP (1) EP1573802B1 (de)
AT (1) ATE415703T1 (de)
AU (1) AU2003299368A1 (de)
DE (1) DE60324960D1 (de)
WO (1) WO2004059725A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1716592A1 (de) * 2004-02-19 2006-11-02 International Business Machines Corporation Bildung einer strukturierten verbundstruktur des typs silicium auf insulator (soi) bzw. silicium auf nichts(son) durch poröse-si-technik
FR2875947B1 (fr) * 2004-09-30 2007-09-07 Tracit Technologies Nouvelle structure pour microelectronique et microsysteme et procede de realisation
FR2876220B1 (fr) 2004-10-06 2007-09-28 Commissariat Energie Atomique Procede d'elaboration de structures empilees mixtes, a zones isolantes diverses et/ou zones de conduction electrique verticale localisees.
FR2897982B1 (fr) 2006-02-27 2008-07-11 Tracit Technologies Sa Procede de fabrication des structures de type partiellement soi, comportant des zones reliant une couche superficielle et un substrat
FR3000601B1 (fr) * 2012-12-28 2016-12-09 Commissariat Energie Atomique Procede de formation des espaceurs d'une grille d'un transistor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4956314A (en) * 1989-05-30 1990-09-11 Motorola, Inc. Differential etching of silicon nitride
JPH06132262A (ja) * 1992-10-22 1994-05-13 Hitachi Ltd 薄膜のエッチング方法
FR2700065B1 (fr) * 1992-12-28 1995-02-10 Commissariat Energie Atomique Procédé de fabrication d'accéléromètres utilisant la technologie silicium sur isolant.
US5976945A (en) * 1997-11-20 1999-11-02 Vanguard International Semiconductor Corporation Method for fabricating a DRAM cell structure on an SOI wafer incorporating a two dimensional trench capacitor
US6335292B1 (en) * 1999-04-15 2002-01-01 Micron Technology, Inc. Method of controlling striations and CD loss in contact oxide etch
FR2795554B1 (fr) * 1999-06-28 2003-08-22 France Telecom Procede de gravure laterale par trous pour fabriquer des dis positifs semi-conducteurs

Also Published As

Publication number Publication date
EP1573802B1 (de) 2008-11-26
AU2003299368A1 (en) 2004-07-22
EP1573802A1 (de) 2005-09-14
WO2004059725A1 (fr) 2004-07-15
ATE415703T1 (de) 2008-12-15

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