DE60310650D1 - Geschlitztes Substrat und dazugehöriges Herstellungsverfahren - Google Patents

Geschlitztes Substrat und dazugehöriges Herstellungsverfahren

Info

Publication number
DE60310650D1
DE60310650D1 DE60310650T DE60310650T DE60310650D1 DE 60310650 D1 DE60310650 D1 DE 60310650D1 DE 60310650 T DE60310650 T DE 60310650T DE 60310650 T DE60310650 T DE 60310650T DE 60310650 D1 DE60310650 D1 DE 60310650D1
Authority
DE
Germany
Prior art keywords
manufacturing process
associated manufacturing
slotted substrate
slotted
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60310650T
Other languages
English (en)
Other versions
DE60310650T2 (de
Inventor
Thomas H Ottenheimer
Martha A Truninger
Jeffrey S Obert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Development Co LP
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of DE60310650D1 publication Critical patent/DE60310650D1/de
Application granted granted Critical
Publication of DE60310650T2 publication Critical patent/DE60310650T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/1404—Geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14145—Structure of the manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Structure Of Printed Boards (AREA)
DE60310650T 2002-07-30 2003-07-17 Geschlitztes Substrat und dazugehöriges Herstellungsverfahren Expired - Lifetime DE60310650T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US209408 2002-07-30
US10/209,408 US20040021741A1 (en) 2002-07-30 2002-07-30 Slotted substrate and method of making

Publications (2)

Publication Number Publication Date
DE60310650D1 true DE60310650D1 (de) 2007-02-08
DE60310650T2 DE60310650T2 (de) 2007-10-04

Family

ID=30115221

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60310650T Expired - Lifetime DE60310650T2 (de) 2002-07-30 2003-07-17 Geschlitztes Substrat und dazugehöriges Herstellungsverfahren

Country Status (4)

Country Link
US (3) US20040021741A1 (de)
EP (1) EP1386741B1 (de)
JP (1) JP2004058678A (de)
DE (1) DE60310650T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7494596B2 (en) * 2003-03-21 2009-02-24 Hewlett-Packard Development Company, L.P. Measurement of etching
US7204572B2 (en) * 2003-10-01 2007-04-17 Canon Kabushiki Kaisha Ink-jet recording apparatus and control method of said apparatus
US20050219327A1 (en) * 2004-03-31 2005-10-06 Clarke Leo C Features in substrates and methods of forming
JP6620318B2 (ja) * 2014-11-27 2019-12-18 パナソニックＩｐマネジメント株式会社 シート状伸縮性構造体
US11666935B2 (en) 2018-11-15 2023-06-06 Hewlett-Packard Development Company, L.P. Selectively lifting substrates

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US4096626A (en) * 1976-12-27 1978-06-27 International Business Machines Corporation Method of making multi-layer photosensitive glass ceramic charge plate
DE3752259T2 (de) * 1986-12-19 1999-10-14 Applied Materials Inc Bromine-Ätzverfahren für Silizium
US4915718A (en) * 1988-09-28 1990-04-10 On Target Technology, Inc. Fabrication of ink jet nozzles and resulting product
US5066357A (en) * 1990-01-11 1991-11-19 Hewlett-Packard Company Method for making flexible circuit card with laser-contoured vias and machined capacitors
JPH03215043A (ja) 1990-01-19 1991-09-20 Canon Inc インクジェット記録装置のワイパーブレード
DE59105165D1 (de) * 1990-11-01 1995-05-18 Ciba Geigy Ag Vorrichtung zur Aufbereitung oder Vorbereitung von flüssigen Proben für eine chemische Analyse.
EP0495663B1 (de) * 1991-01-18 1997-04-23 Canon Kabushiki Kaisha Tintenstrahleinheit mit Öffnungen und Aufzeichnungsgerät, welches diese verwendet
JP3053936B2 (ja) * 1991-12-04 2000-06-19 キヤノン株式会社 液体噴射記録ヘッド用基体、該基体の製造方法、該基体を用いた液体噴射記録ヘッド、該記録ヘッドの製造方法及び該記録ヘッドを具備する記録装置
US5317346A (en) * 1992-03-04 1994-05-31 Hewlett-Packard Company Compound ink feed slot
US5537133A (en) * 1992-04-02 1996-07-16 Hewlett-Packard Company Restraining element for a print cartridge body to reduce thermally induced stress
US5278584A (en) * 1992-04-02 1994-01-11 Hewlett-Packard Company Ink delivery system for an inkjet printhead
US5300959A (en) * 1992-04-02 1994-04-05 Hewlett-Packard Company Efficient conductor routing for inkjet printhead
EP0594310A3 (en) * 1992-10-23 1994-08-17 Hewlett Packard Co Ink jet printhead and method of manufacture thereof
US5574486A (en) * 1993-01-13 1996-11-12 Tektronix, Inc. Ink jet print heads and methos for preparing them
US5387314A (en) * 1993-01-25 1995-02-07 Hewlett-Packard Company Fabrication of ink fill slots in thermal ink-jet printheads utilizing chemical micromachining
US5378137A (en) * 1993-05-10 1995-01-03 Hewlett-Packard Company Mask design for forming tapered inkjet nozzles
JPH079682A (ja) 1993-06-15 1995-01-13 Ricoh Co Ltd インクジェットヘッド
DE4329728A1 (de) * 1993-09-03 1995-03-09 Microparts Gmbh Düsenplatte für Fluidstrahl-Druckkopf und Verfahren zu deren Herstellung
US5449630A (en) * 1994-05-03 1995-09-12 United Microelectronics Corp. Method for fabricating a trench capacitor structure for dynamic random access memory integrated circuit
JP3244946B2 (ja) 1994-06-22 2002-01-07 株式会社リコー インクジェットヘッド
JPH0890769A (ja) * 1994-09-27 1996-04-09 Sharp Corp ひだ付きダイアフラム型インクジェットヘッド
JPH08142327A (ja) 1994-11-16 1996-06-04 Canon Inc インクジェット記録装置の記録ヘッド
JPH08281960A (ja) * 1995-04-13 1996-10-29 Canon Inc インクジェット記録ヘッド
US5658471A (en) * 1995-09-22 1997-08-19 Lexmark International, Inc. Fabrication of thermal ink-jet feed slots in a silicon substrate
US5786988A (en) * 1996-07-02 1998-07-28 Sandisk Corporation Integrated circuit chips made bendable by forming indentations in their back surfaces flexible packages thereof and methods of manufacture
KR100205321B1 (ko) * 1996-12-30 1999-07-01 구본준 크랙방지 패턴을 갖는 반도체소자의 제조방법
JPH10193598A (ja) 1997-01-14 1998-07-28 Nec Niigata Ltd インクジェットヘッド
US5882982A (en) * 1997-01-16 1999-03-16 Vlsi Technology, Inc. Trench isolation method
US5910725A (en) * 1997-03-27 1999-06-08 Digital Equipment Corporation Integrated circuit output power supply transient voltage protection circuit
US5988786A (en) * 1997-06-30 1999-11-23 Hewlett-Packard Company Articulated stress relief of an orifice membrane
JP3821255B2 (ja) 1997-07-07 2006-09-13 富士写真フイルム株式会社 インクジェットヘッド用圧電素子の作製方法
US5847725A (en) * 1997-07-28 1998-12-08 Hewlett-Packard Company Expansion relief for orifice plate of thermal ink jet print head
US6106096A (en) * 1997-12-15 2000-08-22 Lexmark International, Inc. Printhead stress relief
US6271102B1 (en) 1998-02-27 2001-08-07 International Business Machines Corporation Method and system for dicing wafers, and semiconductor structures incorporating the products thereof
US6204182B1 (en) * 1998-03-02 2001-03-20 Hewlett-Packard Company In-situ fluid jet orifice
JPH11284060A (ja) * 1998-03-27 1999-10-15 Hitachi Ltd 半導体装置及びその製造方法
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JP2000006409A (ja) 1998-06-23 2000-01-11 Casio Comput Co Ltd サーマルインクジェットヘッド
JP3678025B2 (ja) 1998-11-06 2005-08-03 セイコーエプソン株式会社 インクジェット式記録ヘッド
JP4494546B2 (ja) 1999-03-02 2010-06-30 株式会社リコー 打抜加工用基板、打抜基板及び該打抜基板の製造方法
US6331055B1 (en) * 1999-08-30 2001-12-18 Hewlett-Packard Company Inkjet printhead with top plate bubble management
US6184570B1 (en) * 1999-10-28 2001-02-06 Ericsson Inc. Integrated circuit dies including thermal stress reducing grooves and microelectronic packages utilizing the same
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US6536477B1 (en) * 2000-10-12 2003-03-25 Nanostream, Inc. Fluidic couplers and modular microfluidic systems
EP1336487B1 (de) * 2002-02-15 2007-04-18 Brother Kogyo Kabushiki Kaisha Tintenstrahldruckkopf
US6979077B2 (en) * 2002-02-20 2005-12-27 Brother Kogyo Kabushiki Kaisha Ink-jet head and ink-jet printer having ink-jet head

Also Published As

Publication number Publication date
JP2004058678A (ja) 2004-02-26
US20040021743A1 (en) 2004-02-05
EP1386741A1 (de) 2004-02-04
EP1386741B1 (de) 2006-12-27
US20040032465A1 (en) 2004-02-19
US20040021741A1 (en) 2004-02-05
US6938985B2 (en) 2005-09-06
DE60310650T2 (de) 2007-10-04

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: HEWLETT-PACKARD DEVELOPMENT CO., L.P., HOUSTON, US

8328 Change in the person/name/address of the agent

Representative=s name: SCHOPPE, ZIMMERMANN, STOECKELER & ZINKLER, 82049 P

8364 No opposition during term of opposition