DE60308645D1 - Optische anordnung und verfahren dazu - Google Patents
Optische anordnung und verfahren dazuInfo
- Publication number
- DE60308645D1 DE60308645D1 DE60308645T DE60308645T DE60308645D1 DE 60308645 D1 DE60308645 D1 DE 60308645D1 DE 60308645 T DE60308645 T DE 60308645T DE 60308645 T DE60308645 T DE 60308645T DE 60308645 D1 DE60308645 D1 DE 60308645D1
- Authority
- DE
- Germany
- Prior art keywords
- rays
- serves
- optical unit
- method therefor
- optical arrangement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/061—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements characterised by a multilayer structure
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/062—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements the element being a crystal
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/064—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements having a curved surface
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Theoretical Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- General Engineering & Computer Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Lenses (AREA)
- Glass Compositions (AREA)
- Prostheses (AREA)
- Optical Elements Other Than Lenses (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Optical Couplings Of Light Guides (AREA)
- Light Guides In General And Applications Therefor (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0207546 | 2002-06-19 | ||
FR0207546A FR2841371B1 (fr) | 2002-06-19 | 2002-06-19 | Ensemble optique et procede associe |
FR0300623 | 2003-01-21 | ||
FR0300623A FR2850171B1 (fr) | 2003-01-21 | 2003-01-21 | Dispositif optique pour applications rayons x |
PCT/FR2003/001896 WO2004001770A1 (fr) | 2002-06-19 | 2003-06-19 | Ensemble optique et procede associe |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60308645D1 true DE60308645D1 (de) | 2006-11-09 |
DE60308645T2 DE60308645T2 (de) | 2007-10-18 |
Family
ID=30001927
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60308645T Expired - Lifetime DE60308645T2 (de) | 2002-06-19 | 2003-06-19 | Optische anordnung und verfahren dazu |
DE60325853T Expired - Lifetime DE60325853D1 (de) | 2002-06-19 | 2003-06-19 | Optische vorrichtung für röntgenstrahlungsanwendungen |
DE20320792U Expired - Lifetime DE20320792U1 (de) | 2002-06-19 | 2003-06-19 | Optische Anordnung und zugehörige Vorrichtung |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60325853T Expired - Lifetime DE60325853D1 (de) | 2002-06-19 | 2003-06-19 | Optische vorrichtung für röntgenstrahlungsanwendungen |
DE20320792U Expired - Lifetime DE20320792U1 (de) | 2002-06-19 | 2003-06-19 | Optische Anordnung und zugehörige Vorrichtung |
Country Status (8)
Country | Link |
---|---|
US (2) | US7430277B2 (de) |
EP (3) | EP1732087A3 (de) |
JP (2) | JP2005530168A (de) |
CN (2) | CN1324613C (de) |
AT (2) | ATE421152T1 (de) |
AU (2) | AU2003264670A1 (de) |
DE (3) | DE60308645T2 (de) |
WO (2) | WO2004001770A1 (de) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030199425A1 (en) * | 1997-06-27 | 2003-10-23 | Desai Neil P. | Compositions and methods for treatment of hyperplasia |
DE10254026C5 (de) * | 2002-11-20 | 2009-01-29 | Incoatec Gmbh | Reflektor für Röntgenstrahlung |
US20060040091A1 (en) | 2004-08-23 | 2006-02-23 | Bletsos Ioannis V | Breathable low-emissivity metalized sheets |
DE102005057700A1 (de) * | 2005-11-25 | 2007-06-06 | Axo Dresden Gmbh | Röntgen-Optisches-Element |
JP4278108B2 (ja) | 2006-07-07 | 2009-06-10 | 株式会社リガク | 超小角x線散乱測定装置 |
FR2918501B1 (fr) * | 2007-07-02 | 2009-11-06 | Xenocs Soc Par Actions Simplif | Dispositif de delivrance d'un faisceau de rayons x a haute energie |
US7706503B2 (en) * | 2007-11-20 | 2010-04-27 | Rigaku Innovative Technologies, Inc. | X-ray optic with varying focal points |
ATE545858T1 (de) * | 2007-12-31 | 2012-03-15 | Xenocs S A | Röntgenstrahlvorrichtung |
JP2010014418A (ja) * | 2008-07-01 | 2010-01-21 | Japan Atomic Energy Agency | 多層膜回折格子分光装置 |
US7741626B2 (en) * | 2008-09-12 | 2010-06-22 | Cymer, Inc. | Spectral purity filters and methods therefor |
US8050380B2 (en) * | 2009-05-05 | 2011-11-01 | Media Lario, S.R.L. | Zone-optimized mirrors and optical systems using same |
US8249220B2 (en) * | 2009-10-14 | 2012-08-21 | Rigaku Innovative Technologies, Inc. | Multiconfiguration X-ray optical system |
US8208602B2 (en) * | 2010-02-22 | 2012-06-26 | General Electric Company | High flux photon beams using optic devices |
US8311184B2 (en) | 2010-08-30 | 2012-11-13 | General Electric Company | Fan-shaped X-ray beam imaging systems employing graded multilayer optic devices |
US8488740B2 (en) * | 2010-11-18 | 2013-07-16 | Panalytical B.V. | Diffractometer |
FR2967887B1 (fr) | 2010-11-26 | 2018-01-19 | General Electric Company | Mammographe compact, et procede de mammographie associe |
US8744048B2 (en) | 2010-12-28 | 2014-06-03 | General Electric Company | Integrated X-ray source having a multilayer total internal reflection optic device |
KR101332502B1 (ko) * | 2011-06-14 | 2013-11-26 | 전남대학교산학협력단 | 국부적 방사선 치료용 x―선 바늘 모듈 |
US8761346B2 (en) | 2011-07-29 | 2014-06-24 | General Electric Company | Multilayer total internal reflection optic devices and methods of making and using the same |
CN102903413B (zh) * | 2012-10-30 | 2015-06-03 | 同济大学 | 一种在小尺寸背光下工作的四通道kb显微成像系统 |
US20140161233A1 (en) | 2012-12-06 | 2014-06-12 | Bruker Axs Gmbh | X-ray apparatus with deflectable electron beam |
EP2762862B1 (de) | 2013-01-30 | 2017-03-08 | Bruker AXS GmbH | XRF-Messvorrichtung zum Erkennen von Kontaminierungen auf einem Waferkegel |
EP2896960B1 (de) * | 2014-01-15 | 2017-07-26 | PANalytical B.V. | Röntgenvorrichtung für SAXS und Bragg-Brentano Messungen |
JP6202684B2 (ja) * | 2014-06-05 | 2017-09-27 | 株式会社リガク | X線回折装置 |
JP6069609B2 (ja) * | 2015-03-26 | 2017-02-01 | 株式会社リガク | 二重湾曲x線集光素子およびその構成体、二重湾曲x線分光素子およびその構成体の製造方法 |
CN105092618A (zh) * | 2015-09-18 | 2015-11-25 | 北京师范大学 | 一种微束能量色散的x射线衍射仪及其使用方法 |
CN105873344A (zh) * | 2016-03-22 | 2016-08-17 | 中国工程物理研究院流体物理研究所 | 一种基于横向梯度多层膜反射元件的x射线单能成像方法 |
US10677744B1 (en) * | 2016-06-03 | 2020-06-09 | U.S. Department Of Energy | Multi-cone x-ray imaging Bragg crystal spectrometer |
FR3059434B1 (fr) * | 2016-11-29 | 2019-05-17 | Centre National De La Recherche Scientifique - Cnrs | Composant de selection spectrale pour radiations xuv |
CN106706157B (zh) * | 2017-01-11 | 2023-06-13 | 中国工程物理研究院激光聚变研究中心 | 一种基于准同视轴的icf热斑电子温度探测设备 |
KR102621750B1 (ko) * | 2019-06-24 | 2024-01-05 | 에스엠에스 그룹 게엠베하 | 다결정 제품의 소재 특성 측정 장치 및 방법 |
JP2022108210A (ja) * | 2021-01-12 | 2022-07-25 | 国立大学法人 東京大学 | ミラーの設計方法、および該設計方法における設計式が成り立つ反射面を備えた非点収差制御ミラー |
JP2022108209A (ja) * | 2021-01-12 | 2022-07-25 | 国立大学法人 東京大学 | ミラーの設計方法、および該設計方法における設計式が成り立つ反射面を備えた非点収差制御ミラー |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL8300421A (nl) | 1983-02-04 | 1984-09-03 | Philips Nv | Roentgen onderzoek apparaat met dubbel focusserend kristal. |
US4599741A (en) * | 1983-11-04 | 1986-07-08 | USC--Dept. of Materials Science | System for local X-ray excitation by monochromatic X-rays |
US4562583A (en) * | 1984-01-17 | 1985-12-31 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Spectral slicing X-ray telescope with variable magnification |
ATE121555T1 (de) | 1988-03-11 | 1995-05-15 | Rosser Roy J | Optische vorrichtungen und methoden für ihre herstellung. |
US5127028A (en) | 1990-08-01 | 1992-06-30 | Wittry David B | Diffractord with doubly curved surface steps |
US5142561A (en) | 1991-05-28 | 1992-08-25 | Grumman Aerospace Corporation | X-ray lithography scanning mirror |
US5373544A (en) * | 1992-08-12 | 1994-12-13 | Siemens Aktiengesellschaft | X-ray diffractometer |
US5646976A (en) * | 1994-08-01 | 1997-07-08 | Osmic, Inc. | Optical element of multilayered thin film for X-rays and neutrons |
US5619548A (en) | 1995-08-11 | 1997-04-08 | Oryx Instruments And Materials Corp. | X-ray thickness gauge |
DE19615366B4 (de) | 1996-04-19 | 2006-02-09 | Carl Zeiss Jena Gmbh | Verfahren und Einrichtung zum Nachweis physikalischer, chemischer, biologischer oder biochemischer Reaktionen und Wechselwirkungen |
US6041099A (en) * | 1998-02-19 | 2000-03-21 | Osmic, Inc. | Single corner kirkpatrick-baez beam conditioning optic assembly |
DE19833524B4 (de) | 1998-07-25 | 2004-09-23 | Bruker Axs Gmbh | Röntgen-Analysegerät mit Gradienten-Vielfachschicht-Spiegel |
US6285506B1 (en) * | 1999-01-21 | 2001-09-04 | X-Ray Optical Systems, Inc. | Curved optical device and method of fabrication |
US6278764B1 (en) | 1999-07-22 | 2001-08-21 | The Regents Of The Unviersity Of California | High efficiency replicated x-ray optics and fabrication method |
US6317483B1 (en) * | 1999-11-29 | 2001-11-13 | X-Ray Optical Systems, Inc. | Doubly curved optical device with graded atomic planes |
US6829327B1 (en) * | 2000-09-22 | 2004-12-07 | X-Ray Optical Systems, Inc. | Total-reflection x-ray fluorescence apparatus and method using a doubly-curved optic |
JP2005512020A (ja) | 2001-06-19 | 2005-04-28 | エックス−レイ オプティカル システムズ インコーポレーテッド | X線蛍光分光システム及びx線蛍光分光方法 |
DE10254026C5 (de) | 2002-11-20 | 2009-01-29 | Incoatec Gmbh | Reflektor für Röntgenstrahlung |
-
2003
- 2003-06-19 US US10/518,284 patent/US7430277B2/en not_active Expired - Fee Related
- 2003-06-19 AT AT03760747T patent/ATE421152T1/de not_active IP Right Cessation
- 2003-06-19 EP EP06120020A patent/EP1732087A3/de not_active Ceased
- 2003-06-19 AU AU2003264670A patent/AU2003264670A1/en not_active Abandoned
- 2003-06-19 AU AU2003260613A patent/AU2003260613A1/en not_active Abandoned
- 2003-06-19 EP EP03760756A patent/EP1468428B1/de not_active Expired - Lifetime
- 2003-06-19 DE DE60308645T patent/DE60308645T2/de not_active Expired - Lifetime
- 2003-06-19 JP JP2004514950A patent/JP2005530168A/ja active Pending
- 2003-06-19 WO PCT/FR2003/001896 patent/WO2004001770A1/fr active IP Right Grant
- 2003-06-19 DE DE60325853T patent/DE60325853D1/de not_active Expired - Lifetime
- 2003-06-19 AT AT03760756T patent/ATE341083T1/de active
- 2003-06-19 CN CNB038195275A patent/CN1324613C/zh not_active Expired - Lifetime
- 2003-06-19 WO PCT/FR2003/001879 patent/WO2004001769A1/fr active Application Filing
- 2003-06-19 EP EP03760747A patent/EP1514279B1/de not_active Expired - Lifetime
- 2003-06-19 DE DE20320792U patent/DE20320792U1/de not_active Expired - Lifetime
- 2003-06-19 CN CNB038145081A patent/CN1332399C/zh not_active Expired - Fee Related
- 2003-06-19 US US10/506,716 patent/US7248670B2/en not_active Expired - Lifetime
- 2003-06-19 JP JP2004514960A patent/JP2005530170A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
WO2004001769A1 (fr) | 2003-12-31 |
US20050117239A1 (en) | 2005-06-02 |
EP1468428A1 (de) | 2004-10-20 |
CN1332399C (zh) | 2007-08-15 |
DE60308645T2 (de) | 2007-10-18 |
CN1675720A (zh) | 2005-09-28 |
WO2004001769A8 (fr) | 2005-01-06 |
EP1514279B1 (de) | 2009-01-14 |
DE60325853D1 (de) | 2009-03-05 |
ATE421152T1 (de) | 2009-01-15 |
US7430277B2 (en) | 2008-09-30 |
AU2003260613A1 (en) | 2004-01-06 |
US20060018429A1 (en) | 2006-01-26 |
JP2005530170A (ja) | 2005-10-06 |
WO2004001770A1 (fr) | 2003-12-31 |
US7248670B2 (en) | 2007-07-24 |
ATE341083T1 (de) | 2006-10-15 |
EP1514279A1 (de) | 2005-03-16 |
EP1468428B1 (de) | 2006-09-27 |
EP1732087A2 (de) | 2006-12-13 |
AU2003264670A1 (en) | 2004-01-06 |
EP1732087A3 (de) | 2007-03-28 |
CN1324613C (zh) | 2007-07-04 |
DE20320792U1 (de) | 2005-05-04 |
JP2005530168A (ja) | 2005-10-06 |
CN1662999A (zh) | 2005-08-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |