ATE467114T1 - Streumesser und verfahren zur untersuchung einer oberfläche - Google Patents

Streumesser und verfahren zur untersuchung einer oberfläche

Info

Publication number
ATE467114T1
ATE467114T1 AT04712134T AT04712134T ATE467114T1 AT E467114 T1 ATE467114 T1 AT E467114T1 AT 04712134 T AT04712134 T AT 04712134T AT 04712134 T AT04712134 T AT 04712134T AT E467114 T1 ATE467114 T1 AT E467114T1
Authority
AT
Austria
Prior art keywords
radiation beam
screen
scatterometer
examining
incident radiation
Prior art date
Application number
AT04712134T
Other languages
English (en)
Inventor
Sipke Wadman
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE467114T1 publication Critical patent/ATE467114T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AT04712134T 2003-02-28 2004-02-18 Streumesser und verfahren zur untersuchung einer oberfläche ATE467114T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03100511 2003-02-28
PCT/IB2004/050125 WO2004077033A1 (en) 2003-02-28 2004-02-18 A scatterometer and a method for inspecting a surface

Publications (1)

Publication Number Publication Date
ATE467114T1 true ATE467114T1 (de) 2010-05-15

Family

ID=32921621

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04712134T ATE467114T1 (de) 2003-02-28 2004-02-18 Streumesser und verfahren zur untersuchung einer oberfläche

Country Status (7)

Country Link
US (1) US7248368B2 (de)
EP (1) EP1599720B1 (de)
JP (1) JP4824541B2 (de)
CN (1) CN1756948B (de)
AT (1) ATE467114T1 (de)
DE (1) DE602004027006D1 (de)
WO (1) WO2004077033A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100460861C (zh) * 2005-08-01 2009-02-11 中国科学院化学研究所 大角小角兼备的时间分辨二维激光光散射仪
WO2007020554A1 (en) 2005-08-15 2007-02-22 Koninklijke Philips Electronics, N.V. Dual beam set-up for scatterometer
US8422007B2 (en) 2005-12-23 2013-04-16 Koninklijke Philips Electronics N.V. Optical measurement device with reduced contact area
US7872754B2 (en) 2006-04-18 2011-01-18 Koninklijke Philips Electronics N.V. Optical measurement device
EP2010891A1 (de) 2006-04-18 2009-01-07 Koninklijke Philips Electronics N.V. Optische messvorrichtung
RU2473887C2 (ru) 2006-10-05 2013-01-27 Конинклейке Филипс Электроникс Н.В. Устройство и способ для наблюдения поверхности образца
CN102419315B (zh) * 2011-09-08 2015-09-30 苏州汉朗光电有限公司 近晶态液晶空间散射度测量方法和装置
FR3061301B1 (fr) * 2016-12-26 2020-09-04 Commissariat Energie Atomique Procede d'observation d'un objet
JP7069328B2 (ja) * 2018-09-06 2022-05-17 日立Astemo株式会社 表面測定方法、部品の製造方法、部品の検査方法および部品の測定装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60228910A (ja) * 1984-04-27 1985-11-14 Nissan Motor Co Ltd 表面欠陥検査装置
GB2159271B (en) * 1984-04-27 1988-05-18 Nissan Motor Surface flaw detecting method and apparatus
DE3731171A1 (de) * 1987-09-17 1989-03-30 Gerd Prof Selbach Schartigkeitsmessgeraet
US5241369A (en) * 1990-10-01 1993-08-31 Mcneil John R Two-dimensional optical scatterometer apparatus and process
DE4343832A1 (de) * 1993-12-22 1995-06-29 Bayer Ag Substituierte 1-Arylpyrazole
IL113428A0 (en) * 1995-04-20 1995-07-31 Yissum Res Dev Co Glossmeter
US5880843A (en) * 1997-09-03 1999-03-09 Vitro Flotado, S.A. De C.V. Apparatus and method for determining the optical distortion of a transparent substrate
WO2000037923A1 (en) * 1998-12-21 2000-06-29 Koninklijke Philips Electronics N.V. Scatterometer
DE19954183C2 (de) * 1999-11-08 2003-07-31 Autronic Melchers Gmbh Verfahren und Einrichtung zum Messen und Bewerten des Streuverhaltens von Oberflächen
AUPR420201A0 (en) * 2001-04-04 2001-05-03 Varian Australia Pty Ltd Measuring specular reflectance of a sample

Also Published As

Publication number Publication date
CN1756948B (zh) 2010-05-26
CN1756948A (zh) 2006-04-05
JP4824541B2 (ja) 2011-11-30
DE602004027006D1 (de) 2010-06-17
US20060066862A1 (en) 2006-03-30
EP1599720A1 (de) 2005-11-30
WO2004077033A1 (en) 2004-09-10
EP1599720B1 (de) 2010-05-05
US7248368B2 (en) 2007-07-24
JP2006519380A (ja) 2006-08-24

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Legal Events

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